JPH06105499B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH06105499B2 JPH06105499B2 JP3480185A JP3480185A JPH06105499B2 JP H06105499 B2 JPH06105499 B2 JP H06105499B2 JP 3480185 A JP3480185 A JP 3480185A JP 3480185 A JP3480185 A JP 3480185A JP H06105499 B2 JPH06105499 B2 JP H06105499B2
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- JP
- Japan
- Prior art keywords
- magnetic recording
- film
- recording medium
- magnetic
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に使用できる垂直磁気記録用
の磁気記録媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for perpendicular magnetic recording that can be used for high density magnetic recording.
従来の技術 近年、垂直磁気記録に用いる磁気記録媒体は量産性を考
慮した材料に開発が移ってきている。2. Description of the Related Art In recent years, the development of magnetic recording media used for perpendicular magnetic recording has shifted to materials that take mass productivity into consideration.
以下、第３図及び第４図を参照しながら、従来の垂直磁
気記録用の磁気記録媒体について説明する。A conventional magnetic recording medium for perpendicular magnetic recording will be described below with reference to FIGS. 3 and 4.
第３図に示した磁気記録媒体において、（１）は高分子
フィルムから成る基板で、（２）はCo−Crスパッタ膜に
代表される垂直磁化膜、（３）は保護膜である。In the magnetic recording medium shown in FIG. 3, (1) is a substrate made of a polymer film, (2) is a perpendicular magnetization film represented by a Co—Cr sputtered film, and (3) is a protective film.
第４図に示した磁気記録媒体においては、（４）は高分
子フィルム基板、（５）は軟磁性層で、もっぱらパーマ
ロイ薄膜が用いられており、（６）は垂直磁化膜、
（７）は保護膜で、かかる構成のものは、軟磁性層
（５）を介在させることで、第３図の構成のものより垂
直磁化膜（６）に課せられる条件がゆるく、量産時の再
現性は良好になるものと期待されており、特公昭58−91
号公報に於て詳しく記載されている。In the magnetic recording medium shown in FIG. 4, (4) is a polymer film substrate, (5) is a soft magnetic layer, and a permalloy thin film is exclusively used, (6) is a perpendicular magnetization film,
Reference numeral (7) is a protective film, which has a soft magnetic layer (5) so that the condition imposed on the perpendicular magnetization film (6) is looser than that of the structure shown in FIG. It is expected that the reproducibility will be good.
It is described in detail in the publication.
以上の構成のいずれかの磁気記録媒体は、補助磁極励磁
型の垂直ヘッドを組み合わせることで、高密度記録時の
減磁の改良がなされ、記録ビット間隔が約0.2μｍに於
ても充分な飽和特性を示すことが確認されている〔例え
ば、映像情報、第15巻、第２号、第33〜40頁（1983
年）〕。The magnetic recording medium of any of the above configurations is combined with an auxiliary magnetic pole excitation type vertical head to improve demagnetization during high-density recording and achieve sufficient saturation even when the recording bit interval is about 0.2 μm. It has been confirmed that it exhibits characteristics (eg, Video Information, Volume 15, No. 2, pp. 33-40 (1983).
Year)〕.
一方、垂直磁気記録に対する期待を現実のものにするに
は、高品質な垂直磁気記録に適する磁気記録媒体の量産
化が重大な課題のひとつであることは、前記文献の映像
情報第40頁にも記載されている通りであり、その点に鑑
みて、Co−Ｏ系、Co−Ni−Ｏ系の垂直磁化膜の利用が最
近提案されている〔特開昭59−162622号公報、特開昭59
−163810号公報〕。これらの垂直磁化膜は、既に実用に
供されているCo−Ｏ系、Co−Ni−Ｏ系の斜め蒸着膜に製
法も極めて近く、Co−Cr蒸着膜より低い基板温度で大き
な垂直方向の抗磁力が得られる点において、量産性は現
状では最も優れているものといえる。On the other hand, in order to realize expectations for perpendicular magnetic recording, mass production of magnetic recording media suitable for high-quality perpendicular magnetic recording is one of the important issues. As described above, in view of this point, the use of a Co—O based or Co—Ni—O based perpendicularly magnetized film has recently been proposed [JP-A-59-162622]. Sho 59
-163810 publication). These perpendicularly magnetized films are very similar in manufacturing method to Co-O-based and Co-Ni-O-based oblique vapor deposition films that have already been put to practical use, and have a large perpendicular resistance at a substrate temperature lower than that of Co-Cr vapor deposition films. It can be said that mass productivity is currently the best in terms of obtaining magnetic force.
発明が解決しようとする問題点 しかしながら、Co−Ｏ系、Co−Ni−Ｏ系の垂直磁化膜
は、磁気特性をCo−Crスパッタ膜と比較した時、垂直方
向の抗磁力、反磁場補正したヒステリシス曲線の垂直方
向の角形性については、ほぼ近い性能を有するものの、
磁気記録媒体としての重要な記録再生特性について確か
めた時、Co−Crスパッタ膜、Co−Cr蒸着膜で得られてい
る性能〔例えば日本応用磁気学会誌、第８巻、第１号、
第28〜31頁（1984年）〕に比較した時性能的には劣る。
この原因については明確ではないが、巨視的には磁気特
性で把握できても、微視的にはスペーシング損失となる
酸化層が厚くなりすぎるものと推察されるものである。
従って、Co−Ｏ系、Co−Ni−Ｏ系垂直磁化膜の製法上の
利点を生かすには、媒体性能を改良する必要がある。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, when the magnetic characteristics of the Co—O based and Co—Ni—O based perpendicularly magnetized films are compared with those of the Co—Cr sputtered film, the coercive force and demagnetizing field in the perpendicular direction are corrected. Regarding the squareness of the hysteresis curve in the vertical direction, although it has almost the same performance,
When confirming the important recording / reproducing characteristics as a magnetic recording medium, the performance obtained by a Co-Cr sputtered film and a Co-Cr vapor-deposited film [for example, Journal of Applied Magnetics of Japan, Vol. 8, No. 1,
Performance is inferior when compared with pages 28-31 (1984)].
Although the cause of this is not clear, it is presumed that the oxide layer, which causes a spacing loss microscopically, becomes too thick even if the magnetic characteristics can be macroscopically understood.
Therefore, in order to take advantage of the manufacturing method of the Co—O and Co—Ni—O perpendicularly magnetized films, it is necessary to improve the medium performance.
本発明は、上記問題点に鑑み、微視的な構造からくる酸
化層によるスペーシング損失を減少せしめる材料構成を
とることにより、量産性にも優れ、垂直磁気記録再生特
性にも優れた構成の垂直磁気記録に適した磁気記録媒体
を提供することを目的とする。In view of the above problems, the present invention adopts a material configuration that reduces the spacing loss due to the oxide layer that is caused by the microscopic structure, and thus is excellent in mass productivity and also in the configuration of excellent perpendicular magnetic recording / reproducing characteristics. An object is to provide a magnetic recording medium suitable for perpendicular magnetic recording.
問題点を解決するための手段 上記問題点を解決するために、本発明の磁気記録媒体
は、Co−Ｍ−Ｏ系垂直磁化膜を備え、その組成におい
て、ＯがCoに対して10〜30原子％、ＭがAu、Cu、Pt、Ni
−Au、Ni−Cu、Ni−Ptの群より選ばれ、Coに対して５〜
30原子％の範囲にある構成にした。Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention comprises a Co—M—O system perpendicular magnetization film, and in the composition thereof, O is 10 to 30 with respect to Co. Atomic%, M is Au, Cu, Pt, Ni
-Au, Ni-Cu, Ni-Pt selected from the group of 5 to Co
The composition is in the range of 30 atom%.
作用 上記構成において、Au又Cu又はPtの存在により垂直磁化
膜に形成される表面酸化層（CoO、NiO、Co3O4等）が薄
くなり、スペーシング損失を低減できるので、短波長、
狭トラックによる高密度記録においても信号の再生出力
を大きくすることができることとなる。Action In the above configuration, the surface oxide layer (CoO, NiO, Co 3 O 4, etc.) formed on the perpendicularly magnetized film becomes thin due to the presence of Au, Cu, or Pt, and the spacing loss can be reduced.
It is possible to increase the reproduction output of the signal even in the high density recording by the narrow track.
実施例 以下、本発明の実施例について、第１図及び第２図に基
づき説明する。Example An example of the present invention will be described below with reference to FIGS. 1 and 2.
第１図は本発明の一実施例にかかる磁気記録媒体を示し
ており、同図において、（11）は高分子フィルムよりな
る基板、（12）は基板（11）上に形成された軟磁性層、
（13）は軟磁性層（12）上に形成された本発明構成の垂
直磁化膜、（14）は保護膜である。FIG. 1 shows a magnetic recording medium according to one embodiment of the present invention. In FIG. 1, (11) is a substrate made of a polymer film, and (12) is a soft magnetic film formed on the substrate (11). layer,
(13) is a perpendicular magnetic film of the present invention formed on the soft magnetic layer (12), and (14) is a protective film.
第２図は本発明の磁気記録媒体を製造するのに用いた蒸
着装置の要部構成を示しており、同図において、（21）
は基板（11）に軟磁性層（12）（第１図）に形成してな
る積層テープ、（22）はテープ（21）の送り出し軸、
（23）はテープ（21）の巻取り軸、（24）は円筒状キャ
ン、（25）はマスク、（26）はスリット状開口部、（2
7）は高周波放電電極、（28）は蒸発源容器、（29A）
（29B）はそれぞれ第１及び第２の蒸着材料、（30A）
（30B）はそれぞれ蒸着材料（29A）（29B）を蒸発させ
るための第１及び第２の電子ビームである。FIG. 2 shows a main structure of a vapor deposition apparatus used for manufacturing the magnetic recording medium of the present invention. In FIG.
Is a laminated tape formed by forming the soft magnetic layer (12) (Fig. 1) on the substrate (11), (22) is a feeding axis of the tape (21),
(23) is the winding shaft of the tape (21), (24) is a cylindrical can, (25) is a mask, (26) is a slit-shaped opening, (2)
7) is high-frequency discharge electrode, (28) is evaporation source container, (29A)
(29B) is the first and second vapor deposition materials, respectively (30A)
(30B) are first and second electron beams for evaporating the vapor deposition materials (29A) and (29B), respectively.
本発明の磁気記録媒体を製造するために、あらかじめNi
−Fe軟磁性層（12）（Ni80wt％、膜厚0.4μｍ）を高周
波スパッタリング法と電子ビーム蒸着法によりそれぞれ
厚み12μｍのポリエチレンテレフタレートフィルムから
なる基板（11）上に形成して得られた積層テープ（21）
を用い、第２図の蒸着装置にて、垂直磁化膜（13）を高
周波イオンプレーティング法によって形成した。この際
の製造条件の主なものを第１表に示す。なお、蒸気の入
射角は両蒸着材料（29A）（29B）ともに12度以内に保っ
た。In order to manufacture the magnetic recording medium of the present invention, Ni
A laminated tape obtained by forming a Fe soft magnetic layer (12) (Ni80 wt%, film thickness 0.4 μm) on a substrate (11) made of a polyethylene terephthalate film having a thickness of 12 μm by a high frequency sputtering method and an electron beam evaporation method, respectively. (twenty one)
Using the above, the perpendicular magnetization film (13) was formed by the high frequency ion plating method in the vapor deposition apparatus shown in FIG. Table 1 shows the main manufacturing conditions in this case. The incident angle of vapor was kept within 12 degrees for both vapor deposition materials (29A) and (29B).
次に、得られた本発明の磁気記録媒体（試料１〜５）及
び比較例の物性と記録再生特性を、磁気ヘッドとして、
厚み0.2μｍのCo−Ｂ薄膜を主磁極とした補助磁極励磁
型垂直ヘッドを用いて測定した。その結果を第２表に示
す。なお、比較例は、高周波スパッタ法にて得た最も性
能のよいCo−Cr系垂直磁化膜とNi−Fe軟磁性膜（本発明
実施例と同一条件のものである）の積層型である。 Next, the obtained magnetic recording media of the present invention (Samples 1 to 5) and the physical properties and recording / reproducing characteristics of Comparative Examples were used as a magnetic head.
The measurement was performed using an auxiliary magnetic pole excitation type vertical head having a 0.2 μm thick Co—B thin film as a main magnetic pole. The results are shown in Table 2. The comparative example is a laminated type of a Co—Cr based perpendicular magnetization film and a Ni—Fe soft magnetic film (under the same conditions as those of the examples of the present invention) having the best performance obtained by the high frequency sputtering method.
＊S/Nは信号対雑音比で比較例を夫々０（dB）として示
してある。 * S / N is a signal-to-noise ratio, and comparative examples are shown as 0 (dB).
＊＊上表の値は、保護膜のない状態で求めたものである
が、実際は公知の保護膜を用いるので、約1dB程度S/Nが
低下する。** The values in the above table are obtained without a protective film, but since a publicly known protective film is actually used, the S / N is reduced by about 1 dB.
以上とは別に、生産性においてほぼ同一と考えられるCo
−Ｏ系、或いはCo−Ni−Ｏ系垂直磁化膜を用いた数例に
ついても確認したが、S/Nは−16〜−13dBと極めて悪か
ったことから考えても、本発明による媒体は、スパッタ
法で得られるCo−Cr系垂直磁化膜と性能は同等以上で、
生産性は20倍以上であり、非常に優れていると言える。
また、電子ビーム蒸着法で得られるCo−Cr垂直磁化膜よ
り、S/Nで２〜4dB良好であり、実施例より明らかなよう
に、キャン温度が20〜30℃と低くてよく、電子ビーム蒸
着法でCo−Cr垂直磁化膜を得る時のキャン温度より200
℃近く低くできることから、廉価で表面性の良いポリエ
ステルフィルムが基板として使える等の利点がある。Apart from the above, Co, which is considered to have almost the same productivity
Although several examples using -O system or Co-Ni-O system perpendicularly magnetized films were also confirmed, the medium according to the present invention is considered to have the S / N of -16 to -13 dB, which is extremely bad. The performance is equal to or higher than that of the Co-Cr system perpendicular magnetization film obtained by the sputtering method.
The productivity is more than 20 times, which is very excellent.
In addition, the Co-Cr perpendicularly magnetized film obtained by the electron beam evaporation method is 2 to 4 dB better in S / N, and as is clear from the example, the can temperature may be as low as 20 to 30 ° C. 200 from the can temperature when obtaining a Co-Cr perpendicular magnetic film by the vapor deposition method.
Since the temperature can be lowered to near ℃, there is an advantage that an inexpensive polyester film having a good surface property can be used as a substrate.
なお、Ｃ−Ｍ−Ｏ系垂直磁化膜における原子比率の関係
は、垂直磁化膜となる条件と、S/Nが良好となる条件
（その目安は、比較例に対して−1dB以上とした）の双
方から決る。本発明の媒体において、S/Nが良好となる
理由は、Au、Pt,Cuに対してCoやCo−Niが優先的に強化
されて表面酸化層の形成にあずかる際に、Au、Pt,Cu
が、CoやCo−Niの飽和磁化を下げて、容易軸を垂直に向
ける作用をするため、表面酸化層が薄くできるからであ
る。The relationship between the atomic ratios in the C-M-O system perpendicularly magnetized film is the condition that the film is a vertically magnetized film and the condition that the S / N is good (the standard is -1 dB or more compared to the comparative example). Decided from both sides. In the medium of the present invention, the reason why S / N is good is that Au, Pt, and Cu are preferentially reinforced with respect to Co and Co-Ni to participate in the formation of the surface oxide layer, Au, Pt, Cu
However, since the saturation magnetization of Co or Co—Ni is lowered and the easy axis is oriented vertically, the surface oxide layer can be thinned.
発明の効果 以上述べたごとく本発明によれば、生産性の優れた電子
ビーム蒸着法を基礎にして、低温基板上に、高密度記録
再生特性の優れた垂直磁化層を有する磁気記録媒体をう
ることができる。EFFECTS OF THE INVENTION As described above, according to the present invention, a magnetic recording medium having a perpendicular magnetization layer excellent in high-density recording / reproducing characteristics on a low-temperature substrate can be obtained on the basis of an electron beam evaporation method having excellent productivity. be able to.
第１図は本発明の一実施例に係る磁気記録媒体の拡大断
面図、第２図は磁気記録媒体製造装置の要部構成図、第
３図は従来の垂直磁気記録媒体で軟磁性層のない例の断
面図、第４図は従来の軟磁性層を有する垂直磁気記録用
の磁気記録媒体の断面図である。 （11）…基板、（12）…軟磁性層、（13）…Co−Ｍ−Ｏ
系垂直磁化膜、（14）…保護膜FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, FIG. 2 is a configuration diagram of a main part of a magnetic recording medium manufacturing apparatus, and FIG. 3 is a conventional perpendicular magnetic recording medium showing a soft magnetic layer. FIG. 4 is a sectional view of a non-existent example, and FIG. 4 is a sectional view of a conventional magnetic recording medium for perpendicular magnetic recording having a soft magnetic layer. (11) ... Substrate, (12) ... Soft magnetic layer, (13) ... Co-MO
System perpendicular magnetization film, (14)… Protective film
Claims (1)
Coに対して原子比率で10％〜30％の範囲で、ＭがAu、C
u、Pt、Ni−Au、Ni−Cu、Ni−Ptの群より選ばれ、Coに
対し原子比率で５％〜30％の範囲にあるCo−Ｍ−Ｏ系垂
直磁化膜を備えた磁気記録媒体。1. A composition represented by Co-MO, wherein O is
In the atomic ratio of 10% to 30% with respect to Co, M is Au, C
Magnetic recording having a Co-MO perpendicular magnetic film selected from the group consisting of u, Pt, Ni-Au, Ni-Cu, and Ni-Pt and having an atomic ratio of Co in the range of 5% to 30%. Medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3480185A JPH06105499B2 (en) | 1985-02-22 | 1985-02-22 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3480185A JPH06105499B2 (en) | 1985-02-22 | 1985-02-22 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61194625A JPS61194625A (en) | 1986-08-29 |
| JPH06105499B2 true JPH06105499B2 (en) | 1994-12-21 |
Family
ID=12424341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3480185A Expired - Lifetime JPH06105499B2 (en) | 1985-02-22 | 1985-02-22 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06105499B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2796092B2 (en) * | 1987-11-19 | 1998-09-10 | コーマグ，インコーポレイテッド | Recording medium film manufacturing method |
| KR970007795B1 (en) * | 1988-02-22 | 1997-05-16 | 소니 가부시끼 가이샤 | Magnetio recording medium |
| US5066552A (en) * | 1989-08-16 | 1991-11-19 | International Business Machines Corporation | Low noise thin film metal alloy magnetic recording disk |
| JP2913684B2 (en) * | 1989-08-28 | 1999-06-28 | ソニー株式会社 | Magnetic recording media |
| WO2004099724A2 (en) * | 2003-05-06 | 2004-11-18 | Sri International | Hydraulic cylinder with piston and a magnetic layer on the piston rod for piston position determination |
| US7259553B2 (en) | 2005-04-13 | 2007-08-21 | Sri International | System and method of magnetically sensing position of a moving component |
| US20060286414A1 (en) * | 2005-06-15 | 2006-12-21 | Heraeus, Inc. | Enhanced oxide-containing sputter target alloy compositions |
-
1985
- 1985-02-22 JP JP3480185A patent/JPH06105499B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61194625A (en) | 1986-08-29 |
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