JPS5879151A - 雰囲気中のガスこん跡量を検出するための方法、センサおよび装置 - Google Patents
雰囲気中のガスこん跡量を検出するための方法、センサおよび装置Info
- Publication number
- JPS5879151A JPS5879151A JP57180044A JP18004482A JPS5879151A JP S5879151 A JPS5879151 A JP S5879151A JP 57180044 A JP57180044 A JP 57180044A JP 18004482 A JP18004482 A JP 18004482A JP S5879151 A JPS5879151 A JP S5879151A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- atmosphere
- gas
- monitored
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 23
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 51
- 238000001514 detection method Methods 0.000 claims description 20
- 229910044991 metal oxide Inorganic materials 0.000 claims description 19
- 150000004706 metal oxides Chemical class 0.000 claims description 19
- 239000012535 impurity Substances 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 3
- 239000001273 butane Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 230000004044 response Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 230000003796 beauty Effects 0.000 claims 1
- 230000003111 delayed effect Effects 0.000 claims 1
- 210000003127 knee Anatomy 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 60
- 239000004065 semiconductor Substances 0.000 description 13
- 239000007787 solid Substances 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- 231100000419 toxicity Toxicity 0.000 description 4
- 230000001988 toxicity Effects 0.000 description 4
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000004568 cement Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 1
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- UIFOTCALDQIDTI-UHFFFAOYSA-N arsanylidynenickel Chemical compound [As]#[Ni] UIFOTCALDQIDTI-UHFFFAOYSA-N 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000816 toxic dose Toxicity 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8119536A FR2514898A1 (fr) | 1981-10-16 | 1981-10-16 | Procede, capteur et dispositif de detection de traces ou impuretes gazeuses |
| FR8119536 | 1981-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5879151A true JPS5879151A (ja) | 1983-05-12 |
| JPH0429023B2 JPH0429023B2 (https=) | 1992-05-15 |
Family
ID=9263130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57180044A Granted JPS5879151A (ja) | 1981-10-16 | 1982-10-15 | 雰囲気中のガスこん跡量を検出するための方法、センサおよび装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4485667A (https=) |
| EP (1) | EP0077724B1 (https=) |
| JP (1) | JPS5879151A (https=) |
| DE (1) | DE3268991D1 (https=) |
| FR (1) | FR2514898A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1216330A (en) * | 1983-02-07 | 1987-01-06 | Junji Manaka | Low power gas detector |
| GB2137356B (en) * | 1983-03-25 | 1986-10-08 | Detection Instr Limited | Hydrogen sulphide detector |
| CA1272779A (en) * | 1985-03-04 | 1990-08-14 | Toshiaki Mizuta | Sensor with periodic heating |
| ES2061442T3 (es) * | 1985-10-14 | 1994-12-16 | Nippon Zoki Pharmaceutical Co | Peptidos. |
| FR2625561B1 (fr) * | 1988-01-04 | 1993-08-06 | Coreci | Structure de support pour capteur de gaz |
| DE3833295A1 (de) * | 1988-09-30 | 1990-04-05 | Siemens Ag | Schneller, temperaturkompensierter sensor, insbesondere fuer sauerstoff und fuer autoabgase |
| FR2657432A1 (fr) * | 1990-01-19 | 1991-07-26 | Armines | Procede et dispositif de detection de traces de tetrachlorure de carbone dans un milieu gazeux. |
| IT1241405B (it) * | 1990-03-02 | 1994-01-14 | Eniricerche Spa | Sensori di gas per determinare idrocarburi gassosi realizzati con film sottili di ossido di stagno |
| DE4138369C3 (de) * | 1991-11-22 | 1997-09-04 | Bosch Gmbh Robert | Verfahren zur Bestimmung von kleinen Mengen an Kohlenmonoxid und Stickoxiden in Gasgemischen |
| FR2919928A1 (fr) * | 2007-08-10 | 2009-02-13 | Renault Sas | Capteur pour gaz et procede de detection de constituants gazeux dans un melange et/ou de mesure des concentrations respectives de ces constituants |
| US9810653B2 (en) | 2014-07-17 | 2017-11-07 | Stmicroelectronics Pte Ltd | Integrated SMO gas sensor module |
| ES2629446B1 (es) * | 2015-10-02 | 2018-05-29 | Universitat Politécnica de Catalunya | Método de control para sensores químicos de gases y sistema de detección de gases |
| JP6786918B2 (ja) * | 2016-07-11 | 2020-11-18 | 富士通株式会社 | ガスセンサアレイ、ガス測定装置、及びガス測定方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1474080A (en) * | 1974-07-03 | 1977-05-18 | Nohmi Bosai Kogyo Co Ltd | Gas detector |
| US3999947A (en) * | 1974-10-11 | 1976-12-28 | Matsushita Electric Industrial Co., Ltd. | Reducing gas sensor and a method of producing the same |
| GB1526751A (en) * | 1975-03-13 | 1978-09-27 | Standard Telephones Cables Ltd | Gas sensitive resistive elements |
| JPS5424096A (en) * | 1977-07-26 | 1979-02-23 | Fuji Electric Co Ltd | Carbon monoxide detector |
| GB2048487A (en) * | 1978-07-19 | 1980-12-10 | Horstmann Gear Co Ltd | Battery powered gas level indicator |
| US4169369A (en) * | 1978-07-24 | 1979-10-02 | General Motors Corporation | Method and thin film semiconductor sensor for detecting NOx |
| EP0075101A3 (de) * | 1981-09-22 | 1985-12-04 | Cerberus Ag | Verfahren und Vorrichtung zur Reduzierung von durch Störgase hervorgerufenen Falschalarmen in Gaswarnanlagen |
-
1981
- 1981-10-16 FR FR8119536A patent/FR2514898A1/fr active Granted
-
1982
- 1982-09-29 US US06/428,439 patent/US4485667A/en not_active Expired - Lifetime
- 1982-10-13 DE DE8282401878T patent/DE3268991D1/de not_active Expired
- 1982-10-13 EP EP82401878A patent/EP0077724B1/fr not_active Expired
- 1982-10-15 JP JP57180044A patent/JPS5879151A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| EP0077724A1 (fr) | 1983-04-27 |
| JPH0429023B2 (https=) | 1992-05-15 |
| EP0077724B1 (fr) | 1986-02-05 |
| US4485667A (en) | 1984-12-04 |
| FR2514898B1 (https=) | 1984-10-26 |
| DE3268991D1 (en) | 1986-03-20 |
| FR2514898A1 (fr) | 1983-04-22 |
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