JPS5875748A - 走査型分析装置の像回転補正装置 - Google Patents

走査型分析装置の像回転補正装置

Info

Publication number
JPS5875748A
JPS5875748A JP56175079A JP17507981A JPS5875748A JP S5875748 A JPS5875748 A JP S5875748A JP 56175079 A JP56175079 A JP 56175079A JP 17507981 A JP17507981 A JP 17507981A JP S5875748 A JPS5875748 A JP S5875748A
Authority
JP
Japan
Prior art keywords
image
scanning
sample
deflection coil
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56175079A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255902B2 (cs
Inventor
Kazuo Koyanagi
和夫 小柳
Yuji Mori
森　優治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56175079A priority Critical patent/JPS5875748A/ja
Publication of JPS5875748A publication Critical patent/JPS5875748A/ja
Publication of JPH0255902B2 publication Critical patent/JPH0255902B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56175079A 1981-10-30 1981-10-30 走査型分析装置の像回転補正装置 Granted JPS5875748A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56175079A JPS5875748A (ja) 1981-10-30 1981-10-30 走査型分析装置の像回転補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56175079A JPS5875748A (ja) 1981-10-30 1981-10-30 走査型分析装置の像回転補正装置

Publications (2)

Publication Number Publication Date
JPS5875748A true JPS5875748A (ja) 1983-05-07
JPH0255902B2 JPH0255902B2 (cs) 1990-11-28

Family

ID=15989866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56175079A Granted JPS5875748A (ja) 1981-10-30 1981-10-30 走査型分析装置の像回転補正装置

Country Status (1)

Country Link
JP (1) JPS5875748A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08329870A (ja) * 1995-06-01 1996-12-13 Hitachi Ltd 走査電子顕微鏡
JP2010198826A (ja) * 2009-02-24 2010-09-09 Jeol Ltd 透過型電子顕微鏡のアライメント装置
JP2014143033A (ja) * 2013-01-23 2014-08-07 Hitachi High-Technologies Corp ステージ装置およびビーム照射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031770A (cs) * 1973-04-19 1975-03-28
JPS5294768A (en) * 1976-02-04 1977-08-09 Jeol Ltd Electronic microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031770A (cs) * 1973-04-19 1975-03-28
JPS5294768A (en) * 1976-02-04 1977-08-09 Jeol Ltd Electronic microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08329870A (ja) * 1995-06-01 1996-12-13 Hitachi Ltd 走査電子顕微鏡
JP2010198826A (ja) * 2009-02-24 2010-09-09 Jeol Ltd 透過型電子顕微鏡のアライメント装置
JP2014143033A (ja) * 2013-01-23 2014-08-07 Hitachi High-Technologies Corp ステージ装置およびビーム照射装置

Also Published As

Publication number Publication date
JPH0255902B2 (cs) 1990-11-28

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