JPS5895260A - Separating board - Google Patents

Separating board

Info

Publication number
JPS5895260A
JPS5895260A JP56194136A JP19413681A JPS5895260A JP S5895260 A JPS5895260 A JP S5895260A JP 56194136 A JP56194136 A JP 56194136A JP 19413681 A JP19413681 A JP 19413681A JP S5895260 A JPS5895260 A JP S5895260A
Authority
JP
Japan
Prior art keywords
separation
glass plate
etched
glass
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56194136A
Other languages
Japanese (ja)
Inventor
Yoshitaka Miyagawa
宮川 吉隆
Mikio Aramata
幹夫 荒又
Yoshihiro Kubota
芳宏 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP56194136A priority Critical patent/JPS5895260A/en
Publication of JPS5895260A publication Critical patent/JPS5895260A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00Compositions for glass with special properties
    • C03C4/04Compositions for glass with special properties for photosensitive glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/002Other surface treatment of glass not in the form of fibres or filaments by irradiation by ultraviolet light
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/60Construction of the column
    • G01N30/6095Micromachined or nanomachined, e.g. micro- or nanosize

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Thermal Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PURPOSE:To easily obtain a samll-sized and highly reproducible separating board having the high efficiency of separation to separate each component from a mixture of various compounds, by using a photosensitive glass plate as a base plate and forming the flow passage of fluid on the surface of the base plate by photoetching. CONSTITUTION:A negative mask having a pattern for flow passage 2 shown in the figure is laid on a well-known photosensitive glasspalte (Ex. ''Photoform '' glass manufactured by CORNING GLASS Co. Ltd., in U.S.A.) including photosensitive elements such as gold and silver, and after irradiating ultraviolet rays, the mask is removed and the glass plate is heated at 500 deg.C for 1hr to crystallize the exposed part. After irradiating ultraviolet rays to the whole surface for about 5min, the crystallized part is etched by using 10% hydrofluoric acid to form an etched part on the glass plate 1. Subsequently the etched part is trated with n-dodecanol solution of silane or siloxane to melt and adhere a hard glass plate on the etched surface of the glass plate 1 and the whole is heated at 850 deg.C to obtain a separating board having ceramic construction. Thus a thin, small-sized and highly productive separating board having the high efficiency of separation is obtained.

Description

【発明の詳細な説明】 本発明は分離板、特には化合物の分離などに好適とされ
る感光性ガラスを基板としてなる分離板に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a separation plate, and particularly to a separation plate using a photosensitive glass substrate suitable for separation of compounds.

従来、各棟の化合物を分離する手段としては立体クロマ
トグラフの原理にもとづいて、多孔性のガラス粉末を充
填したガラスまたは金員製の簡または管からなる分離板
が使用されているが、これは分離効率がわるく、それら
の化合物が分離し難いものである場合、さらにはその分
離効率を高めるためには、必然的にその簡または管を極
細状の長いものにする必要かあ・す、したがってこれに
は現今の小型化、省エネルギーという要請には合致しな
いという不利があるほか、これはまた四−め分離機能を
もつものを再現性よく製造することができず、同一物質
の分離を行なう場合でも各装置毎にその分離操作の条件
設定をしなければならないという欠点があった。
Conventionally, separation plates made of glass or metal tubes filled with porous glass powder have been used as a means of separating compounds in each building, based on the principle of stereochromatography. If the separation efficiency is poor and the compounds are difficult to separate, it is necessary to make the tube or tube extremely thin and long in order to increase the separation efficiency. Therefore, this method has the disadvantage that it does not meet the current demands for miniaturization and energy saving, and it also makes it impossible to manufacture products with a fourth separation function with good reproducibility, which separates the same substance. However, the disadvantage is that the conditions for the separation operation must be set for each device.

本発明はこのような不利を解決した化合物分離用の分離
板に関するもので、これは流体の流通経路を写真蝕刻に
よってその表面に設けてなる感光性ガラスを基板として
なることを特徴とするものである。
The present invention relates to a separation plate for separating compounds that solves these disadvantages, and is characterized in that the plate is made of photosensitive glass as a substrate, on the surface of which a fluid flow path is provided by photolithography. be.

これを説明すると本発明者らは分離効率がよく、しかも
安価に*産することのできる分離板について種々検討の
結果、従来公知の分離筒または管における器材を感光性
ガラス材とし、その表面に写真蝕刻で流体の流通経路を
形成させ、これを基板として分離板を作ったところ、良
好な分離効果の得られることを艶出し、これについてさ
らに研究を進めた結果、感光ガラス上への流体の流通経
路形成は例えば露光、熱処理、エツチングによる公知の
写真技術で充分のMlfが得られること、これによれば
分離板の平面化、小型化が画れること、さらには同一形
状、同一性能のものを極めて容易にしかも再現性よく得
ることができることを確認して本発明を完成させた。
To explain this, the present inventors have conducted various studies on separation plates that have good separation efficiency and can be produced at low cost. By forming a fluid flow path using photoetching and using this as a substrate to make a separation plate, we found that a good separation effect could be obtained.As a result of further research on this, we found that it was possible to create a fluid flow path on photosensitive glass. The distribution channel can be formed by using known photographic techniques such as exposure, heat treatment, and etching to obtain a sufficient Mlf, and by doing so, the separation plate can be flattened and miniaturized, and it can also be made with the same shape and performance. The present invention was completed by confirming that it can be obtained extremely easily and with good reproducibility.

本発明の分離板の集材である感光性ガラスは公知のもの
でよく、これは例えば珪酸とLl、0、KOlN ax
 O、Ba Oなどのアルカリまたはアルカリ土類金員
酸化物および金、釦、鍋などの感光成分を必須成分とし
てなるものであるが、これはまた必要に応じCe O2
、Mn O2などの増感剤、還元剤すしてのでん粉、さ
らにはエツチング速度向上剤としてのアルミナなどを任
意成分として含むものであってもよい。
The photosensitive glass used as the material for the separator plate of the present invention may be a known one, for example, a combination of silicic acid, Ll,0, KOIN ax
The essential components are alkali or alkaline earth metal oxides such as O, BaO, and photosensitive components such as gold, buttons, and pots, but it also contains CeO2 as necessary.
, a sensitizer such as MnO2, starch as a reducing agent, and alumina as an etching rate improver.

この感光性ガラスは上記したようにその表面に写真蝕刻
で流体の流通経路を形成゛さセるのであるが、これには
例えば感光性ガラス面上に所望の画像をもつネガマスク
を電ねてから、これに紫外線を照射して露光させ、つい
でこれを400℃〜500℃に熱処理して露光部分を結
晶化させたQ)ち、この部分をフッ酸などでエツチング
すればよい。なお、この画像形成に必要とされるネガマ
スクの作製に当っては、予じめ例えば40〜50倍に拡
大した所望形状の原版を設計してこれを縮少することが
よく、また上記したエツチングに当っては露光後の熱処
理で結晶化させたものの全面に再度紫外線を照射し、さ
らに必要に応じ研磨を施してから゛フッ酸などでこの結
晶化部分を除去するようにすることがよく、これによっ
て得られた縮充性ガラス上の画像についてはその機械的
強度を向上させるために、再度700〜900℃程1;
熱処理してこれをセラミック化することがよし)。
As mentioned above, fluid flow channels are formed on the surface of this photosensitive glass by photo-etching. This is exposed by irradiation with ultraviolet rays, and then heat-treated at 400° C. to 500° C. to crystallize the exposed portion.Q) Then, this portion may be etched with hydrofluoric acid or the like. Note that when producing the negative mask required for this image formation, it is best to design an original in the desired shape that is magnified, for example, 40 to 50 times, and then reduce it. In this case, the entire surface of the material that has been crystallized by heat treatment after exposure is irradiated with ultraviolet rays again, and if necessary, the crystallized portion is removed using hydrofluoric acid or the like. In order to improve the mechanical strength of the image on the retractable glass obtained in this way, the temperature was increased to 700 to 900°C.
It is best to heat treat it to make it into a ceramic.)

添付の図面は本発明による分離板製作図の一例を示した
もので、第1図は素材としての感光性がラス1を示した
ものであり、これは例えば−辺が100−の方形のもの
として提供され、これにはその一辺にこれをガスグロマ
トグラフ用として用いるときのボート4ケが設けられて
いる。第2図だものであり、これは縮少されたときに直
径02■、長さ90■の直線経路が0.4−間隔で22
5本並列に連絡され、20250−の直線部分が形成さ
れるように設計されている。そして実際の作業はこの拡
大図をリングラフ技術で陥少したものをネガマスクとし
、これを感光性ガラスの表面C二帖隨したのち、この上
部から紫外線を照射してこの図形を感光性ガラスに焼付
け、ついでこれを約500℃に加熱してこの部分を結晶
化させ、つき゛にこの部分をフッ酸などでエツチングす
れ−よよI/)。
The attached drawings show an example of a drawing for producing a separation plate according to the present invention. Figure 1 shows a lath 1 having a photosensitivity as a material, and this is, for example, a rectangular one with sides of It is provided as a gas chromatograph, and one side of it is equipped with four boats for use in gas chromatographs. Figure 2 shows that when reduced, a straight path with a diameter of 02 cm and a length of 90 cm is 0.4-22 mm apart.
It is designed so that five of them are connected in parallel to form a straight section of 20250-. The actual work is to make this enlarged image into a negative mask using the phosphorographic technique, and then print it on the surface of the photosensitive glass.Ultraviolet rays are irradiated from above to print this pattern onto the photosensitive glass. Next, heat this to about 500°C to crystallize this part, and then etch this part with hydrofluoric acid or the like.

本発明の分離板はこのようにして得た所(σ〕画像をも
つ感光性ガラスを基板とし、この上面および/または下
面にガラス板を載置もしくは接看することによって作ら
れるが、これは例えば1ilNした図面から理解される
ように100−の板状体(二10250mの長大な直線
経路をもつものとされるので、各種化合物の相灯モル感
度差による分離、精製を効率よく行なうことができるほ
か、これはその画像がネガマスクの使用により容易にか
つ再現性よく得られるので、’jl産性も制いという優
位性をもつもの(二なる。
The separation plate of the present invention is made by using the photosensitive glass having the image (σ) thus obtained as a substrate, and placing or touching a glass plate on the upper and/or lower surfaces of the photosensitive glass. For example, as can be understood from the 1ilN drawing, it is assumed that a 100-plate body (210,250 m long straight path) can be efficiently separated and purified by the difference in phase molar sensitivity of various compounds. In addition to this, the image can be obtained easily and with good reproducibility by using a negative mask, which has the advantage of controlling productivity.

なお、本発明の分離板は上述のようにして慢だ感光性ガ
ラス面上のm像面をオルガノシランおよび/またはオル
ガノシロキチンで処理すると、その分離効率をさらに向
上することができる。この処理11としては例えばメチ
ルトリメトキシシラン、r−アミノプロピルトリエトキ
シシラン1、ビニルトリクロロシラン、ビニルトリエト
キシシラン、ヘキサメチルシラザンなどのオルガノシラ
ン類、ヘキナメチルトリシロキサン、オクタメチルテト
ラシロキチンのような各種環状シロキサン、直鎖状ある
いは三次元構造のメチルポリシロキサン、メチ先フェニ
ルポリシロキチンなどのオルガノシロキサン類、さらに
はこれらをフッ素化してなるフッ累蜜性νロキナンなど
が挙げられるが、この処理に当っては常温で液状、樹脂
状、ゴム状のこれらの化合物をリッピングまたは溶剤溶
液あるいはエマルジョンとし、これで上記した感光性ガ
ラス面上のmsの内面を処理し、ついで乾燥させて、こ
の部位にシリコーン模を形成させればよい。
The separation efficiency of the separation plate of the present invention can be further improved by treating the m-image plane on the photosensitive glass surface with organosilane and/or organosilochitin as described above. This treatment 11 includes, for example, organosilanes such as methyltrimethoxysilane, r-aminopropyltriethoxysilane 1, vinyltrichlorosilane, vinyltriethoxysilane, and hexamethylsilazane, hequinamethyltrisiloxane, and octamethyltetrasiloxane. Examples include organosiloxanes such as various cyclic siloxanes, linear or three-dimensional structured methylpolysiloxanes, methi-terminated phenylpolysiloxanes, and fluorinated ν-rokinanes obtained by fluorinating these. In this treatment, these compounds in the form of liquid, resin, or rubber at room temperature are ripped or made into a solvent solution or emulsion, and the inner surface of the ms on the photosensitive glass surface described above is treated with this, and then dried. A silicone pattern may be formed in this area.

また、本発明の分離板は上記したオルガノシラン処理に
当ってその感光性ガラス面上のii!1g1.内面をま
ずアミノシランで処理し、ついでこれをニトロベンゼン
と反応させてからこのニトロ基な還元し、つぎにN a
 N Ozでジアゾ化すると、この画像面が蛋白質、ア
ミノ酸の固定化機能をもつようになるので、これによれ
ばこの分離板を種々の#菓の不溶化にも応用することが
できるという有利性が与えられる。
Further, the separating plate of the present invention can be used on the photosensitive glass surface during the above-mentioned organosilane treatment. 1g1. The inner surface is first treated with aminosilane, which is then reacted with nitrobenzene to reduce this nitro group, and then with Na
When diazotized with NOz, this image plane has the function of immobilizing proteins and amino acids, which has the advantage that this separation plate can be applied to the insolubilization of various types of sweets. Given.

つぎに本発明の実施例をあげる。Next, examples of the present invention will be given.

実施例 100mmX 100mmX 6−の感光性ガラス板・
フォトフオームガラス(米国コーニング・グラス社製・
商品名)に第2図に示したパターンをもつネガマスクを
重ね、これに60アンペアのアーク燈を用いて紫外線を
5分間照射したのち、ネガマスクを外してから500℃
で1時間の熱処理を行なってこの露光部分を結晶化させ
た。つぎに、この全面に前記アーク燈を用いて紫外線を
5分間照射したのち、これを10%のフッ化水素酸を用
いて室温で処理してこの結晶化部分をエツチングして、
この感光性ガラス板上に第2図I:示した蝕刻部を形成
させた。
Example 100mm x 100mm x 6-photosensitive glass plate
Photoform glass (manufactured by Corning Glass, USA)
A negative mask with the pattern shown in Figure 2 was placed on the product name), and after irradiating it with ultraviolet light for 5 minutes using a 60 ampere arc lamp, the negative mask was removed and heated to 500°C.
This exposed area was crystallized by heat treatment for 1 hour. Next, this entire surface was irradiated with ultraviolet rays for 5 minutes using the arc lamp, and then treated with 10% hydrofluoric acid at room temperature to etch the crystallized parts.
The etched portion shown in FIG. 2I was formed on this photosensitive glass plate.

ついで、この感光性ガラス板の蝕刻面(=100IEI
I×100u+x 3iu<の硬質ガラス板を融着する
と共に、これ(:第1図に示したざ一トを取りつけたの
ち、これを850℃で5時間熱処理して全体をセラミッ
ク構造のものとした。
Next, the etched surface of this photosensitive glass plate (=100IEI
A hard glass plate of 1 x 100 u .

この操作を6回繰返すことによって同一構造をもつ6個
の分離板を作ったが、そのうちの5個C二ついてはその
蝕刻部を次表C二掲記したオルガノシランまたはオルガ
ノvOキサンで処理したものとし、これらを用いてn−
ドデカノール、n−ヘキサデカノールおよびn−テトラ
デカノールを各1直置%含有したプロパツール溶液1;
ついての分離テストを行なったところ、次の結果が得ら
れた。
By repeating this operation 6 times, 6 separation plates with the same structure were made, and the etched portions of 5 of them were treated with organosilane or organo-vO xane listed in the following table C2. , using these
Proper tool solution 1 containing 1% each of dodecanol, n-hexadecanol and n-tetradecanol;
When we performed a separation test on this, we obtained the following results.

なお、この結果を示す表には従来法C;よる内径0.3
IIIIK、長さ50,000mのキャピラリーチュー
ブを螺旋状(二巻いたものを分離管とした場合の結果も
比較例として併記したが、この場合にはキャピラリーチ
ューブが螺旋状とされるために本発明の分離板C;<ら
べて収納場所がきわめて大きいものとなった。
In addition, the table showing this result shows the inner diameter of 0.3 according to conventional method C;
IIIK, the results of a case where a capillary tube with a length of 50,000 m is spiral (twice wound and used as a separation tube) are also shown as a comparative example, but in this case, the capillary tube is spiral, so the present invention Separation plate C

〔実験条件〕[Experimental conditions]

キャリーガス ・・・・・・ 窒素 分離板温度 ・・・−110℃〜150℃昇温速度・・
・・・・5℃/分 〔実験結果〕 これらの分離板を用いたときのn−ドデカノール、n−
ヘキサデカノール、n−テトラデカノールについての相
対保持時間= であり、実施例1〜6ではいずれも分離が良好であった
が、比較例のものはピークの重なりが多く分離が不充分
で′あった。
Carry gas...Nitrogen separation plate temperature...-110°C to 150°C Heating rate...
...5℃/min [Experimental results] When using these separation plates, n-dodecanol, n-
The relative retention times for hexadecanol and n-tetradecanol = , and in Examples 1 to 6, the separation was good, but in the comparative example, there were many peaks that overlapped, and the separation was insufficient. there were.

また、実施例1〜6ではn−ドデカノール、n−ヘキナ
デカノール、n−テトラデカノールの半値中がそれぞれ
2〜4顛、3〜5隨、2〜4頭の@艷であったが、比較
例ではこれらが12鶏、15m、11mと大きくなり、
各ピーク間の分離が実施例のものにくらべて極めてわる
かった。
In addition, in Examples 1 to 6, the half values of n-dodecanol, n-hequinadecanol, and n-tetradecanol were 2 to 4 times, 3 to 5 times, and 2 to 4 times, respectively, but in the comparative example Now, these will grow to 12 chickens, 15 m, and 11 m.
The separation between each peak was extremely poor compared to that of the example.

table

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の分層板に使用される感光性ガラスの平
面図、第2図はこの感光性ガラスに重ねられるネガマス
クの拡大図の平面図を示したものである。 1・・・感光性ガラス、 2・−ネがマスク特許出願人
 信越化学工業体式会社
FIG. 1 is a plan view of a photosensitive glass used in the layer separation plate of the present invention, and FIG. 2 is a plan view of an enlarged view of a negative mask superimposed on this photosensitive glass. 1...Photosensitive glass, 2.-Ne is a mask patent applicant: Shin-Etsu Chemical Corporation

Claims (1)

【特許請求の範囲】 1、流体の流通経路を写真蝕刻によってその表面に設け
てなる感光性ガラス板を基板としてなることを特徴とす
る分離板 2、写真蝕刻された感光性ガラスをシランおよび/また
はシロキサンで処理してなる、特許請求の範囲881項
記載の分離板
[Scope of Claims] 1. Separation plate 2, characterized in that the substrate is a photosensitive glass plate on whose surface a fluid flow path is provided by photo-etching, silane and/or photo-etched photo-sensitive glass. or the separation plate according to claim 881, which is treated with siloxane.
JP56194136A 1981-12-02 1981-12-02 Separating board Pending JPS5895260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56194136A JPS5895260A (en) 1981-12-02 1981-12-02 Separating board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56194136A JPS5895260A (en) 1981-12-02 1981-12-02 Separating board

Publications (1)

Publication Number Publication Date
JPS5895260A true JPS5895260A (en) 1983-06-06

Family

ID=16319501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56194136A Pending JPS5895260A (en) 1981-12-02 1981-12-02 Separating board

Country Status (1)

Country Link
JP (1) JPS5895260A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996020401A1 (en) * 1994-12-26 1996-07-04 Kabushiki Kaisya Advance Porous channel chromatography device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3538744A (en) * 1967-11-09 1970-11-10 Phillips Petroleum Co Chromatography apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3538744A (en) * 1967-11-09 1970-11-10 Phillips Petroleum Co Chromatography apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996020401A1 (en) * 1994-12-26 1996-07-04 Kabushiki Kaisya Advance Porous channel chromatography device

Similar Documents

Publication Publication Date Title
JPS5565365A (en) Pattern forming method
KR850002672A (en) Template manufacturing method using plasma developing layer
US3255005A (en) Masking process for semiconductor elements
JPS5895260A (en) Separating board
JPS6351641A (en) Fine pattern formation of single crystal or polycrystalline si film
JPS61228633A (en) Formation of thin film
JPS5960405A (en) Optical waveguide and its manufacture
JPS55133538A (en) Manufacturing method of semiconductor device
JPH04176123A (en) Manufacture of semiconductor device
JP2670465B2 (en) Fine processing method
JPS61154024A (en) Manufacture of semiconductor element
JPS60249334A (en) Formation of thin film
JPS57170763A (en) Preparation of multinozzle head
JPS61265822A (en) Formation of thin metal film
JPS5559718A (en) Producing method of semiconductor unit
JP2611485B2 (en) Pattern formation method by lift-off method
JPS58164226A (en) Etching of semiconductor substrate
JPH10270357A (en) Mask for manufacturing semiconductor devices and manufacture thereof
JPS649601A (en) Manufacture of thin film platinum temperature sensor
JPS62150352A (en) Glass mask
JP2590990B2 (en) Exposure method
JPH04243263A (en) Fine pattern forming method
JPH0754968A (en) Micro-gear and its manufacture
JPH0313583B2 (en)
JPS58196022A (en) Preparation of semiconductor device