JPS5875684A - Uniform heater - Google Patents
Uniform heaterInfo
- Publication number
- JPS5875684A JPS5875684A JP17319181A JP17319181A JPS5875684A JP S5875684 A JPS5875684 A JP S5875684A JP 17319181 A JP17319181 A JP 17319181A JP 17319181 A JP17319181 A JP 17319181A JP S5875684 A JPS5875684 A JP S5875684A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- coating film
- film
- belt conveyor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は均一加熱装置に関するものであり、とくに基板
に塗布された塗膜を上側と下側の両方から均一に加熱乾
燥固化させるための加熱装置ｉに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a uniform heating device, and particularly to a heating device i for uniformly heating, drying and solidifying a coating film applied to a substrate from both the upper side and the lower side.
従来ガラス板、金属板、半導体などの基板上に塗布され
た塗膜例えばフォトレジスト膜、保護膜、介在層など塗
膜を乾燥固化するにあたり、上方からの加熱による方法
が行われていたが、この場合塗膜の表面層が先ず固化し
て硬質膜となり、塗膜の下層は未だにケ゛ル状であるた
め、膜内に気泡が生じ、塗膜表面に突起が生ずる原因と
なったり塗嘆内に不均一部分が生じて塗膜表面に微細な
凹凸を生じたりする。たとえ径が１μ程度の凹凸部とい
えどもこの現象は表面状態に悪影響を与え精密部品にあ
ってはほとんど不良品となるものである。Conventionally, coatings applied to substrates such as glass plates, metal plates, semiconductors, etc., such as photoresist films, protective films, and intervening layers, have been dried and solidified by heating from above. In this case, the surface layer of the paint film solidifies first and becomes a hard film, and the lower layer of the paint film is still in the form of a shell, which can cause bubbles to form within the film, causing protrusions on the paint film surface or causing damage within the coating. Non-uniform areas may occur, causing minute irregularities on the surface of the coating film. Even if the unevenness is about 1 μm in diameter, this phenomenon adversely affects the surface condition and almost always results in defective precision parts.
本発明は上記の如き欠点を解消するものであって、とく
にフォトレノストの作製にあたって、上記の如き欠点の
ない製品の作成に極めて有利な装置を提供するものであ
る。フォトレノストは基板に感光性樹脂膜を形成したも
のであり１また半導体工業や精密さを要求される分野に
おける塗布技術に貢献するところが大きい。The present invention solves the above-mentioned drawbacks and provides an extremely advantageous apparatus for producing a product free of the above-mentioned drawbacks, particularly in the production of photorenost. Photorenost is a product in which a photosensitive resin film is formed on a substrate.1 It also greatly contributes to coating technology in the semiconductor industry and other fields that require precision.
本発明は被加熱処理体を上置して搬送する耐熱性のベル
トコンベアの下面に摺接するヒーター全配列し、かつ上
記コンベア上方に下向きに照射する赤外線ヒーター光源
を設けたもので、図示の実施例によって説明する。The present invention includes a complete array of heaters that slide into contact with the lower surface of a heat-resistant belt conveyor on which objects to be heated are placed and conveyed, and an infrared heater light source that irradiates downward above the conveyor. Let's explain by example.
第１図は本発明の均一加熱装置の断面を示す説明図であ
り、第２図は同じくその部分拡大図である。１はベルト
コンベア８で、例えばステンレス製あるいは耐熱性合成
樹脂製のものであり、図では左端より間歇的に前工程に
てガラス、金属、１′−導体等、基板２に塗膜３が施さ
れた被処理体４が１．設送されて来る。ここにおいて上
方より（遠）赤外線ヒーターの光源５が上記ベルトコン
ベア１に沿って配置され、また被処理体４を搬送してい
るコンベアベルト１の下側にこれに摺接して加熱ヒータ
ー９を配置してなるもので、このようにすることによっ
て加熱ヒーター９の熱はベルトコンベア１に摺接してい
るので熱伝導性が良好な状態でベルトコンベア１から被
処理体基板２を通して塗膜３の下側を加温する。また赤
外線ヒーター５はもともと塗布膜３の表面および内部を
均一に加熱する性質を多分にもつものであるから下側加
熱ヒーター９と共働して塗膜の均一加熱が実現する。し
たがって表面硬化膜が形成される以前に塗膜下層および
中間層も固化され、従来技術の欠点はここに全く改善さ
れることになっ□た。なお６は赤外線ヒーター５のカバ
ーであり、７は左輪、８は、覗べ動輪、１０は誘導輪で
ある。FIG. 1 is an explanatory view showing a cross section of the uniform heating device of the present invention, and FIG. 2 is a partially enlarged view thereof. Reference numeral 1 denotes a belt conveyor 8, which is made of stainless steel or heat-resistant synthetic resin, for example, and in the figure, starting from the left end, a coating film 3 is applied intermittently to a substrate 2 made of glass, metal, conductor, etc. in a previous process. The processed object 4 is 1. It will be shipped to you. Here, a light source 5 of a (far) infrared heater is placed from above along the belt conveyor 1, and a heating heater 9 is placed in sliding contact with the underside of the conveyor belt 1 that is conveying the object to be processed 4. By doing this, the heat from the heater 9 is in sliding contact with the belt conveyor 1, so it is transferred from the belt conveyor 1 through the substrate 2 to be processed under the coating film 3 with good thermal conductivity. Warm the sides. Furthermore, since the infrared heater 5 originally has the property of uniformly heating the surface and inside of the coating film 3, it works together with the lower heating heater 9 to achieve uniform heating of the coating film. Therefore, the underlayer and intermediate layer of the coating film are also hardened before the surface hardening film is formed, and the drawbacks of the prior art have been completely improved. Note that 6 is a cover for the infrared heater 5, 7 is a left wheel, 8 is a viewing wheel, and 10 is a guide wheel.
このようにして本発明の均一加熱装置により基体上の塗
膜を良好な性状で、しかも安定して右Ｉることかできる
ものである。In this way, the uniform heating device of the present invention can provide a stable coating film on a substrate with good properties.
第１図は本発明の均一加熱装置のＨ兄明図、第２図はそ
の部分拡大図である。
１・・・・・・・・ベルトコンベア
２・・・・・・・・被処理体の基板
３・・・・・・・・塗 膜
４・・・・・・・被処理体
５・・・・・・・赤外線ヒーター
６・・・・・・・・ヒーターのカバー
７・・・・・・・・友 輪
８・・・・・中部動輪
９・・・・・・・・加熱ヒーター
１０・・・・・・・・誘導輪FIG. 1 is an enlarged view of the uniform heating device of the present invention, and FIG. 2 is a partially enlarged view thereof. 1...Belt conveyor 2...Substrate of the object to be processed 3...Coating film 4...Object to be processed 5... ..... Infrared heater 6 ..... Heater cover 7 ..... Friend wheel 8 ..... Central driving wheel 9 ..... Heating heater 10・・・・・・・・・Guiding wheel
Claims (1)
アの下面に摺接するヒーターを配列し、かつ上記コンベ
アベルト上方に下向きに照射する赤外線ヒーター光源を
設けてなることを特徴とする均一加熱装置。Uniform heating characterized in that heaters are arranged in sliding contact with the lower surface of a heat-resistant belt conveyor on which the object to be heated is placed and conveyed, and an infrared heater light source that irradiates downwardly above the conveyor belt is provided. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17319181A JPS5875684A (en) | 1981-10-29 | 1981-10-29 | Uniform heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17319181A JPS5875684A (en) | 1981-10-29 | 1981-10-29 | Uniform heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5875684A true JPS5875684A (en) | 1983-05-07 |
| JPS6153632B2 JPS6153632B2 (en) | 1986-11-18 |
Family
ID=15955776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17319181A Granted JPS5875684A (en) | 1981-10-29 | 1981-10-29 | Uniform heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5875684A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007513790A (en) * | 2003-12-10 | 2007-05-31 | ゲノム リサーチ エルティーディー | Modular unit |
| WO2012008218A1 (en) * | 2010-07-12 | 2012-01-19 | シャープ株式会社 | Heating/drying apparatus for manufacturing film, film manufacturing apparatus provided with the heating/drying apparatus, and film manufacturing method |
| CN108807589A (en) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | Solar cell dryer with double air inlets |
-
1981
- 1981-10-29 JP JP17319181A patent/JPS5875684A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007513790A (en) * | 2003-12-10 | 2007-05-31 | ゲノム リサーチ エルティーディー | Modular unit |
| WO2012008218A1 (en) * | 2010-07-12 | 2012-01-19 | シャープ株式会社 | Heating/drying apparatus for manufacturing film, film manufacturing apparatus provided with the heating/drying apparatus, and film manufacturing method |
| CN108807589A (en) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | Solar cell dryer with double air inlets |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6153632B2 (en) | 1986-11-18 |
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