JPS5855567A - プラズマエツチング方法 - Google Patents

プラズマエツチング方法

Info

Publication number
JPS5855567A
JPS5855567A JP15080181A JP15080181A JPS5855567A JP S5855567 A JPS5855567 A JP S5855567A JP 15080181 A JP15080181 A JP 15080181A JP 15080181 A JP15080181 A JP 15080181A JP S5855567 A JPS5855567 A JP S5855567A
Authority
JP
Japan
Prior art keywords
etching
cathode
permanent magnets
magnetic field
etching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15080181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6254191B2 (enrdf_load_html_response
Inventor
Haruo Okano
晴雄 岡野
Yasuharu Horiike
堀池　靖治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15080181A priority Critical patent/JPS5855567A/ja
Priority to DE8181109891T priority patent/DE3175576D1/de
Priority to EP81109891A priority patent/EP0054201B1/en
Priority to DD81235634A priority patent/DD208011A5/de
Publication of JPS5855567A publication Critical patent/JPS5855567A/ja
Priority to US06/559,857 priority patent/US4492610A/en
Publication of JPS6254191B2 publication Critical patent/JPS6254191B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP15080181A 1980-12-11 1981-09-25 プラズマエツチング方法 Granted JPS5855567A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP15080181A JPS5855567A (ja) 1981-09-25 1981-09-25 プラズマエツチング方法
DE8181109891T DE3175576D1 (en) 1980-12-11 1981-11-25 Dry etching device and method
EP81109891A EP0054201B1 (en) 1980-12-11 1981-11-25 Dry etching device and method
DD81235634A DD208011A5 (de) 1980-12-11 1981-12-10 Trockenaetzverfahren und -vorrichtung
US06/559,857 US4492610A (en) 1980-12-11 1983-12-12 Dry Etching method and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15080181A JPS5855567A (ja) 1981-09-25 1981-09-25 プラズマエツチング方法

Publications (2)

Publication Number Publication Date
JPS5855567A true JPS5855567A (ja) 1983-04-01
JPS6254191B2 JPS6254191B2 (enrdf_load_html_response) 1987-11-13

Family

ID=15504720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15080181A Granted JPS5855567A (ja) 1980-12-11 1981-09-25 プラズマエツチング方法

Country Status (1)

Country Link
JP (1) JPS5855567A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241335A (ja) * 1985-12-30 1987-10-22 アプライド　マテリアルズ　インコ−ポレ−テツド マグネトロン増強型プラズマエツチング法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915982A (ja) * 1982-07-19 1984-01-27 松下電器産業株式会社 グラフイツク表示装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915982A (ja) * 1982-07-19 1984-01-27 松下電器産業株式会社 グラフイツク表示装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241335A (ja) * 1985-12-30 1987-10-22 アプライド　マテリアルズ　インコ−ポレ−テツド マグネトロン増強型プラズマエツチング法

Also Published As

Publication number Publication date
JPS6254191B2 (enrdf_load_html_response) 1987-11-13

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