JPS5849942A - 遠紫外線露光用レジスト材料 - Google Patents

遠紫外線露光用レジスト材料

Info

Publication number
JPS5849942A
JPS5849942A JP56148545A JP14854581A JPS5849942A JP S5849942 A JPS5849942 A JP S5849942A JP 56148545 A JP56148545 A JP 56148545A JP 14854581 A JP14854581 A JP 14854581A JP S5849942 A JPS5849942 A JP S5849942A
Authority
JP
Japan
Prior art keywords
solution
parts
resist
exposure
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56148545A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349210B2 (enExample
Inventor
Kunio Hibino
邦男 日比野
Takakatsu Morimoto
森本　孝克
Katsumi Ogawa
小川　勝己
Shinichi Ogawa
真一 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56148545A priority Critical patent/JPS5849942A/ja
Publication of JPS5849942A publication Critical patent/JPS5849942A/ja
Publication of JPS6349210B2 publication Critical patent/JPS6349210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
JP56148545A 1981-09-18 1981-09-18 遠紫外線露光用レジスト材料 Granted JPS5849942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56148545A JPS5849942A (ja) 1981-09-18 1981-09-18 遠紫外線露光用レジスト材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56148545A JPS5849942A (ja) 1981-09-18 1981-09-18 遠紫外線露光用レジスト材料

Publications (2)

Publication Number Publication Date
JPS5849942A true JPS5849942A (ja) 1983-03-24
JPS6349210B2 JPS6349210B2 (enExample) 1988-10-04

Family

ID=15455156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56148545A Granted JPS5849942A (ja) 1981-09-18 1981-09-18 遠紫外線露光用レジスト材料

Country Status (1)

Country Link
JP (1) JPS5849942A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2100918A4 (en) * 2006-12-25 2009-12-23 Mitsubishi Rayon Co FLUIDITY ENHANCING AGENT, AROMATIC POLYCARBONATE RESIN COMPOSITION, AND MOLDED ARTICLE THEREOF
US8642699B2 (en) 2008-03-11 2014-02-04 Mitsubishi Rayon Co., Ltd. Fluidity improver for aromatic polycarbonate resin, process for producing the fluidity improver for aromatic polycarbonate resin, aromatic polycarbonate resin composition, and molded product
US8729205B2 (en) 2003-09-30 2014-05-20 Mitsubishi Rayon Co., Ltd. Flowability improver for engineering plastics, thermoplastic resin compositions containing the same and molded articles of the compositions

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8729205B2 (en) 2003-09-30 2014-05-20 Mitsubishi Rayon Co., Ltd. Flowability improver for engineering plastics, thermoplastic resin compositions containing the same and molded articles of the compositions
EP2100918A4 (en) * 2006-12-25 2009-12-23 Mitsubishi Rayon Co FLUIDITY ENHANCING AGENT, AROMATIC POLYCARBONATE RESIN COMPOSITION, AND MOLDED ARTICLE THEREOF
US8202943B2 (en) 2006-12-25 2012-06-19 Mitsubishi Rayon Co., Ltd. Fluidity-improving agent, aromatic polycarbonate resin composition, and shaped article thereof
JP5269585B2 (ja) * 2006-12-25 2013-08-21 三菱レイヨン株式会社 流動性向上剤、芳香族ポリカーボネート系樹脂組成物、及びその成形品
US8642699B2 (en) 2008-03-11 2014-02-04 Mitsubishi Rayon Co., Ltd. Fluidity improver for aromatic polycarbonate resin, process for producing the fluidity improver for aromatic polycarbonate resin, aromatic polycarbonate resin composition, and molded product

Also Published As

Publication number Publication date
JPS6349210B2 (enExample) 1988-10-04

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