JPS5878362A - 荷電粒子エネルギ−分析器 - Google Patents
荷電粒子エネルギ−分析器Info
- Publication number
- JPS5878362A JPS5878362A JP56175180A JP17518081A JPS5878362A JP S5878362 A JPS5878362 A JP S5878362A JP 56175180 A JP56175180 A JP 56175180A JP 17518081 A JP17518081 A JP 17518081A JP S5878362 A JPS5878362 A JP S5878362A
- Authority
- JP
- Japan
- Prior art keywords
- energy
- pass filter
- charged
- reflected
- charged particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56175180A JPS5878362A (ja) | 1981-10-31 | 1981-10-31 | 荷電粒子エネルギ−分析器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56175180A JPS5878362A (ja) | 1981-10-31 | 1981-10-31 | 荷電粒子エネルギ−分析器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5878362A true JPS5878362A (ja) | 1983-05-11 |
JPH0114668B2 JPH0114668B2 (enrdf_load_stackoverflow) | 1989-03-13 |
Family
ID=15991664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56175180A Granted JPS5878362A (ja) | 1981-10-31 | 1981-10-31 | 荷電粒子エネルギ−分析器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5878362A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849629A (en) * | 1986-11-14 | 1989-07-18 | Shimadzu Corporation | Charged particle analyzer |
JPH03217712A (ja) * | 1990-01-24 | 1991-09-25 | Matsushita Electric Ind Co Ltd | 油燃焼機 |
-
1981
- 1981-10-31 JP JP56175180A patent/JPS5878362A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849629A (en) * | 1986-11-14 | 1989-07-18 | Shimadzu Corporation | Charged particle analyzer |
JPH03217712A (ja) * | 1990-01-24 | 1991-09-25 | Matsushita Electric Ind Co Ltd | 油燃焼機 |
Also Published As
Publication number | Publication date |
---|---|
JPH0114668B2 (enrdf_load_stackoverflow) | 1989-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4308457A (en) | Device for the detection of back-scattered electrons from a sample in an electron microscope | |
JPS5878362A (ja) | 荷電粒子エネルギ−分析器 | |
JPH05182625A (ja) | 対物レンズ | |
US6198798B1 (en) | Planispherical parallax-free X-ray imager based on the gas electron multiplier | |
US4394676A (en) | Photovoltaic radiation detector element | |
JPS6262075B2 (enrdf_load_stackoverflow) | ||
JPS5875754A (ja) | 荷電粒子エネルギ−分析装置 | |
JPH0213463B2 (enrdf_load_stackoverflow) | ||
JP3345256B2 (ja) | 荷電粒子検出装置 | |
US3673528A (en) | Wide frequency response line scan magnetic deflector | |
EP0208866B1 (de) | Gasanalysator mit grossflächigem pyroelektrischem Detektor | |
JPH0210646A (ja) | 荷電粒子エネルギー分析器 | |
SU1597539A1 (ru) | Толщиномер покрытий | |
JPS5841623B2 (ja) | 質量分析装置のイオン検出器 | |
JPH0351054B2 (enrdf_load_stackoverflow) | ||
JPH035080Y2 (enrdf_load_stackoverflow) | ||
JPS6245423Y2 (enrdf_load_stackoverflow) | ||
JPS6159449A (ja) | 半導体製造用マスク | |
JPH0357570B2 (enrdf_load_stackoverflow) | ||
KR20240173501A (ko) | 코어-쉘 헤테로 구조의 감지물질을 구비한 표면탄성파 센서, 이의 제조 방법 및 이를 이용한 센서 어레이 장치 | |
JPS60240042A (ja) | エネルギ−分析器 | |
JPH02288219A (ja) | 電子ビーム露光装置 | |
JPH01175159A (ja) | 荷電粒子エネルギー分析器 | |
JPH0719170Y2 (ja) | 半導体放射線検出器 | |
JPS6342374B2 (enrdf_load_stackoverflow) |