JPH0326480B2 - - Google Patents

Info

Publication number
JPH0326480B2
JPH0326480B2 JP56102807A JP10280781A JPH0326480B2 JP H0326480 B2 JPH0326480 B2 JP H0326480B2 JP 56102807 A JP56102807 A JP 56102807A JP 10280781 A JP10280781 A JP 10280781A JP H0326480 B2 JPH0326480 B2 JP H0326480B2
Authority
JP
Japan
Prior art keywords
address
memory
semiconductor memory
defective
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56102807A
Other languages
Japanese (ja)
Other versions
JPS585681A (en
Inventor
Keisuke Okada
Hideo Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56102807A priority Critical patent/JPS585681A/en
Publication of JPS585681A publication Critical patent/JPS585681A/en
Publication of JPH0326480B2 publication Critical patent/JPH0326480B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)

Description

【発明の詳細な説明】 この発明は、半導体メモリ試験装置に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor memory testing device.

従来この種の装置として第1図に示すものがあ
つた。
A conventional device of this type is shown in FIG.

図において1,2は各々、X、Yアドレスセレ
クタ、3はフエイルメモリで、不良発生アドレス
に対応した部分に不良発生情報を記憶するもので
ある。4は書き込みデータ、読み出し時の比較デ
ータを発生するデータジエネレータ、5はマルチ
アドレスコントローラー、6はドライバとコンパ
レータ等の入つたピンエレクトロニクス、7が被
試験半導体メモリであり、X行、Y列のマトリツ
クスに配置された複数のビツトのメモリ素子を有
する。
In the figure, 1 and 2 are X and Y address selectors, respectively, and 3 is a fail memory, which stores failure occurrence information in a portion corresponding to a failure occurrence address. 4 is a data generator that generates write data and comparison data during reading; 5 is a multi-address controller; 6 is pin electronics containing drivers and comparators; 7 is a semiconductor memory under test; It has a plurality of bit memory elements arranged in a matrix.

次に動作について説明する。 Next, the operation will be explained.

被試験半導体メモリ7をテストするためのテス
ト実行アドレスがX、Yアドレスセレクタ1,2
により決定され、そのアドレス情報がフエイルメ
モリ3、ピンエレクトロニクス6に伝わる。被試
験半導体メモリ7がアドレスマルチプレクスの素
子である場合にはマルチアドレスコントロール5
により同一信号線にX、Yのアドレス情報がのる
が、被試験半導体メモリ7がアドレスマルチプレ
クスでない素子である場合にはX、Y独立にその
情報がピンエレクトロニクス6に伝わる。書き込
みデータ、読み出し時の比較データがデータジエ
ネレータ4により発生し、被試験半導体メモリ7
の決定されたアドレスのメモリ素子に一旦上記書
き込みデータが書き込まれ、その後読出されたデ
ータと上記比較データとがピンエレクトロニクス
6にて比較されることによりメモリ素子の不良の
有無が判定される。不良があると、そのアドレス
情報はフエイルメモリ3に蓄えられる。これを全
ビツトのメモリ素子について繰返す。
The test execution address for testing the semiconductor memory under test 7 is the X, Y address selector 1, 2.
The address information is transmitted to the fail memory 3 and pin electronics 6. If the semiconductor memory under test 7 is an address multiplex element, the multi-address control 5
Therefore, X and Y address information are carried on the same signal line, but if the semiconductor memory under test 7 is a device that is not an address multiplex device, the information is transmitted to the pin electronics 6 independently for X and Y. Write data and comparison data at the time of reading are generated by the data generator 4 and sent to the semiconductor memory under test 7.
The write data is once written into the memory element at the determined address, and the pin electronics 6 compares the read data with the comparison data to determine whether or not the memory element is defective. If there is a defect, its address information is stored in the fail memory 3. This is repeated for all bits of memory elements.

テスト終了時点にはフエイルメモリ3に不良ビ
ツトのアドレス情報が蓄わえられているので、フ
エイルメモリ3の内容を読み出し、各行、各列に
存在する不良ビツトのアドレス及び数を認識する
ことができる。
At the end of the test, the address information of the defective bits is stored in the fail memory 3, so it is possible to read the contents of the fail memory 3 and recognize the address and number of defective bits present in each row and each column.

従来のメモリ試験装置は以上のように構成され
ているので、テスト終了後各行各列の不良ビツト
数を認識しようとすれば、もし半導体メモリがN
ビツトなら最低2N回、フエイルメモリ3をアク
セスしなければならず、各行各列の不良ビツト数
の認識に時間を多く費やす欠点があつた。
Conventional memory test equipment is configured as described above, so if you want to recognize the number of defective bits in each row and each column after the test, if the semiconductor memory
In the case of bits, the fail memory 3 must be accessed at least 2N times, which has the drawback of requiring a lot of time to recognize the number of defective bits in each row and each column.

この発明は上記のような従来のものの欠点を除
去するためになされたもので、各行各列独立に不
良ビツト数を記憶する装置を備えた半導体メモリ
試験装置を提供することを目的としている。
The present invention has been made in order to eliminate the above-mentioned drawbacks of the conventional device, and an object of the present invention is to provide a semiconductor memory testing device equipped with a device for independently storing the number of defective bits in each row and each column.

以下、この発明の一実施例について説明する。
第2図において8は行、列独立に設けられ各行、
各列毎の不良ビツト数を記憶する不良ビツト数記
憶回路であり、8はその内容を+1する演算器で
ある。
An embodiment of the present invention will be described below.
In FIG. 2, 8 is provided independently in rows and columns, and each row,
A defective bit number memory circuit stores the number of defective bits for each column, and 8 is an arithmetic unit that increments the contents by one.

被試験半導体メモリ7のテストは上記第1図に
示したものと同様に行なわれるものであるため、
その説明は省略し、主として不良ビツト数記憶回
路8の作用について述べる。
Since the semiconductor memory under test 7 is tested in the same manner as shown in FIG. 1 above,
The explanation thereof will be omitted, and the operation of the defective bit number storage circuit 8 will be mainly described.

不良ビツト数記憶回路8は高速メモリで構成さ
れ、テストアドレスに応じて、テストアドレスを
含む行もしくは列毎の不良ビツト数が常に出力さ
れ、演算器9により出力データが+1され、それ
が入力データとなつている。不良発生時、エラー
信号が不良ビツト記憶回路8に対して書き込み信
号となり、不良発生毎に不良発生アドレスに応じ
た行及び列の不良ビツト数記憶値が+1されてい
く。不良発生しない場合は、その前の不良ビツト
数を保持している。
The number of defective bits storage circuit 8 is composed of a high-speed memory, and according to the test address, the number of defective bits for each row or column containing the test address is always outputted, the output data is incremented by 1 by the arithmetic unit 9, and this is used as the input data. It is becoming. When a defect occurs, an error signal becomes a write signal to the defective bit storage circuit 8, and each time a defect occurs, the number of defective bits stored in the row and column corresponding to the address where the defect occurs is incremented by one. If no defects occur, the previous number of defective bits is retained.

この発明の場合、被試験半導体メモリ7のメモ
リ素子がNビツトであれば、不良ビツト数記憶回
路8を行、列あわめて2√回アクセスすること
により、各行、各列の不良ビツトのアドレス及び
数を認識することができる。これはN=106(メガ
ビツトメモリ)の場合、従来装置の1/1000にアク
セス時間を短縮できることを意味する。
In the case of this invention, if the memory element of the semiconductor memory under test 7 has N bits, the address of the defective bit in each row and column can be determined by accessing the defective bit number storage circuit 8 2√ times in total for rows and columns. and can recognize numbers. This means that when N=10 6 (megabit memory), the access time can be reduced to 1/1000 of that of the conventional device.

上記実施例では+1の演算器9を用いたが、こ
れはカウンターで構成しても同様の効果が得られ
る。
Although the +1 arithmetic unit 9 is used in the above embodiment, the same effect can be obtained even if it is configured with a counter.

以上のようにこの発明によれば機能試験実行中
に各行各列独立に不良ビツト数を記憶するように
構成したので、テスト終了後各行各列の不良ビツ
ト数を認識する時間を大巾に短縮することができ
る。
As described above, according to the present invention, since the number of defective bits in each row and each column is independently stored during the execution of a functional test, the time required to recognize the number of defective bits in each row and each column after the test is completed is greatly reduced. can do.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の半導体メモリ試験装置を示す構
成図、第2図はこの発明の一実施例による半導体
メモリ試験装置を示す構成図である。 1……メアドレスセレクタ、2……Yアドレス
セレクタ、3……フエイルメモリ、4……データ
ジエネレータ、5……マルチアドレスコントロー
ル、6……ピンエレクトロニクス、7……半導体
メモリ、8……不良ビツト数記憶回路、9……+
1演算器。なお図中、同一符号は同一部分を示
す。
FIG. 1 is a configuration diagram showing a conventional semiconductor memory testing device, and FIG. 2 is a configuration diagram showing a semiconductor memory testing device according to an embodiment of the present invention. 1... Mail address selector, 2... Y address selector, 3... Fail memory, 4... Data generator, 5... Multi address control, 6... Pin electronics, 7... Semiconductor memory, 8... Defective bit Number memory circuit, 9...+
1 arithmetic unit. Note that in the figures, the same reference numerals indicate the same parts.

Claims (1)

【特許請求の範囲】[Claims] 1 X行及びY列に配列された複数ビツトのメモ
リ素子を有する被試験半導体メモリ、上記メモリ
素子のXアドレスを決定するXアドレスセレク
タ、上記メモリ素子のYアドレスを決定するYア
ドレスセレクタ、上記メモリ素子を試験するため
のテストデータを発生するデータジエネレータ、
上記各アドレスセレクタにより決定された所定ア
ドレスのメモリ素子を上記テストデータに基いて
各アドレスにつき順次試験し不良ビツトを検知す
る検知手段、この検知手段が不良ビツトを検知す
る度に検知された不良ビツトの数を各行、各列毎
に各々独立に計数し記憶する記憶手段を備えた半
導体メモリ試験装置。
1. A semiconductor memory under test having multiple bit memory elements arranged in X rows and Y columns, an X address selector that determines the X address of the memory element, a Y address selector that determines the Y address of the memory element, and the memory a data generator that generates test data for testing the device;
a detection means for sequentially testing the memory element at a predetermined address determined by each of the address selectors for each address based on the test data and detecting a defective bit; A semiconductor memory testing device comprising storage means for independently counting and storing the number of rows and columns.
JP56102807A 1981-06-30 1981-06-30 Testing device for semiconductor memory Granted JPS585681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56102807A JPS585681A (en) 1981-06-30 1981-06-30 Testing device for semiconductor memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56102807A JPS585681A (en) 1981-06-30 1981-06-30 Testing device for semiconductor memory

Publications (2)

Publication Number Publication Date
JPS585681A JPS585681A (en) 1983-01-13
JPH0326480B2 true JPH0326480B2 (en) 1991-04-10

Family

ID=14337319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56102807A Granted JPS585681A (en) 1981-06-30 1981-06-30 Testing device for semiconductor memory

Country Status (1)

Country Link
JP (1) JPS585681A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201629A (en) * 1986-02-28 1987-09-05 Kao Corp Spray granulation method
JPS63127499A (en) * 1986-11-17 1988-05-31 Yamada Denon Kk Device for inspecting memory element
JPS63185000A (en) * 1987-01-27 1988-07-30 Hitachi Electronics Eng Co Ltd Memory ic checking device
JP4929868B2 (en) * 2006-06-19 2012-05-09 横河電機株式会社 Semiconductor memory test equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673354A (en) * 1979-11-21 1981-06-18 Advantest Corp Testing device for ic

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673354A (en) * 1979-11-21 1981-06-18 Advantest Corp Testing device for ic

Also Published As

Publication number Publication date
JPS585681A (en) 1983-01-13

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