JPS5848424A - ＩｎΡ半導体結晶のエツチング方法 - Google Patents

ＩｎΡ半導体結晶のエツチング方法

Info

Publication number
JPS5848424A
JPS5848424A JP14559881A JP14559881A JPS5848424A JP S5848424 A JPS5848424 A JP S5848424A JP 14559881 A JP14559881 A JP 14559881A JP 14559881 A JP14559881 A JP 14559881A JP S5848424 A JPS5848424 A JP S5848424A
Authority
JP
Japan
Prior art keywords
etching
semiconductor crystal
inp semiconductor
mixed
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14559881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366414B2 (enrdf_load_stackoverflow
Inventor
Hideto Furuyama
英人 古山
Yutaka Uematsu
豊 植松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14559881A priority Critical patent/JPS5848424A/ja
Publication of JPS5848424A publication Critical patent/JPS5848424A/ja
Publication of JPS6366414B2 publication Critical patent/JPS6366414B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP14559881A 1981-09-17 1981-09-17 ＩｎΡ半導体結晶のエツチング方法 Granted JPS5848424A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14559881A JPS5848424A (ja) 1981-09-17 1981-09-17 ＩｎΡ半導体結晶のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14559881A JPS5848424A (ja) 1981-09-17 1981-09-17 ＩｎΡ半導体結晶のエツチング方法

Publications (2)

Publication Number Publication Date
JPS5848424A true JPS5848424A (ja) 1983-03-22
JPS6366414B2 JPS6366414B2 (enrdf_load_stackoverflow) 1988-12-20

Family

ID=15388760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14559881A Granted JPS5848424A (ja) 1981-09-17 1981-09-17 ＩｎΡ半導体結晶のエツチング方法

Country Status (1)

Country Link
JP (1) JPS5848424A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60172669A (ja) * 1984-01-31 1985-09-06 株式会社トスカ 結束バンド
JPH06191551A (ja) * 1992-09-18 1994-07-12 Takeuchi Kogyo Kk ケーブルタイ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60172669A (ja) * 1984-01-31 1985-09-06 株式会社トスカ 結束バンド
JPH06191551A (ja) * 1992-09-18 1994-07-12 Takeuchi Kogyo Kk ケーブルタイ

Also Published As

Publication number Publication date
JPS6366414B2 (enrdf_load_stackoverflow) 1988-12-20

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