JPS5878481A - 金属蒸気レ−ザ− - Google Patents

金属蒸気レ−ザ−

Info

Publication number
JPS5878481A
JPS5878481A JP17684881A JP17684881A JPS5878481A JP S5878481 A JPS5878481 A JP S5878481A JP 17684881 A JP17684881 A JP 17684881A JP 17684881 A JP17684881 A JP 17684881A JP S5878481 A JPS5878481 A JP S5878481A
Authority
JP
Japan
Prior art keywords
capillary
cathode
metal vapor
metal
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17684881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053154B2 (enExample
Inventor
Taka Kamiide
上出　幟
Keiji Hijikata
土方　啓司
Katsumi Tokutome
徳留　勝見
Michio Ishikawa
道夫 石川
Yuji Hayashi
林　裕治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kimmon Electric Co Ltd
Original Assignee
Kimmon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kimmon Electric Co Ltd filed Critical Kimmon Electric Co Ltd
Priority to JP17684881A priority Critical patent/JPS5878481A/ja
Publication of JPS5878481A publication Critical patent/JPS5878481A/ja
Publication of JPH053154B2 publication Critical patent/JPH053154B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/031—Metal vapour lasers, e.g. metal vapour generation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP17684881A 1981-11-04 1981-11-04 金属蒸気レ−ザ− Granted JPS5878481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17684881A JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17684881A JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Publications (2)

Publication Number Publication Date
JPS5878481A true JPS5878481A (ja) 1983-05-12
JPH053154B2 JPH053154B2 (enExample) 1993-01-14

Family

ID=16020883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17684881A Granted JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Country Status (1)

Country Link
JP (1) JPS5878481A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4821280A (en) * 1984-10-12 1989-04-11 Hiromi Kawase Hollow-cathode type metal ion laser
US6661499B2 (en) 1998-06-12 2003-12-09 Nikon Corporation Projection exposure apparatus with a catadioptric projection optical system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825830A (enExample) * 1971-08-09 1973-04-04
JPS5262085U (enExample) * 1975-10-31 1977-05-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825830A (enExample) * 1971-08-09 1973-04-04
JPS5262085U (enExample) * 1975-10-31 1977-05-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4821280A (en) * 1984-10-12 1989-04-11 Hiromi Kawase Hollow-cathode type metal ion laser
US6661499B2 (en) 1998-06-12 2003-12-09 Nikon Corporation Projection exposure apparatus with a catadioptric projection optical system

Also Published As

Publication number Publication date
JPH053154B2 (enExample) 1993-01-14

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