JPS5898935A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5898935A
JPS5898935A JP56197851A JP19785181A JPS5898935A JP S5898935 A JPS5898935 A JP S5898935A JP 56197851 A JP56197851 A JP 56197851A JP 19785181 A JP19785181 A JP 19785181A JP S5898935 A JPS5898935 A JP S5898935A
Authority
JP
Japan
Prior art keywords
oxide film
silicon
silicon oxide
semiconductor device
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56197851A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427692B2 (enExample
Inventor
Kohei Higuchi
行平 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56197851A priority Critical patent/JPS5898935A/ja
Publication of JPS5898935A publication Critical patent/JPS5898935A/ja
Publication of JPH0427692B2 publication Critical patent/JPH0427692B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/014—
    • H10W10/17—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)
JP56197851A 1981-12-09 1981-12-09 半導体装置の製造方法 Granted JPS5898935A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56197851A JPS5898935A (ja) 1981-12-09 1981-12-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56197851A JPS5898935A (ja) 1981-12-09 1981-12-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5898935A true JPS5898935A (ja) 1983-06-13
JPH0427692B2 JPH0427692B2 (enExample) 1992-05-12

Family

ID=16381387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56197851A Granted JPS5898935A (ja) 1981-12-09 1981-12-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5898935A (enExample)

Also Published As

Publication number Publication date
JPH0427692B2 (enExample) 1992-05-12

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