JPS5893145A - シヤドウマスクの製造方法 - Google Patents
シヤドウマスクの製造方法Info
- Publication number
- JPS5893145A JPS5893145A JP56190538A JP19053881A JPS5893145A JP S5893145 A JPS5893145 A JP S5893145A JP 56190538 A JP56190538 A JP 56190538A JP 19053881 A JP19053881 A JP 19053881A JP S5893145 A JPS5893145 A JP S5893145A
- Authority
- JP
- Japan
- Prior art keywords
- shadow mask
- predetermined
- resist film
- avoided
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims abstract description 19
- 238000005406 washing Methods 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000000137 annealing Methods 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims abstract description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 26
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 238000005553 drilling Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000011068 loading method Methods 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 3
- 238000005238 degreasing Methods 0.000 abstract description 2
- 238000010306 acid treatment Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 206010011732 Cyst Diseases 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/01—Generalised techniques
- H01J2209/012—Coating
- H01J2209/015—Machines therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56190538A JPS5893145A (ja) | 1981-11-30 | 1981-11-30 | シヤドウマスクの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56190538A JPS5893145A (ja) | 1981-11-30 | 1981-11-30 | シヤドウマスクの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5893145A true JPS5893145A (ja) | 1983-06-02 |
| JPH0222974B2 JPH0222974B2 (enrdf_load_stackoverflow) | 1990-05-22 |
Family
ID=16259745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56190538A Granted JPS5893145A (ja) | 1981-11-30 | 1981-11-30 | シヤドウマスクの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5893145A (enrdf_load_stackoverflow) |
-
1981
- 1981-11-30 JP JP56190538A patent/JPS5893145A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0222974B2 (enrdf_load_stackoverflow) | 1990-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4061529A (en) | Method for making etch-resistant stencil with dichromate-sensitized casein coating | |
| US4144300A (en) | Chemical etching of record patterns and the like | |
| US3897251A (en) | Process for utilizing a photoprinting article and method for making said article | |
| JPS5893145A (ja) | シヤドウマスクの製造方法 | |
| US4656107A (en) | Photographic printing plate for use in a vacuum printing frame | |
| US4664996A (en) | Method for etching a flat apertured mask for use in a cathode-ray tube | |
| US4588676A (en) | Photoexposing a photoresist-coated sheet in a vacuum printing frame | |
| JPS5833246A (ja) | ポジ型レジストのパタ−ン形成方法 | |
| SU1175370A3 (ru) | Способ образовани кислотоустойчивой копии на поверхности | |
| US3801410A (en) | Photoprinting article | |
| JPS6154212B2 (enrdf_load_stackoverflow) | ||
| TW490592B (en) | Manufacturing method of chrome film mask | |
| JP2000123754A (ja) | シャドウマスクおよびシャドウマスク用基材 | |
| TW202534754A (zh) | 基板處理方法 | |
| JP2000066362A (ja) | シャドウマスク用ハードマスク及びその製造方法 | |
| JPS60113427A (ja) | 微細パタ−ン形成方法 | |
| JPS5999436A (ja) | マスク製造方法 | |
| JPS5895826A (ja) | パタ−ン形成方法 | |
| JPH0685070B2 (ja) | レジストパターンの現像方法 | |
| JPS58207373A (ja) | エツチング方法 | |
| JP3994767B2 (ja) | ウエットエッチング法を用いた金属薄板加工方法及び金属薄板加工装置 | |
| JPS6355209B2 (enrdf_load_stackoverflow) | ||
| JPS613405A (ja) | レジストパタ−ン形成方法 | |
| JPS63297585A (ja) | ニッケルスタンパの製造方法 | |
| JPS6145823B2 (enrdf_load_stackoverflow) |