Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohara Inc
Japan Oxygen Co Ltd
Taiyo Nippon Sanso Corp
Original Assignee
Ohara Inc
Japan Oxygen Co Ltd
Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohara Inc, Japan Oxygen Co Ltd, Nippon Sanso CorpfiledCriticalOhara Inc
Priority to JP14672681ApriorityCriticalpatent/JPS5849681A/ja
Publication of JPS5849681ApublicationCriticalpatent/JPS5849681A/ja
Publication of JPH0144666B2publicationCriticalpatent/JPH0144666B2/ja