JPS5862827A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS5862827A JPS5862827A JP56162452A JP16245281A JPS5862827A JP S5862827 A JPS5862827 A JP S5862827A JP 56162452 A JP56162452 A JP 56162452A JP 16245281 A JP16245281 A JP 16245281A JP S5862827 A JPS5862827 A JP S5862827A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording
- magnetic
- permalloy
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 20
- 230000005415 magnetization Effects 0.000 claims description 14
- 229910000889 permalloy Inorganic materials 0.000 abstract description 19
- 230000007797 corrosion Effects 0.000 abstract description 10
- 238000005260 corrosion Methods 0.000 abstract description 10
- 239000002184 metal Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002861 polymer material Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 57
- 239000010410 layer Substances 0.000 description 16
- 125000004429 atom Chemical group 0.000 description 7
- 239000002356 single layer Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は垂直記録方式に適した磁気記録媒体に関する。[Detailed description of the invention] The present invention relates to a magnetic recording medium suitable for perpendicular recording.
一般に短波長記録特性の優れた磁気記録方式として、垂
直記録方式がある。この方式においては媒体の膜面に垂
直方向が磁化容易軸である垂直記録媒体が盛装となる。Generally, a perpendicular recording method is a magnetic recording method that has excellent short wavelength recording characteristics. In this system, a perpendicular recording medium whose axis of easy magnetization is perpendicular to the film surface of the medium is mounted.
このような媒体に信号を記録すると残留磁化は媒体の膜
面に垂直方向を向き、従って信号が短波長になる程媒体
内反磁界は減少し、優れた再生出力が得られる。垂直記
録媒体は高分子材料あるいは非磁性金属から成る基板上
に、Coとc rを主成分とし垂直方向に磁化容易軸を
有する磁性層(以下この磁性層をCo−Cr垂直磁化膜
と呼ぶ)をスパッタリング法あるいは真空蒸着法により
形成したものである。coとOrを主成分としたスパッ
タ膜あるいは蒸着膜は、Crの量が約30重量%以下の
範囲では結晶系が稠密六方構造であり、そのC軸を膜面
に対して垂直方向に配向させることができ、かつ垂直方
向の異方性磁界が反磁界よりも大きくなるまで飽和磁化
を低下させることが可能なので垂直磁化膜を実現できる
。またCrを約18重量係以上含むCo −Cr垂直磁
化膜は優れた耐食性を有しており、60’C90%雰囲
気中に6か月間放置しても殆ど変化はみられない。しか
し基板上に直接にCo −Cr垂直磁化膜を形成した垂
直記録媒体(以下この媒体を単層膜m#−と呼ぶ)は、
信号を記録再生する際の効率が低い。これを改善するた
めに第1図に示すような構造の媒体(以下この媒体を2
層膜媒体と呼ぶ)が開発されている。これは高分子材料
あるいは非磁性金属から成る基板1とCo −Cr垂直
磁化膜3との間て、膜面内に磁化容易軸を有するパーマ
ロイより成る磁性層2を設けたものである。なおパーマ
ロイとはFe及び7VJiを主成分とする合金の総称で
ある。この様な構造を有する2層膜媒体を用いれば、単
層膜媒体に比べ記録再生効率が改善され、特に第2図に
示す様な補助磁極励磁型垂直ヘッドにより信号を記録再
生する際には、記録時及び再生時いずれの場合において
も約2゜dBの効率改善が認められている。なお、第2
図において、4は強磁性薄膜より成る主磁極、6は励磁
巻線6の巻かれた強磁性コアより成る補助磁極であり、
両磁極で媒体をはさんでいる。When a signal is recorded on such a medium, the residual magnetization is oriented perpendicularly to the film surface of the medium, and therefore, the shorter the signal wavelength, the smaller the demagnetizing field within the medium, and the better the reproduced output. A perpendicular recording medium has a magnetic layer on a substrate made of a polymeric material or a nonmagnetic metal, which is mainly composed of Co and Cr and has an axis of easy magnetization in the perpendicular direction (hereinafter, this magnetic layer is referred to as a Co-Cr perpendicular magnetization film). is formed by a sputtering method or a vacuum evaporation method. Sputtered or vapor-deposited films containing Co and Or as main components have a close-packed hexagonal crystal structure when the amount of Cr is about 30% by weight or less, and the C axis is oriented perpendicular to the film surface. It is also possible to reduce the saturation magnetization until the anisotropic magnetic field in the perpendicular direction becomes larger than the demagnetizing field, making it possible to realize a perpendicularly magnetized film. Further, a Co--Cr perpendicularly magnetized film containing Cr of about 18% by weight or more has excellent corrosion resistance, and almost no change is observed even if it is left in a 60'C 90% atmosphere for 6 months. However, a perpendicular recording medium in which a Co-Cr perpendicular magnetization film is formed directly on a substrate (hereinafter this medium will be referred to as a single-layer film m#-)
Low efficiency when recording and reproducing signals. In order to improve this, a medium with a structure as shown in Figure 1 (hereinafter referred to as 2
layered media) have been developed. A magnetic layer 2 made of permalloy having an axis of easy magnetization in the plane of the film is provided between a substrate 1 made of a polymeric material or a nonmagnetic metal and a perpendicularly magnetized Co--Cr film 3. Note that permalloy is a general term for alloys whose main components are Fe and 7VJi. Using a double-layer film medium with such a structure improves recording and reproducing efficiency compared to a single-layer film medium, especially when recording and reproducing signals using an auxiliary pole-excited vertical head as shown in Figure 2. , an efficiency improvement of approximately 2° dB was observed both during recording and during playback. In addition, the second
In the figure, 4 is a main magnetic pole made of a ferromagnetic thin film, 6 is an auxiliary magnetic pole made of a ferromagnetic core around which an excitation winding 6 is wound,
The medium is sandwiched between the two magnetic poles.
・以上の様に2層媒体によれば、単層膜媒体に比べ非常
に優れた記録再生効率が得られるが、ツク−□
マロイ膜はC0−Cr垂直磁化膜よりも耐食性が悪く、
ざらに両膜が直接接触しているために局部電池を発生し
腐食し易い。実際K Crを20重量%含むCo −C
r垂直磁化膜のみから成る単層膜媒体と、これと同じ組
成のCo−Cr膜及びパーマロイ膜から成る2層膜媒体
を同時に60℃90チ雰囲気中に入れ、1か月間放置し
た後に媒体表面を光学顕微鏡にて観察すると、単層膜媒
体は変化が見られなかったが、2層膜媒体においては・
・ン点状の錆が発生していた。・As mentioned above, the dual-layer media can achieve extremely superior recording and reproducing efficiency compared to single-layer media, but the Tsuku-□ Malloy film has poorer corrosion resistance than the C0-Cr perpendicular magnetization film.
Because the two membranes are in direct contact with each other, local batteries are likely to occur and corrosion is likely to occur. Co-C which actually contains 20% by weight of KCr
r A single-layer film medium consisting only of a perpendicularly magnetized film and a two-layer film medium consisting of a Co-Cr film and a permalloy film having the same composition were placed in an atmosphere of 60°C and 90°C at the same time, and after being left for one month, the medium surface was When observed with an optical microscope, no change was observed in the single-layer film medium, but in the double-layer film medium.
・There were spots of rust.
本発明は2層膜媒体において、単層膜媒体よりも優れた
記録再生効率を有しかつ耐食性の改善された垂直記録媒
体を提供するものである。以下VC図面を用い本発明の
説明を行うQ
2層膜媒体において、パーマロイ膜は一般にスパッタリ
ング法あるいは真空蒸着法により形成されるが、形成時
に酸素を導入するとできた膜は内部に酸素を含んだ状態
になる。電子線回折法により分析すると、この様な膜は
パーマロイと酸化物の混合したものであることがわかる
。真空蒸着法11
により蒸着時に酸素を導入して作成した膜について、オ
ージェ電子分光法を用いて分析した膜中の酸素の平均値
と酸素導入量との関係を第3図に示 −
す。この図より蒸着時の酸素導入量が多い程膜中の酸素
が増加していることがわかる。この様な酸素を含んだ膜
は含まない膜に比べて耐食性が良く、またC o −C
r膜をその上に形成した場合に両膜間の局部電池による
腐食も少なくなる。しかしパーマロイは酸素を含むと透
磁率μ及び飽和磁化Msが減少し、従って磁気特性が劣
化する。μ及びMsと膜中の酸素の平均値との関係を第
4図に示す。The present invention provides a perpendicular recording medium, which is a two-layer film medium, and which has superior recording and reproducing efficiency than a single-layer film medium and has improved corrosion resistance. The present invention will be explained below using VC drawings.Q In two-layer film media, permalloy films are generally formed by sputtering or vacuum evaporation, but when oxygen is introduced during formation, the resulting film contains oxygen inside. become a state. Analysis by electron diffraction reveals that such a film is a mixture of permalloy and oxide. Figure 3 shows the relationship between the average value of oxygen in the film and the amount of oxygen introduced, which was analyzed using Auger electron spectroscopy for a film prepared by introducing oxygen during vapor deposition using vacuum evaporation method 11. From this figure, it can be seen that the larger the amount of oxygen introduced during vapor deposition, the more oxygen in the film increases. Films containing oxygen have better corrosion resistance than films that do not contain oxygen, and
When the r film is formed thereon, corrosion due to local batteries between the two films is also reduced. However, when permalloy contains oxygen, its magnetic permeability μ and saturation magnetization Ms decrease, resulting in deterioration of its magnetic properties. FIG. 4 shows the relationship between μ and Ms and the average value of oxygen in the film.
この図より膜中の酸素量が増加するに従い、磁気特性が
劣化することが明らかである。そこで2層膜媒体として
使用さノするパーマロイ膜においてμやMsが減少した
場合に記録再生効率がどのように変化するかを友験によ
り確かめた。実験結果の11+llを第5図r(示す。It is clear from this figure that as the amount of oxygen in the film increases, the magnetic properties deteriorate. Therefore, it was experimentally confirmed how the recording and reproducing efficiency changes when μ and Ms decrease in a permalloy film used as a two-layer film medium. The experimental results 11+ll are shown in Figure 5r.
実線7及び破線8はそれぞれ記録効寮及び再生効率であ
る。なお実験に用いた2層膜媒体のパーマロイ膜の組成
はFeが20vIt%、Niが80tut%であり、’
Co −Cr垂直磁化膜の組成はCoが80 w t
%、Crが2゜y+Jt %である。膜厚はいずれも0
.16μmである。The solid line 7 and the broken line 8 are the recording efficiency and reproduction efficiency, respectively. The composition of the permalloy film as the two-layer film medium used in the experiment was 20 vIt% Fe and 80tt% Ni.
The composition of the Co-Cr perpendicular magnetization film is 80 wt Co.
%, Cr is 2°y+Jt%. All film thicknesses are 0.
.. It is 16 μm.
また記録再生用ヘッドとしては第2図に示す補助磁極励
磁型垂直ヘッドを用い、波長0.6μmの正弦波を記録
し再生した。第5図よりパーマロイ膜中の酸素の量が増
加すると記録効率及び再生効率が劣化することがわかる
。特に(酸素原子数)/(Fe原子数+Ni原子数)が
8o%になると酸素がない場合に比べて記録効率は20
dB、再生効率は18dB低下し、単層膜媒体と同程度
の効率になってしまう。従って2層膜媒体としての優位
性を保つためには(酸素原子数) / (F e原子数
+Ni原子数)を80%以下にすることが心安である。Further, as a recording/reproducing head, an auxiliary magnetic pole excitation type vertical head shown in FIG. 2 was used to record and reproduce a sine wave having a wavelength of 0.6 μm. It can be seen from FIG. 5 that as the amount of oxygen in the permalloy film increases, the recording efficiency and reproduction efficiency deteriorate. In particular, when (number of oxygen atoms)/(number of Fe atoms + number of Ni atoms) becomes 80%, the recording efficiency is 20% compared to the case without oxygen.
dB, the reproduction efficiency decreases by 18 dB, and the efficiency becomes comparable to that of a single-layer film medium. Therefore, in order to maintain its superiority as a two-layer film medium, it is safe to keep the ratio (number of oxygen atoms)/(number of Fe atoms+number of Ni atoms) to 80% or less.
また耐食性に関しては2層膜媒体を60℃90%雰囲気
中に1か月間入れて、媒体表面を光学顕微鏡にて観察し
た結果、(酸素原子数)/(Fe原子数+Ni原子数)
が2o%未満の膜においては・・ン点状の錆が発生しで
いたが、2o%以上の膜においては殆ど変化が見られな
かった。Regarding corrosion resistance, the two-layer film medium was placed in a 60°C 90% atmosphere for one month and the medium surface was observed using an optical microscope. As a result, (number of oxygen atoms) / (number of Fe atoms + number of Ni atoms)
In films with a content of less than 20%, spot-like rust was generated, but in films with a content of 20% or more, almost no change was observed.
なおパーマロイ膜の組成を変えでも上記の結果とほぼ同
様の結果が得られた。Note that almost the same results as above were obtained even when the composition of the permalloy film was changed.
本発明によると以上の如く、2層膜媒体においてFeと
Niの合計原子数の20%以J:80 %以下の原子数
の酸素を含むパーマロイ膜を使用することにより、記録
再生効率及び耐食性の優れた垂直記録媒体が得られる。According to the present invention, as described above, recording/reproducing efficiency and corrosion resistance can be improved by using a permalloy film containing oxygen in an amount of 20% or more and 80% or less of the total number of Fe and Ni atoms in a two-layer film medium. An excellent perpendicular recording medium is obtained.
第1図は磁気記録媒体の断面図、第2図は上記磁気記録
媒体を用い記録再生を行っている様子を示す一部断面正
面図、第3図〜第6図は本発明を説明するための図で、
このうち第3図は第1の磁性層の一例であるパーマロイ
膜蒸着時の酸素導入針と同膜中の酸素含有量との関係を
示し、第4図は上記パーマロイ膜における酸素含有量と
透磁率ならびに飽和磁化との関係を示し、第5図は同じ
く上記パーマロイ膜における酸素含有量と記録再生効率
との関係を示す。
1・・・・−・基板、2・・・・・・パーマロイよりな
る磁性層、3・・・・・垂直磁化膜。
代理人の氏名 弁理士 中 尾 敏1男 ほか1名lI
41図
@2図
第3図
1Fx層1%eyn蓼等At (timin)第4図
丁1″
−V爾・
第5図
50
、意I原l玖
(Cr11−VCc)
ν
〔勢→FIG. 1 is a sectional view of a magnetic recording medium, FIG. 2 is a partially sectional front view showing how recording and reproduction are performed using the magnetic recording medium, and FIGS. 3 to 6 are for explaining the present invention. In the diagram,
Of these, Figure 3 shows the relationship between the oxygen introduction needle and the oxygen content in the permalloy film during deposition of the permalloy film, which is an example of the first magnetic layer, and Figure 4 shows the relationship between the oxygen content and the permeability in the permalloy film. The relationship between magnetic property and saturation magnetization is shown, and FIG. 5 also shows the relationship between oxygen content and recording/reproducing efficiency in the permalloy film. 1...substrate, 2...magnetic layer made of permalloy, 3...perpendicular magnetization film. Name of agent: Patent attorney Satoshi Nakao and one other person
Figure 41 @ Figure 2 Figure 3 1 Fx layer 1% eyn At (timin) Figure 4 D1'' -V er・ Figure 5 50, Igen I (Cr11-VCc) ν
Claims (1)
とする第1の磁性層が形成され、さらにその上に膜面に
垂直方向に磁化容易軸を有しC。 とCrを主成分とする第2の磁性層が形成された磁気記
録媒体において、前記第1の磁性層が原子数においてF
e jl N iの合計原子数の20チ以上8o%以
下の酸素を含むことを特徴とする磁気記録媒体。[Claims] A first magnetic layer mainly composed of Fe and Ni is formed on a substrate and has an easy axis of magnetization in the film plane, and further has an easy axis of magnetization perpendicular to the film surface. Has C. In a magnetic recording medium in which a second magnetic layer mainly composed of F and Cr is formed, the first magnetic layer has F in number of atoms.
A magnetic recording medium characterized in that it contains oxygen in an amount of 20 or more and 80% or less of the total number of atoms of e jl N i.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56162452A JPS5862827A (en) | 1981-10-12 | 1981-10-12 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56162452A JPS5862827A (en) | 1981-10-12 | 1981-10-12 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5862827A true JPS5862827A (en) | 1983-04-14 |
Family
ID=15754874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56162452A Pending JPS5862827A (en) | 1981-10-12 | 1981-10-12 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5862827A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59218626A (en) * | 1983-05-27 | 1984-12-08 | Hitachi Ltd | Vertical magnetic recording medium |
JPS60193126A (en) * | 1984-03-13 | 1985-10-01 | Anelva Corp | Vertical magnetized flexible disk |
EP0178685A2 (en) * | 1984-10-19 | 1986-04-23 | Sony Corporation | Perpendicular magnetic recording medium and method of making same |
-
1981
- 1981-10-12 JP JP56162452A patent/JPS5862827A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59218626A (en) * | 1983-05-27 | 1984-12-08 | Hitachi Ltd | Vertical magnetic recording medium |
JPS60193126A (en) * | 1984-03-13 | 1985-10-01 | Anelva Corp | Vertical magnetized flexible disk |
EP0178685A2 (en) * | 1984-10-19 | 1986-04-23 | Sony Corporation | Perpendicular magnetic recording medium and method of making same |
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