JPH053154B2 - - Google Patents

Info

Publication number
JPH053154B2
JPH053154B2 JP56176848A JP17684881A JPH053154B2 JP H053154 B2 JPH053154 B2 JP H053154B2 JP 56176848 A JP56176848 A JP 56176848A JP 17684881 A JP17684881 A JP 17684881A JP H053154 B2 JPH053154 B2 JP H053154B2
Authority
JP
Japan
Prior art keywords
capillary
metal vapor
cathode
metal
vapor laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56176848A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5878481A (ja
Inventor
Taka Kamiide
Keiji Hijikata
Katsumi Tokutome
Michio Ishikawa
Juji Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KINMON DENKI KK
Original Assignee
KINMON DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KINMON DENKI KK filed Critical KINMON DENKI KK
Priority to JP17684881A priority Critical patent/JPS5878481A/ja
Publication of JPS5878481A publication Critical patent/JPS5878481A/ja
Publication of JPH053154B2 publication Critical patent/JPH053154B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/031—Metal vapour lasers, e.g. metal vapour generation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP17684881A 1981-11-04 1981-11-04 金属蒸気レ−ザ− Granted JPS5878481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17684881A JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17684881A JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Publications (2)

Publication Number Publication Date
JPS5878481A JPS5878481A (ja) 1983-05-12
JPH053154B2 true JPH053154B2 (enExample) 1993-01-14

Family

ID=16020883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17684881A Granted JPS5878481A (ja) 1981-11-04 1981-11-04 金属蒸気レ−ザ−

Country Status (1)

Country Link
JP (1) JPS5878481A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0178810B1 (en) * 1984-10-12 1991-02-20 Hiromi Kawase A hollow-cathode type metal ion laser
JP3985346B2 (ja) 1998-06-12 2007-10-03 株式会社ニコン 投影露光装置、投影露光装置の調整方法、及び投影露光方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130930B2 (enExample) * 1971-08-09 1976-09-03
JPS5915087Y2 (ja) * 1975-10-31 1984-05-04 日本電気株式会社 高出力ガスレ−ザ管

Also Published As

Publication number Publication date
JPS5878481A (ja) 1983-05-12

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