JPS5845374U - 単結晶シリコン引上装置 - Google Patents

単結晶シリコン引上装置

Info

Publication number
JPS5845374U
JPS5845374U JP13831481U JP13831481U JPS5845374U JP S5845374 U JPS5845374 U JP S5845374U JP 13831481 U JP13831481 U JP 13831481U JP 13831481 U JP13831481 U JP 13831481U JP S5845374 U JPS5845374 U JP S5845374U
Authority
JP
Japan
Prior art keywords
crystal silicon
single crystal
pulling
pulling equipment
silicon pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13831481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226458Y2 (enrdf_load_stackoverflow
Inventor
長谷部　等
徹 江原
信吾 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP13831481U priority Critical patent/JPS5845374U/ja
Publication of JPS5845374U publication Critical patent/JPS5845374U/ja
Application granted granted Critical
Publication of JPS6226458Y2 publication Critical patent/JPS6226458Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13831481U 1981-09-18 1981-09-18 単結晶シリコン引上装置 Granted JPS5845374U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13831481U JPS5845374U (ja) 1981-09-18 1981-09-18 単結晶シリコン引上装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13831481U JPS5845374U (ja) 1981-09-18 1981-09-18 単結晶シリコン引上装置

Publications (2)

Publication Number Publication Date
JPS5845374U true JPS5845374U (ja) 1983-03-26
JPS6226458Y2 JPS6226458Y2 (enrdf_load_stackoverflow) 1987-07-07

Family

ID=29931542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13831481U Granted JPS5845374U (ja) 1981-09-18 1981-09-18 単結晶シリコン引上装置

Country Status (1)

Country Link
JP (1) JPS5845374U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166715U (ja) * 1984-04-13 1985-11-06 積水ハウス株式会社 建築用ブロツク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166715U (ja) * 1984-04-13 1985-11-06 積水ハウス株式会社 建築用ブロツク

Also Published As

Publication number Publication date
JPS6226458Y2 (enrdf_load_stackoverflow) 1987-07-07

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