JPS5850612Y2 - スパツタイオンポンプ素子 - Google Patents

スパツタイオンポンプ素子

Info

Publication number
JPS5850612Y2
JPS5850612Y2 JP2741779U JP2741779U JPS5850612Y2 JP S5850612 Y2 JPS5850612 Y2 JP S5850612Y2 JP 2741779 U JP2741779 U JP 2741779U JP 2741779 U JP2741779 U JP 2741779U JP S5850612 Y2 JPS5850612 Y2 JP S5850612Y2
Authority
JP
Japan
Prior art keywords
ion pump
cathode plate
pump element
anode
spatutie
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2741779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55127370U (enExample
Inventor
正彦 小林
Original Assignee
日電バリアン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電バリアン株式会社 filed Critical 日電バリアン株式会社
Priority to JP2741779U priority Critical patent/JPS5850612Y2/ja
Publication of JPS55127370U publication Critical patent/JPS55127370U/ja
Application granted granted Critical
Publication of JPS5850612Y2 publication Critical patent/JPS5850612Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP2741779U 1979-03-02 1979-03-02 スパツタイオンポンプ素子 Expired JPS5850612Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2741779U JPS5850612Y2 (ja) 1979-03-02 1979-03-02 スパツタイオンポンプ素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2741779U JPS5850612Y2 (ja) 1979-03-02 1979-03-02 スパツタイオンポンプ素子

Publications (2)

Publication Number Publication Date
JPS55127370U JPS55127370U (enExample) 1980-09-09
JPS5850612Y2 true JPS5850612Y2 (ja) 1983-11-17

Family

ID=28871490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2741779U Expired JPS5850612Y2 (ja) 1979-03-02 1979-03-02 スパツタイオンポンプ素子

Country Status (1)

Country Link
JP (1) JPS5850612Y2 (enExample)

Also Published As

Publication number Publication date
JPS55127370U (enExample) 1980-09-09

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