JPS585681A - Testing device for semiconductor memory - Google Patents
Testing device for semiconductor memoryInfo
- Publication number
- JPS585681A JPS585681A JP56102807A JP10280781A JPS585681A JP S585681 A JPS585681 A JP S585681A JP 56102807 A JP56102807 A JP 56102807A JP 10280781 A JP10280781 A JP 10280781A JP S585681 A JPS585681 A JP S585681A
- Authority
- JP
- Japan
- Prior art keywords
- memory
- address
- bits
- inferior
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
Abstract
Description
【発明の詳細な説明】
この発明は、半導体メモリ試験装置に関するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor memory testing device.
従来この種の装置としてオ1図に示すものがあった。Conventionally, there was a device of this type as shown in Figure O1.
図においてfi+ +21は各々、X、Yアドレスセレ
クタ、1:IIけフェイルメモリで、不良発生アドレス
に対応した部分に不良発生情報を記憶するものである。In the figure, fi+ +21 is an X and Y address selector, and a 1:II fail memory, which stores failure occurrence information in a portion corresponding to a failure occurrence address.
141は蒔き込みデータ、読み出し時の比較データを発
生するデータジェネレータ、(5)はマルチアドレスコ
ントローラー、(6)はドライ/(とフンパレータの入
ったピンエレクトロニクス、(71が被試験半導体メモ
リであり、X行、Y列のマトリックスに配置された複数
ビットのメモリ素子を有する。141 is a data generator that generates data to be read and comparison data when reading, (5) is a multi-address controller, (6) is a pin electronics containing a dryer/( and a humperator), (71 is a semiconductor memory under test, It has multiple bit memory elements arranged in a matrix of X rows and Y columns.
次に動作について説明する。Next, the operation will be explained.
被試験半導体メモ1月7)をテストするだめのテスト実
行アドレスX、YアドレスセレクタIll Iりにより
決定され、そのアドレス情報がフェイルメモリ(31、
ピンエレクトロニクス(8)に伝わる。アドレスマルチ
プレクスの素子はマルチアドレスコントロール(5)に
より同−信J+線にX、Yのアドレス情報かのるが、ア
ドレスマルチプレクスでない素子はX、Y独立にその情
報がピンエレクトロニクス(6)に伝わる。書き込みデ
ータ、読み出し時の比較データがデータジェネレータ(
4)により発生し、被試験半導体メモリ(7)の決定さ
れたアドレスのメモリ素子に一旦上記書自込みデータが
書込まれ、その後続出されたデータと上記比較データと
がピンエレクトロニクスf6にて比較されることにより
メモリ素子の不良の有無が判定される。不良があると、
そのアドレス情報はフェイルメモ1月3)に蓄えられる
。これを全ビットのメモリ素子について繰返す。The test execution address for testing the semiconductor memo under test (January 7) is determined by the X and Y address selectors, and the address information is stored in the fail memory (31, 31,
It is transmitted to the pin electronics (8). Address multiplex elements transmit X and Y address information to the same signal J+ line by the multi-address control (5), but elements that are not address multiplex transmit that information independently to the pin electronics (6). Conveyed. Write data and comparison data during reading are generated by the data generator (
4), the self-write data is once written to the memory element at the determined address of the semiconductor memory under test (7), and the subsequently output data and the comparison data are compared at pin electronics f6. By doing so, it is determined whether or not the memory element is defective. If there is a defect,
The address information is stored in the fail memo (January 3). This is repeated for all bits of memory elements.
テトス終了時点にはフェイルメモリ(3)に不良ビット
のアドレス情報が蓄わ見られているので、フェイルメモ
リ(3)の内容を読み出し、各行、各列に存在する不良
ビットのアドレス及び数を認識することができる。At the end of Tetos, the address information of the defective bits is stored and viewed in the fail memory (3), so read the contents of the fail memory (3) and recognize the address and number of defective bits existing in each row and column. can do.
従来のメモリ試験装置は以上のように構成されているの
で、テスト終了後各行各列の不良ビット数を認識しよう
とすれば、もし半導体メモリがNビットなら最低N回、
フェイルメモリ(31をアクセスしなければならず、各
行各列の不良ビット数の認識に時間を多く費やす欠点が
あった。Conventional memory test equipment is configured as described above, so if you want to recognize the number of defective bits in each row and each column after the test, if the semiconductor memory is N bits, it must be tested at least N times.
The fail memory (31) has to be accessed, and there is a drawback that it takes a lot of time to recognize the number of defective bits in each row and each column.
この発明は上記のような従来のものの欠点を除去するた
めになされたもので、各行各列独立に不良ビット数を記
憶する装置を備えた半導体メモリ試験装置を提供するこ
とを目的としている。The present invention was made in order to eliminate the above-mentioned drawbacks of the conventional device, and an object of the present invention is to provide a semiconductor memory testing device equipped with a device for independently storing the number of defective bits in each row and each column.
以下、この発明の一実施例について説明する。An embodiment of the present invention will be described below.
オ8図において(81は行9列独立に設けられ各行。In Figure 8 (81 is provided independently in 9 rows and 9 columns for each row).
各列毎の不良ビット数を記憶する不良ビット数記憶回路
であり、(91けその内容を+1する演算器である。This is a defective bit number storage circuit that stores the number of defective bits for each column, and is an arithmetic unit that increments the contents of (91 decimals) by 1.
不良ビット数記憶回路(8)は高速メモリで構成され、
テストアドレスに応じて、テストアドレスを含む行もし
くは列毎の不良ビット数が常に出力され1、演算器(9
1により出力データが+1され、それが入力データとな
づている。不良発生時、エラー信号が不良ビット記憶回
路(81に対して書き込み信号となり、不良発生毎に不
良発生アドレスに応じた行及び列の不良ピット教記憶値
73;+1されていく、不良発生しない場合は、その前
の不良ビット数を保持している。The defective bit number storage circuit (8) is composed of high-speed memory,
Depending on the test address, the number of defective bits for each row or column containing the test address is always output 1,
1 increments the output data by 1, which is connected to the input data. When a defect occurs, the error signal becomes a write signal to the defective bit storage circuit (81), and each time a defect occurs, the defective pit bit storage value 73 of the row and column corresponding to the address where the defect occurs is incremented by +1.If no defect occurs holds the previous number of defective bits.
この発明の場合、被試験半導体メモ1月7)のメモリ素
子がNビットであれば、不良ビット数記憶回路(81を
行1列あわせてsVf回アクセスすることにより、各η
、各列の不良ビットのアドレス及び数を認識することが
できる。これはN−101メガビツトメモリ)の場合、
従来装置の11500にアクセス時間を短縮できること
を意味する。In the case of this invention, if the memory element of the semiconductor memo under test (January 7) has N bits, each η
, the address and number of defective bits in each column can be recognized. This is for N-101 megabit memory).
This means that the access time can be shortened compared to the conventional device 11500.
上記実施例では+1の演算器(9)を用いたが、これは
カクンターで構成しても同様の効果が得られる。In the above embodiment, the +1 arithmetic unit (9) is used, but the same effect can be obtained even if it is configured with a kakuunter.
以上のようにこの肋によれば模能試験実行中に各行各列
独立に不良ビット数を記憶するように構成したので、テ
スト終了後不良ビット数を認識する時間を大巾に短縮す
ることができる。As described above, according to this structure, the number of defective bits is stored independently in each row and column during the mock test, so the time required to recognize the number of defective bits after the test is completed can be greatly reduced. can.
オ1図は従来の半導体メモリ試験装置を示す構成図、オ
8図はこの発明の一笑施による半導体メモリ試験装置を
示す構成図である。
Il+ −−−メアドレスセレクタ、+21−−− Y
アドレスセレクタ、+31−−−7エイルメモリ、+4
1−−−データジェネレータ、(5)−m−マルチアド
レスコントロール、r6+ −−−ピンエレクトロニク
ス、+71−−一半導体メモリ、+81−−一不良ビッ
ト数記憶回路、+91−−− + 1演算器。
なお図中、同一符号は同一部分を示す。
代理人 葛 野 信 −
第1図
第2弧FIG. 1 is a block diagram showing a conventional semiconductor memory testing device, and FIG. 8 is a block diagram showing a semiconductor memory testing device according to the present invention. Il+ --- Mail address selector, +21 --- Y
Address selector, +31---7 Air memory, +4
1--data generator, (5)-m-multi-address control, r6+--pin electronics, +71--1 semiconductor memory, +81--1 defective bit number memory circuit, +91--+1 arithmetic unit. Note that in the figures, the same reference numerals indicate the same parts. Agent Shin Kuzuno - Figure 1, 2nd arc
Claims (1)
する被試験半導体メモリ、上記メモリ素子のメアFレス
を決定するメアドレスセレクタ、上記メモリ素子のYア
ドレスを決定するYアドレスセレクタ、上記メモリ素子
を試験するためのテストデータを発生するデータジェネ
レータ、上記各アドレスセレクタにより決定された所定
アドレスのメモリ素子を上記テストデータに基いて各ア
ドレスにつき順次試験し不良ビットを検知する検知手段
、この検知手段が不良ビットを検知する度に検知された
不良ビットの数を各行、各列毎に各々独立に計数し記憶
する記憶手段を備えた半導体メモリ試験装置。A semiconductor memory under test having a plurality of bits of memory elements arranged in X rows and Y columns, a mead address selector that determines a mere F address of the memory element, a Y address selector that determines the Y address of the memory element, and the memory A data generator that generates test data for testing the device; a detection device that sequentially tests the memory device at a predetermined address determined by each of the address selectors for each address based on the test data to detect defective bits; A semiconductor memory testing device comprising a storage means for independently counting and storing the number of detected defective bits for each row and each column each time the means detects a defective bit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56102807A JPS585681A (en) | 1981-06-30 | 1981-06-30 | Testing device for semiconductor memory |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56102807A JPS585681A (en) | 1981-06-30 | 1981-06-30 | Testing device for semiconductor memory |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS585681A true JPS585681A (en) | 1983-01-13 |
JPH0326480B2 JPH0326480B2 (en) | 1991-04-10 |
Family
ID=14337319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56102807A Granted JPS585681A (en) | 1981-06-30 | 1981-06-30 | Testing device for semiconductor memory |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS585681A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201629A (en) * | 1986-02-28 | 1987-09-05 | Kao Corp | Spray granulation method |
JPS63127499A (en) * | 1986-11-17 | 1988-05-31 | Yamada Denon Kk | Device for inspecting memory element |
JPS63185000A (en) * | 1987-01-27 | 1988-07-30 | Hitachi Electronics Eng Co Ltd | Memory ic checking device |
JP2007335050A (en) * | 2006-06-19 | 2007-12-27 | Yokogawa Electric Corp | Semiconductor memory test device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673354A (en) * | 1979-11-21 | 1981-06-18 | Advantest Corp | Testing device for ic |
-
1981
- 1981-06-30 JP JP56102807A patent/JPS585681A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673354A (en) * | 1979-11-21 | 1981-06-18 | Advantest Corp | Testing device for ic |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201629A (en) * | 1986-02-28 | 1987-09-05 | Kao Corp | Spray granulation method |
JPS63127499A (en) * | 1986-11-17 | 1988-05-31 | Yamada Denon Kk | Device for inspecting memory element |
JPS63185000A (en) * | 1987-01-27 | 1988-07-30 | Hitachi Electronics Eng Co Ltd | Memory ic checking device |
JP2007335050A (en) * | 2006-06-19 | 2007-12-27 | Yokogawa Electric Corp | Semiconductor memory test device |
Also Published As
Publication number | Publication date |
---|---|
JPH0326480B2 (en) | 1991-04-10 |
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