JPS5882138A - 半導体測定ダイアフラム - Google Patents

半導体測定ダイアフラム

Info

Publication number
JPS5882138A
JPS5882138A JP17975281A JP17975281A JPS5882138A JP S5882138 A JPS5882138 A JP S5882138A JP 17975281 A JP17975281 A JP 17975281A JP 17975281 A JP17975281 A JP 17975281A JP S5882138 A JPS5882138 A JP S5882138A
Authority
JP
Japan
Prior art keywords
strain
strain generating
generating section
section
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17975281A
Other languages
English (en)
Japanese (ja)
Other versions
JPH021252B2 (enExample
Inventor
Tsutomu Okayama
岡山　努
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17975281A priority Critical patent/JPS5882138A/ja
Publication of JPS5882138A publication Critical patent/JPS5882138A/ja
Publication of JPH021252B2 publication Critical patent/JPH021252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP17975281A 1981-11-11 1981-11-11 半導体測定ダイアフラム Granted JPS5882138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17975281A JPS5882138A (ja) 1981-11-11 1981-11-11 半導体測定ダイアフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17975281A JPS5882138A (ja) 1981-11-11 1981-11-11 半導体測定ダイアフラム

Publications (2)

Publication Number Publication Date
JPS5882138A true JPS5882138A (ja) 1983-05-17
JPH021252B2 JPH021252B2 (enExample) 1990-01-10

Family

ID=16071250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17975281A Granted JPS5882138A (ja) 1981-11-11 1981-11-11 半導体測定ダイアフラム

Country Status (1)

Country Link
JP (1) JPS5882138A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154179A (ja) * 1984-12-27 1986-07-12 Nec Corp 圧力センサ
JPS61154180A (ja) * 1984-12-27 1986-07-12 Nec Corp 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154179A (ja) * 1984-12-27 1986-07-12 Nec Corp 圧力センサ
JPS61154180A (ja) * 1984-12-27 1986-07-12 Nec Corp 圧力センサ

Also Published As

Publication number Publication date
JPH021252B2 (enExample) 1990-01-10

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