JPS584925A - プレ−ト保持具 - Google Patents

プレ−ト保持具

Info

Publication number
JPS584925A
JPS584925A JP56091321A JP9132181A JPS584925A JP S584925 A JPS584925 A JP S584925A JP 56091321 A JP56091321 A JP 56091321A JP 9132181 A JP9132181 A JP 9132181A JP S584925 A JPS584925 A JP S584925A
Authority
JP
Japan
Prior art keywords
members
thin plate
edge
plate member
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56091321A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623945B2 (cg-RX-API-DMAC10.html
Inventor
Satoshi Araihara
新井原　聡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56091321A priority Critical patent/JPS584925A/ja
Publication of JPS584925A publication Critical patent/JPS584925A/ja
Publication of JPS623945B2 publication Critical patent/JPS623945B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP56091321A 1981-06-12 1981-06-12 プレ−ト保持具 Granted JPS584925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Publications (2)

Publication Number Publication Date
JPS584925A true JPS584925A (ja) 1983-01-12
JPS623945B2 JPS623945B2 (cg-RX-API-DMAC10.html) 1987-01-28

Family

ID=14023186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56091321A Granted JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Country Status (1)

Country Link
JP (1) JPS584925A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333744A (ja) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd ホトマスクケース及びホトマスクの保管方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333744A (ja) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd ホトマスクケース及びホトマスクの保管方法

Also Published As

Publication number Publication date
JPS623945B2 (cg-RX-API-DMAC10.html) 1987-01-28

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