JPS585207A - Manufacture of ceramic green sheet - Google Patents
Manufacture of ceramic green sheetInfo
- Publication number
- JPS585207A JPS585207A JP10323981A JP10323981A JPS585207A JP S585207 A JPS585207 A JP S585207A JP 10323981 A JP10323981 A JP 10323981A JP 10323981 A JP10323981 A JP 10323981A JP S585207 A JPS585207 A JP S585207A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- green sheet
- sheet
- base film
- ceramic green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000002002 slurry Substances 0.000 claims description 8
- 239000011230 binding agent Substances 0.000 claims description 7
- 238000007606 doctor blade method Methods 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 239000004014 plasticizer Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000003985 ceramic capacitor Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000005098 hot rolling Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- GOJCZVPJCKEBQV-UHFFFAOYSA-N Butyl phthalyl butylglycolate Chemical compound CCCCOC(=O)COC(=O)C1=CC=CC=C1C(=O)OCCCC GOJCZVPJCKEBQV-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011805 ball Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
- Press-Shaping Or Shaping Using Conveyers (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は、セラミック生シートの製造方法に関するもの
であり、特に、高平滑かつ、高密度。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a green ceramic sheet, particularly one having high smoothness and high density.
しかもピンホール等の欠陥の少ないセラミック生シート
の製造方法に関するものである。Furthermore, the present invention relates to a method for producing a ceramic green sheet with fewer defects such as pinholes.
最近、各種セラミックを用いた電子部品は多岐にわたり
高密度化、小型化が進んでいる。特に、積層セラミツ、
クコンデンサはその小型化の代表的なものである。積層
セラミックコンデンサは、セラミックの生シートに内部
電極を印刷し、それを積層熱圧着し、所定の大きさに切
断後焼成される。セラミック生シートの製造方法として
は、押出成型法、熱間ロール法、スクリーン印刷法およ
びドクターブレミド法等があるが、一般にドクターブレ
ード法がよく用いられる。Recently, a wide variety of electronic components using various ceramics are becoming more dense and smaller. In particular, laminated ceramics,
The capacitor is a typical example of such miniaturization. Multilayer ceramic capacitors are produced by printing internal electrodes on raw ceramic sheets, laminating them by thermocompression, cutting them to a predetermined size, and then firing them. Methods for producing green ceramic sheets include extrusion molding, hot rolling, screen printing, and doctor blemishing, but doctor blading is commonly used.
ところでこのドクターブレード法で形成されたセラミッ
ク生シートは1表面があまシ平滑でないこと、真空脱泡
した泥漿を使用しても気泡がシート内部に存在すること
、およびベースフィルムに対する泥漿の濡れ性が悪いだ
めにピンホールが発生すること2等の欠陥をもつことが
多い。そして積層セラコンの場合、このような欠陥をも
つセラミック生シート上に内部電極ペーストがスクリー
ン印刷される。しかしそのまま積層・熱圧着・焼成され
た積層セラコンは。By the way, the ceramic green sheet formed by this doctor blade method has three problems: 1) the surface is not very smooth; even if vacuum-defoamed slurry is used, air bubbles are present inside the sheet; and the wettability of the slurry to the base film is poor. It often has defects such as pinholes and other defects. In the case of laminated ceramic capacitors, internal electrode paste is screen printed on ceramic raw sheets having such defects. However, laminated ceramic capacitors are laminated, thermocompressed, and fired as they are.
その欠陥箇所から故障となることが多い。Failures often occur due to the defective location.
本発明はこれらの欠点を除去するため、ドクターブレー
ド法により形成されたセラミック生シートを、ベースフ
ィルムから剥離することなくそのまま圧延ロール(冷間
、熱間の別は問わない)を通すことによシ表面の平滑を
よくシ。In order to eliminate these drawbacks, the present invention allows a green ceramic sheet formed by the doctor blade method to pass through a rolling roll (whether cold or hot) without peeling from the base film. Make sure the surface is smooth.
気泡、ボイド、ピンホール等を潰して、しかもセラミッ
ク粒子の充填密度を生シート状態よシさらに向上させる
ことにより、平滑性にすぐれた高密度なセラミック生シ
ートを製造する新規な方法を提供することを目的として
いる。To provide a new method for producing a high-density green ceramic sheet with excellent smoothness by crushing air bubbles, voids, pinholes, etc. and further improving the packing density of ceramic particles compared to the green sheet state. It is an object.
以下本発明について実施例を用いて説明する。The present invention will be explained below using examples.
まずセラミック素材に有機成分である結合剤。First, there is a binder, which is an organic component in the ceramic material.
可塑剤および溶媒を所定量加え、ボールミル。Add the specified amount of plasticizer and solvent and ball mill.
ニーダ、ホモジナイザー等、既知の混合方法でよく混合
し泥漿を作る。この泥漿を有機フィルムの上に流し、ド
クターブレード法にて一定厚みのシート状に成型し、乾
燥して用途に応じ。Mix well using a known mixing method such as a kneader or homogenizer to form a slurry. This slurry is poured onto an organic film, formed into a sheet of a certain thickness using the doctor blade method, and dried to suit the application.
0.02〜0.1mの一定厚みのセラミック生シートを
作製する。次にこの生シートをベースフィルム上から剥
離しないままカレンダロールにより圧延する。ロールは
冷間でもよいが、結合剤が熱可塑性の場合には熱間の方
がよシ効来が大きい。A ceramic green sheet with a constant thickness of 0.02 to 0.1 m is produced. Next, this green sheet is rolled with a calender roll without being peeled off from the base film. The roll may be rolled cold, but if the binder is thermoplastic, hot rolling is more effective.
本発明の方法で用いるセラミック素材は、セラミック基
板の場合はアルミナ(A403)、マグネシア(Mg0
) tフォルステライト又はステアタイトなど、圧電体
誘電体材料の場合には、 ffaTi03PZTや鉛系
圧電材料、磁性材料の場合には各穫フェライト材料等い
ずれでもよい。有機結合剤としては、ポリビニールアル
コール、ポリ酢酸ビニール、ポリビニールブチラール、
塩化ビニール−酢酸ヒニール共重合体、メチルセルロー
ル、エチルセルロール等があるが、接着性からみて、ポ
リビニールブチラール、ポリ酢酸ビニール等が好ましい
。可塑剤は結合剤によって選択されるが、フタル酸エス
テル系、クリコール系、グリセリン系等が用いられる。The ceramic materials used in the method of the present invention are alumina (A403) and magnesia (Mg0) in the case of ceramic substrates.
) In the case of a piezoelectric dielectric material such as forsterite or steatite, ffaTi03PZT or a lead-based piezoelectric material may be used, and in the case of a magnetic material, any ferrite material may be used. Examples of organic binders include polyvinyl alcohol, polyvinyl acetate, polyvinyl butyral,
Examples include vinyl chloride-hynylacetate copolymer, methylcellulose, ethylcellulose, and the like, but from the viewpoint of adhesiveness, polyvinyl butyral, polyvinyl acetate, etc. are preferable. The plasticizer is selected depending on the binder, and phthalate-based, glycol-based, glycerin-based, etc. are used.
結合剤および可塑剤の量は、成形性、加工性および高密
度化、焼成工程での脱ガス性を考慮して、1〜1゜wt
%が好ましい。溶媒としては、水、アルコール系、ケト
ン系等が用いられる。The amount of binder and plasticizer is 1 to 1°wt, taking into consideration moldability, workability, densification, and degassing property in the firing process.
% is preferred. As the solvent, water, alcohol, ketone, etc. are used.
かかる本発明の方法によって得られたセラミック生シー
トは、高平滑で気泡ボイドビンポール等の欠陥がなく、
セラミック粒子が高密度に充填されて高品質のため、こ
の生シートを用いて製造するセラミック電子部品は高性
能高信頼度のものになる。The ceramic raw sheet obtained by the method of the present invention is highly smooth and free of defects such as bubbles, voids, and holes.
Because the ceramic particles are densely packed and of high quality, ceramic electronic components manufactured using this green sheet have high performance and high reliability.
伺、ベースフィルムから生シートを剥離しないままロー
ル圧延するのは、ベースフィルムが圧延する際の生シー
トの支持体になるばがシでなく、積層セラコンの場合の
ように生シート上に内部電極ペーストを印刷する時にべ
−xフィルムに支持されたまま印刷・乾燥されると、シ
ートがペースト溶媒の乾燥にょシ変形する問題も起こら
ず、又連続スクリーン印刷が可能になる等の長所を有す
るためである。The reason why the raw sheet is rolled without being peeled off from the base film is that the base film does not serve as a support for the raw sheet during rolling, but rather that internal electrodes are placed on the raw sheet as in the case of laminated ceramics. If the paste is printed and dried while being supported by the base film, there will be no problem of deformation of the sheet due to drying of the paste solvent, and it has advantages such as continuous screen printing becomes possible. It is.
さらに具体的な例をもって説明する。This will be explained using a more specific example.
セラミック素材としてはI Pb(Nb1/2 Fe1
/2)(167(W 1/3 Fe 2/3 )3.0
3の組成を有する複合ペロブスカイト系誘電体材料で7
20℃予焼後、ボールミル粉砕したものを使用した。こ
のセラミック粉末を高速回転する攪拌羽根をもつホモミ
キサで34wt%のエチルセルロルブ中に分散させ、そ
の後、5wt%のポリビニールブチラールと1wt%の
ブチルフタリルブチルグリコレートとを加えてよく混合
して泥漿を作る。この泥漿をポリエステルフィルム上に
流してドクターブレード法にて60μm厚の生シートを
作製した。As a ceramic material, I Pb (Nb1/2 Fe1
/2) (167(W 1/3 Fe 2/3) 3.0
A composite perovskite dielectric material with a composition of 7.
After pre-baking at 20°C, the product was pulverized in a ball mill. This ceramic powder was dispersed in 34 wt% ethyl cellulose using a homomixer with stirring blades rotating at high speed, and then 5 wt% polyvinyl butyral and 1 wt% butylphthalyl butyl glycolate were added and mixed well to form a slurry. make. This slurry was poured onto a polyester film to produce a 60 μm thick green sheet using a doctor blade method.
次にこの生シートをポリエステルフィルムに付着したま
まの状態で85℃のカレンダロールを通し圧延した。こ
の圧延した生シート上に内部電極をスクリーン印刷した
後、印刷した生シート膜をベースフィルムから剥離し、
所定の大きさく10100x120に打抜き、金型内に
積層した後。Next, this green sheet was rolled through a calender roll at 85° C. while remaining attached to the polyester film. After screen-printing internal electrodes on this rolled raw sheet, the printed raw sheet film is peeled off from the base film,
After punching to a specified size of 10100 x 120 and stacking in a mold.
250に9/、2 110℃で熱プレスした。 これを
切断して個別の積層セラミックコンデンサの生チップを
得た。これを所定の条件で脱バインダ後。It was hot pressed at 250 to 9/2 and 110°C. This was cut to obtain individual raw chips of multilayer ceramic capacitors. After removing the binder under the specified conditions.
焼成し、しかる後、その積層セラコンの寿命試験を評価
した。その結果を第1表に記す。After firing, the laminated ceramic cap was evaluated for life test. The results are shown in Table 1.
以下余白 第1表 以上述べたごとく本発明によれば、高平滑で。Margin below Table 1 As described above, according to the present invention, it is highly smooth.
かつ欠陥のない高密度なセラミック生シートが得られ、
高性能、高信頼性のセラミック電子部品の提供が可能と
なった。A high-density raw ceramic sheet with no defects can be obtained.
It is now possible to provide high performance, highly reliable ceramic electronic components.
31−31-
Claims (1)
よび溶媒を加えて混線し泥漿を作り、この泥漿を平滑な
ベースフィルム上に流し、ドクターブレード法によって
生シートを作製した後。 この生シートをベースフィルム゛から剥離しないまま圧
延ロールを通すことを特徴とするセラミック生シートの
製造方法。[Claims] 1. Add organic components such as a binder, a plasticizer, and a solvent to a ceramic material to create a slurry, pour this slurry onto a smooth base film, and use a doctor blade method to produce a raw sheet. After. A method for producing a ceramic green sheet, characterized in that the green sheet is passed through a rolling roll without being peeled off from a base film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10323981A JPS585207A (en) | 1981-07-03 | 1981-07-03 | Manufacture of ceramic green sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10323981A JPS585207A (en) | 1981-07-03 | 1981-07-03 | Manufacture of ceramic green sheet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS585207A true JPS585207A (en) | 1983-01-12 |
Family
ID=14348886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10323981A Pending JPS585207A (en) | 1981-07-03 | 1981-07-03 | Manufacture of ceramic green sheet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS585207A (en) |
-
1981
- 1981-07-03 JP JP10323981A patent/JPS585207A/en active Pending
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