JPS5875684A - 均一加熱装置 - Google Patents

均一加熱装置

Info

Publication number
JPS5875684A
JPS5875684A JP17319181A JP17319181A JPS5875684A JP S5875684 A JPS5875684 A JP S5875684A JP 17319181 A JP17319181 A JP 17319181A JP 17319181 A JP17319181 A JP 17319181A JP S5875684 A JPS5875684 A JP S5875684A
Authority
JP
Japan
Prior art keywords
heater
coating film
film
belt conveyor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17319181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153632B2 (enrdf_load_stackoverflow
Inventor
田野崎　芳夫
三枝　功
斎藤　之雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP17319181A priority Critical patent/JPS5875684A/ja
Publication of JPS5875684A publication Critical patent/JPS5875684A/ja
Publication of JPS6153632B2 publication Critical patent/JPS6153632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Drying Of Solid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP17319181A 1981-10-29 1981-10-29 均一加熱装置 Granted JPS5875684A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17319181A JPS5875684A (ja) 1981-10-29 1981-10-29 均一加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17319181A JPS5875684A (ja) 1981-10-29 1981-10-29 均一加熱装置

Publications (2)

Publication Number Publication Date
JPS5875684A true JPS5875684A (ja) 1983-05-07
JPS6153632B2 JPS6153632B2 (enrdf_load_stackoverflow) 1986-11-18

Family

ID=15955776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17319181A Granted JPS5875684A (ja) 1981-10-29 1981-10-29 均一加熱装置

Country Status (1)

Country Link
JP (1) JPS5875684A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513790A (ja) * 2003-12-10 2007-05-31 ゲノム リサーチ エルティーディー モジュラユニット
WO2012008218A1 (ja) * 2010-07-12 2012-01-19 シャープ株式会社 塗布膜製造用加熱乾燥装置およびこれを備えた塗布膜製造装置ならびに塗布膜製造方法
CN108807589A (zh) * 2017-05-05 2018-11-13 先进科技新加坡有限公司 具有双进气口的太阳能电池烘干机

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513790A (ja) * 2003-12-10 2007-05-31 ゲノム リサーチ エルティーディー モジュラユニット
WO2012008218A1 (ja) * 2010-07-12 2012-01-19 シャープ株式会社 塗布膜製造用加熱乾燥装置およびこれを備えた塗布膜製造装置ならびに塗布膜製造方法
CN108807589A (zh) * 2017-05-05 2018-11-13 先进科技新加坡有限公司 具有双进气口的太阳能电池烘干机

Also Published As

Publication number Publication date
JPS6153632B2 (enrdf_load_stackoverflow) 1986-11-18

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