JPS5875684A - 均一加熱装置 - Google Patents
均一加熱装置Info
- Publication number
- JPS5875684A JPS5875684A JP17319181A JP17319181A JPS5875684A JP S5875684 A JPS5875684 A JP S5875684A JP 17319181 A JP17319181 A JP 17319181A JP 17319181 A JP17319181 A JP 17319181A JP S5875684 A JPS5875684 A JP S5875684A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- coating film
- film
- belt conveyor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Drying Of Solid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17319181A JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17319181A JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5875684A true JPS5875684A (ja) | 1983-05-07 |
JPS6153632B2 JPS6153632B2 (enrdf_load_stackoverflow) | 1986-11-18 |
Family
ID=15955776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17319181A Granted JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5875684A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007513790A (ja) * | 2003-12-10 | 2007-05-31 | ゲノム リサーチ エルティーディー | モジュラユニット |
WO2012008218A1 (ja) * | 2010-07-12 | 2012-01-19 | シャープ株式会社 | 塗布膜製造用加熱乾燥装置およびこれを備えた塗布膜製造装置ならびに塗布膜製造方法 |
CN108807589A (zh) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | 具有双进气口的太阳能电池烘干机 |
-
1981
- 1981-10-29 JP JP17319181A patent/JPS5875684A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007513790A (ja) * | 2003-12-10 | 2007-05-31 | ゲノム リサーチ エルティーディー | モジュラユニット |
WO2012008218A1 (ja) * | 2010-07-12 | 2012-01-19 | シャープ株式会社 | 塗布膜製造用加熱乾燥装置およびこれを備えた塗布膜製造装置ならびに塗布膜製造方法 |
CN108807589A (zh) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | 具有双进气口的太阳能电池烘干机 |
Also Published As
Publication number | Publication date |
---|---|
JPS6153632B2 (enrdf_load_stackoverflow) | 1986-11-18 |
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