JPS5851405A - 電気絶縁性炭化珪素焼結体の製法 - Google Patents
電気絶縁性炭化珪素焼結体の製法Info
- Publication number
- JPS5851405A JPS5851405A JP14431781A JP14431781A JPS5851405A JP S5851405 A JPS5851405 A JP S5851405A JP 14431781 A JP14431781 A JP 14431781A JP 14431781 A JP14431781 A JP 14431781A JP S5851405 A JPS5851405 A JP S5851405A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- sintered body
- carbide sintered
- electrically insulating
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 35
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 34
- 239000000463 material Substances 0.000 title description 4
- 238000000034 method Methods 0.000 title description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 14
- 150000004706 metal oxides Chemical class 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000010292 electrical insulation Methods 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 6
- 229910001369 Brass Inorganic materials 0.000 claims 1
- 239000010951 brass Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 12
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 10
- 239000000843 powder Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- -1 aluminum compound Chemical class 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052580 B4C Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- UPWOEMHINGJHOB-UHFFFAOYSA-N oxo(oxocobaltiooxy)cobalt Chemical compound O=[Co]O[Co]=O UPWOEMHINGJHOB-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- 241000243321 Cnidaria Species 0.000 description 1
- 229910017610 Cu(NO3) Inorganic materials 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 229910011006 Ti(SO4)2 Inorganic materials 0.000 description 1
- CAVCGVPGBKGDTG-UHFFFAOYSA-N alumanylidynemethyl(alumanylidynemethylalumanylidenemethylidene)alumane Chemical compound [Al]#C[Al]=C=[Al]C#[Al] CAVCGVPGBKGDTG-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- UQVOJETYKFAIRZ-UHFFFAOYSA-N beryllium carbide Chemical compound [Be][C][Be] UQVOJETYKFAIRZ-UHFFFAOYSA-N 0.000 description 1
- 150000001573 beryllium compounds Chemical class 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- HDUMBHAAKGUHAR-UHFFFAOYSA-J titanium(4+);disulfate Chemical compound [Ti+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O HDUMBHAAKGUHAR-UHFFFAOYSA-J 0.000 description 1
Landscapes
- Die Bonding (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14431781A JPS5851405A (ja) | 1981-09-12 | 1981-09-12 | 電気絶縁性炭化珪素焼結体の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14431781A JPS5851405A (ja) | 1981-09-12 | 1981-09-12 | 電気絶縁性炭化珪素焼結体の製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5851405A true JPS5851405A (ja) | 1983-03-26 |
| JPS6312326B2 JPS6312326B2 (enrdf_load_stackoverflow) | 1988-03-18 |
Family
ID=15359271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14431781A Granted JPS5851405A (ja) | 1981-09-12 | 1981-09-12 | 電気絶縁性炭化珪素焼結体の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5851405A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5869946U (ja) * | 1981-11-06 | 1983-05-12 | 日本電気株式会社 | 半導体素子用容器 |
| JPH03167859A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03167845A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03167846A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173155A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173154A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173156A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01320022A (ja) * | 1988-06-22 | 1989-12-26 | Matsushita Electric Ind Co Ltd | コーヒ抽出器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5516407A (en) * | 1978-07-21 | 1980-02-05 | Toshiba Corp | Mold transformer |
| JPS5666086A (en) * | 1979-11-05 | 1981-06-04 | Hitachi Ltd | Electrically insulating board |
-
1981
- 1981-09-12 JP JP14431781A patent/JPS5851405A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5516407A (en) * | 1978-07-21 | 1980-02-05 | Toshiba Corp | Mold transformer |
| JPS5666086A (en) * | 1979-11-05 | 1981-06-04 | Hitachi Ltd | Electrically insulating board |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5869946U (ja) * | 1981-11-06 | 1983-05-12 | 日本電気株式会社 | 半導体素子用容器 |
| JPH03167859A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03167845A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03167846A (ja) * | 1989-11-27 | 1991-07-19 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173155A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173154A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
| JPH03173156A (ja) * | 1989-11-30 | 1991-07-26 | Kyocera Corp | 半導体素子収納用パッケージ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6312326B2 (enrdf_load_stackoverflow) | 1988-03-18 |
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