JPS5868717A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS5868717A
JPS5868717A JP16702781A JP16702781A JPS5868717A JP S5868717 A JPS5868717 A JP S5868717A JP 16702781 A JP16702781 A JP 16702781A JP 16702781 A JP16702781 A JP 16702781A JP S5868717 A JPS5868717 A JP S5868717A
Authority
JP
Japan
Prior art keywords
light
receiving lens
lens
light receiving
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16702781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043497B2 (enrdf_load_stackoverflow
Inventor
Tokuji Takahashi
高橋　徳治
Kazumi Furuta
和三 古田
Tomio Nakamura
富夫 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP16702781A priority Critical patent/JPS5868717A/ja
Publication of JPS5868717A publication Critical patent/JPS5868717A/ja
Publication of JPH043497B2 publication Critical patent/JPH043497B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16702781A 1981-10-21 1981-10-21 表面検査装置 Granted JPS5868717A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16702781A JPS5868717A (ja) 1981-10-21 1981-10-21 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16702781A JPS5868717A (ja) 1981-10-21 1981-10-21 表面検査装置

Publications (2)

Publication Number Publication Date
JPS5868717A true JPS5868717A (ja) 1983-04-23
JPH043497B2 JPH043497B2 (enrdf_load_stackoverflow) 1992-01-23

Family

ID=15842027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16702781A Granted JPS5868717A (ja) 1981-10-21 1981-10-21 表面検査装置

Country Status (1)

Country Link
JP (1) JPS5868717A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6463845A (en) * 1987-09-02 1989-03-09 Asahi Optical Co Ltd Method for inspecting surface to be inspected having linear defect

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114039A (en) * 1974-07-25 1976-02-04 Sanyo Electric Co Hyojipaneruno ekishofunyuhoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114039A (en) * 1974-07-25 1976-02-04 Sanyo Electric Co Hyojipaneruno ekishofunyuhoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6463845A (en) * 1987-09-02 1989-03-09 Asahi Optical Co Ltd Method for inspecting surface to be inspected having linear defect

Also Published As

Publication number Publication date
JPH043497B2 (enrdf_load_stackoverflow) 1992-01-23

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