JPS587136A - 投影式露光方法およびその装置 - Google Patents

投影式露光方法およびその装置

Info

Publication number
JPS587136A
JPS587136A JP56104455A JP10445581A JPS587136A JP S587136 A JPS587136 A JP S587136A JP 56104455 A JP56104455 A JP 56104455A JP 10445581 A JP10445581 A JP 10445581A JP S587136 A JPS587136 A JP S587136A
Authority
JP
Japan
Prior art keywords
projection
exposure
projected
dimensions
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56104455A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516014B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Susumu Komoriya
進 小森谷
Hiroshi Maejima
前島　央
Nobuyuki Irikita
信行 入来
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56104455A priority Critical patent/JPS587136A/ja
Publication of JPS587136A publication Critical patent/JPS587136A/ja
Publication of JPH0516014B2 publication Critical patent/JPH0516014B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
JP56104455A 1981-07-06 1981-07-06 投影式露光方法およびその装置 Granted JPS587136A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56104455A JPS587136A (ja) 1981-07-06 1981-07-06 投影式露光方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56104455A JPS587136A (ja) 1981-07-06 1981-07-06 投影式露光方法およびその装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2155131A Division JPH0316113A (ja) 1990-06-15 1990-06-15 露光装置
JP3056476A Division JPH04211110A (ja) 1991-03-20 1991-03-20 投影式露光方法

Publications (2)

Publication Number Publication Date
JPS587136A true JPS587136A (ja) 1983-01-14
JPH0516014B2 JPH0516014B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-03

Family

ID=14381082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56104455A Granted JPS587136A (ja) 1981-07-06 1981-07-06 投影式露光方法およびその装置

Country Status (1)

Country Link
JP (1) JPS587136A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018738A (ja) * 1983-07-11 1985-01-30 Nippon Kogaku Kk <Nikon> 投影露光装置
US4854745A (en) * 1986-09-01 1989-08-08 Oiles Industry Co., Ltd. Thrust bearing made of synthetic resin
JPH03249637A (ja) * 1990-02-28 1991-11-07 Ushio Inc フィルム露光装置
US5153916A (en) * 1990-04-20 1992-10-06 Hitachi, Ltd. Method and apparatus for detecting focal plane
JPH05251303A (ja) * 1992-04-27 1993-09-28 Nikon Corp 投影型露光装置
US5914774A (en) * 1994-12-15 1999-06-22 Nikon Corporation Projection exposure apparatus with function to measure imaging characteristics of projection optical system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120180A (en) * 1975-04-15 1976-10-21 Nippon Telegr & Teleph Corp <Ntt> Pattern printing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120180A (en) * 1975-04-15 1976-10-21 Nippon Telegr & Teleph Corp <Ntt> Pattern printing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018738A (ja) * 1983-07-11 1985-01-30 Nippon Kogaku Kk <Nikon> 投影露光装置
US4854745A (en) * 1986-09-01 1989-08-08 Oiles Industry Co., Ltd. Thrust bearing made of synthetic resin
JPH03249637A (ja) * 1990-02-28 1991-11-07 Ushio Inc フィルム露光装置
US5153916A (en) * 1990-04-20 1992-10-06 Hitachi, Ltd. Method and apparatus for detecting focal plane
JPH05251303A (ja) * 1992-04-27 1993-09-28 Nikon Corp 投影型露光装置
US5914774A (en) * 1994-12-15 1999-06-22 Nikon Corporation Projection exposure apparatus with function to measure imaging characteristics of projection optical system

Also Published As

Publication number Publication date
JPH0516014B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-03

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