JPS5851528A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5851528A
JPS5851528A JP15015981A JP15015981A JPS5851528A JP S5851528 A JPS5851528 A JP S5851528A JP 15015981 A JP15015981 A JP 15015981A JP 15015981 A JP15015981 A JP 15015981A JP S5851528 A JPS5851528 A JP S5851528A
Authority
JP
Japan
Prior art keywords
substrate
pattern
defect
light
pseudo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15015981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS612296B2 (enExample
Inventor
Osami Ban
伴　修実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15015981A priority Critical patent/JPS5851528A/ja
Publication of JPS5851528A publication Critical patent/JPS5851528A/ja
Publication of JPS612296B2 publication Critical patent/JPS612296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15015981A 1981-09-22 1981-09-22 半導体装置の製造方法 Granted JPS5851528A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15015981A JPS5851528A (ja) 1981-09-22 1981-09-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15015981A JPS5851528A (ja) 1981-09-22 1981-09-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5851528A true JPS5851528A (ja) 1983-03-26
JPS612296B2 JPS612296B2 (enExample) 1986-01-23

Family

ID=15490787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15015981A Granted JPS5851528A (ja) 1981-09-22 1981-09-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5851528A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921037A (ja) * 1982-07-26 1984-02-02 Nec Corp 半導体装置のパタ−ンのモニタ方法
JP2008140672A (ja) * 2006-12-04 2008-06-19 Matsushita Electric Ind Co Ltd スイッチ装置及びこれを用いたリモコン送信機
JP2008140671A (ja) * 2006-12-04 2008-06-19 Matsushita Electric Ind Co Ltd スイッチ装置及びこれを用いたリモコン送信機

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921037A (ja) * 1982-07-26 1984-02-02 Nec Corp 半導体装置のパタ−ンのモニタ方法
JP2008140672A (ja) * 2006-12-04 2008-06-19 Matsushita Electric Ind Co Ltd スイッチ装置及びこれを用いたリモコン送信機
JP2008140671A (ja) * 2006-12-04 2008-06-19 Matsushita Electric Ind Co Ltd スイッチ装置及びこれを用いたリモコン送信機

Also Published As

Publication number Publication date
JPS612296B2 (enExample) 1986-01-23

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