JPS5885337U - 半導体基板の有機処理装置 - Google Patents

半導体基板の有機処理装置

Info

Publication number
JPS5885337U
JPS5885337U JP18038681U JP18038681U JPS5885337U JP S5885337 U JPS5885337 U JP S5885337U JP 18038681 U JP18038681 U JP 18038681U JP 18038681 U JP18038681 U JP 18038681U JP S5885337 U JPS5885337 U JP S5885337U
Authority
JP
Japan
Prior art keywords
semiconductor substrates
processing equipment
organic processing
cup
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18038681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210996Y2 (enExample
Inventor
新水 猿渡
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP18038681U priority Critical patent/JPS5885337U/ja
Publication of JPS5885337U publication Critical patent/JPS5885337U/ja
Application granted granted Critical
Publication of JPS6210996Y2 publication Critical patent/JPS6210996Y2/ja
Granted legal-status Critical Current

Links

JP18038681U 1981-12-03 1981-12-03 半導体基板の有機処理装置 Granted JPS5885337U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18038681U JPS5885337U (ja) 1981-12-03 1981-12-03 半導体基板の有機処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18038681U JPS5885337U (ja) 1981-12-03 1981-12-03 半導体基板の有機処理装置

Publications (2)

Publication Number Publication Date
JPS5885337U true JPS5885337U (ja) 1983-06-09
JPS6210996Y2 JPS6210996Y2 (enExample) 1987-03-16

Family

ID=29976932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18038681U Granted JPS5885337U (ja) 1981-12-03 1981-12-03 半導体基板の有機処理装置

Country Status (1)

Country Link
JP (1) JPS5885337U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6425535A (en) * 1987-07-22 1989-01-27 Matsushita Electronics Corp Treatment of substrate for forming resist film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6425535A (en) * 1987-07-22 1989-01-27 Matsushita Electronics Corp Treatment of substrate for forming resist film

Also Published As

Publication number Publication date
JPS6210996Y2 (enExample) 1987-03-16

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