JPS5860935U - Dummy wafer mounting mechanism - Google Patents
Dummy wafer mounting mechanismInfo
- Publication number
- JPS5860935U JPS5860935U JP15465981U JP15465981U JPS5860935U JP S5860935 U JPS5860935 U JP S5860935U JP 15465981 U JP15465981 U JP 15465981U JP 15465981 U JP15465981 U JP 15465981U JP S5860935 U JPS5860935 U JP S5860935U
- Authority
- JP
- Japan
- Prior art keywords
- unit
- dummy wafer
- dummy
- wafer
- mounting mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案ダミーウェハ装着機構に使用されるダミ
ーウェハの斜視図、第２図は本考案ダミーウェハ装着機
構に使用される石英ボードの斜視図、第３図は本考案ダ
ミーウェハ装着機構の他の実施例を示す斜視図である。
Ａ、１３．１３・・・・・・タミーウェハユニット、Ｂ
。
１４・・・・・・ウェハ載置部、Ｃ・・・・・・ユニッ
ト設置部、１．１・・・・・・ダミーウェハ、２． ２
． ８． ８・・・・・・角 ・形石英棒、５，５
・・・・・・基礎石英管、７・・・・・・丸形石英棒。Fig. 1 is a perspective view of a dummy wafer used in the dummy wafer mounting mechanism of the present invention, Fig. 2 is a perspective view of a quartz board used in the dummy wafer mounting mechanism of the present invention, and Fig. 3 is another implementation of the dummy wafer mounting mechanism of the present invention. It is a perspective view showing an example. A, 13.13... Tammy wafer unit, B
. 14...Wafer placement part, C...Unit installation part, 1.1...Dummy wafer, 2. 2
．． 8. 8... Square/shaped quartz rod, 5,5
...Basic quartz tube, 7...Round quartz rod.
Claims (2)
出させて気相成長を行うＣＶＤ装置に於いて、ウェハを
載置する石英ボードの反応ガス噴出側に設けられたユニ
ット載置部と、このユニット載置部に載置される複数の
ダミーウェハより構成されるダミーウェハユニットとか
ら成り、該ダミーウェハユニットを前記石英ボードのユ
ニット設置部に設置する事に依って複数のダミーウェハ
を一回の装着操作で石英ボードへ装着する事を特徴とし
たダミーウェハ装着機構。(1) In a CVD apparatus that performs vapor phase growth by ejecting a reactive gas onto a wafer placed on a quartz boat, a unit mounting portion is provided on the reactive gas ejecting side of the quartz board on which the wafer is placed. and a dummy wafer unit made up of a plurality of dummy wafers placed on the unit mounting section, and by installing the dummy wafer unit on the unit mounting section of the quartz board, the plurality of dummy wafers can be placed in one place. A dummy wafer mounting mechanism that can be mounted on a quartz board in just one mounting operation.
英ボードのユニット設置にストッパーを形成シ、ダミー
ウェハユニットの脱落を防止する事を特徴としたダミー
ウェハ装着機構。(2) A dummy wafer mounting mechanism according to claim 1 of the utility model registration, characterized in that a stopper is formed at the front rudder quartz board unit installation to prevent the dummy wafer unit from falling off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15465981U JPS5860935U (en) | 1981-10-16 | 1981-10-16 | Dummy wafer mounting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15465981U JPS5860935U (en) | 1981-10-16 | 1981-10-16 | Dummy wafer mounting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5860935U true JPS5860935U (en) | 1983-04-25 |
Family
ID=29947255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15465981U Pending JPS5860935U (en) | 1981-10-16 | 1981-10-16 | Dummy wafer mounting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5860935U (en) |
-
1981
- 1981-10-16 JP JP15465981U patent/JPS5860935U/en active Pending
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