JPS5845625A - 磁気記録媒体の製造方法 - Google Patents
磁気記録媒体の製造方法Info
- Publication number
- JPS5845625A JPS5845625A JP14269881A JP14269881A JPS5845625A JP S5845625 A JPS5845625 A JP S5845625A JP 14269881 A JP14269881 A JP 14269881A JP 14269881 A JP14269881 A JP 14269881A JP S5845625 A JPS5845625 A JP S5845625A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- vapor
- recording medium
- magnetic recording
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 claims abstract description 9
- 229920000642 polymer Polymers 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 4
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 abstract description 11
- 230000007797 corrosion Effects 0.000 abstract description 11
- 238000001704 evaporation Methods 0.000 abstract description 9
- 230000008020 evaporation Effects 0.000 abstract description 9
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 239000010409 thin film Substances 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 45
- 239000010408 film Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 230000006872 improvement Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- -1 silicon nitride compound Chemical class 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 101100172879 Caenorhabditis elegans sec-5 gene Proteins 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 102100025342 Voltage-dependent N-type calcium channel subunit alpha-1B Human genes 0.000 description 1
- 101710088658 Voltage-dependent N-type calcium channel subunit alpha-1B Proteins 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14269881A JPS5845625A (ja) | 1981-09-09 | 1981-09-09 | 磁気記録媒体の製造方法 |
US06/409,608 US4450186A (en) | 1981-08-20 | 1982-08-19 | Method and device for manufacturing magnetic recording medium |
DE8282107650T DE3278257D1 (en) | 1981-08-20 | 1982-08-20 | Method and device for manufacturing magnetic recording medium |
DE198282107650T DE73041T1 (de) | 1981-08-20 | 1982-08-20 | Verfahren und einrichtung zur herstelling von magnetischen aufzeichnungstraegern. |
EP82107650A EP0073041B1 (en) | 1981-08-20 | 1982-08-20 | Method and device for manufacturing magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14269881A JPS5845625A (ja) | 1981-09-09 | 1981-09-09 | 磁気記録媒体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5845625A true JPS5845625A (ja) | 1983-03-16 |
JPS645375B2 JPS645375B2 (enrdf_load_stackoverflow) | 1989-01-30 |
Family
ID=15321462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14269881A Granted JPS5845625A (ja) | 1981-08-20 | 1981-09-09 | 磁気記録媒体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5845625A (enrdf_load_stackoverflow) |
-
1981
- 1981-09-09 JP JP14269881A patent/JPS5845625A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS645375B2 (enrdf_load_stackoverflow) | 1989-01-30 |
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