JPS5845374U - Single crystal silicon pulling equipment - Google Patents

Single crystal silicon pulling equipment

Info

Publication number
JPS5845374U
JPS5845374U JP13831481U JP13831481U JPS5845374U JP S5845374 U JPS5845374 U JP S5845374U JP 13831481 U JP13831481 U JP 13831481U JP 13831481 U JP13831481 U JP 13831481U JP S5845374 U JPS5845374 U JP S5845374U
Authority
JP
Japan
Prior art keywords
crystal silicon
single crystal
pulling
pulling equipment
silicon pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13831481U
Other languages
Japanese (ja)
Other versions
JPS6226458Y2 (en
Inventor
長谷部　等
徹 江原
信吾 林
Original Assignee
東芝セラミツクス株式会社
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社, 東芝機械株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP13831481U priority Critical patent/JPS5845374U/en
Publication of JPS5845374U publication Critical patent/JPS5845374U/en
Application granted granted Critical
Publication of JPS6226458Y2 publication Critical patent/JPS6226458Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の単結晶シリコン引上装置を示す断面図
、第２図ａはガイド治具部分を拡大した平面図、第２図
すは第２図ａのＡ−Ａ断面図、第３図は取出し時の単結
晶シリコンとガイド治具を示す断面図である。 １・・・チャンバー、２・・・ルツボ、３・・・保護体
、４・・・支持棒、５・・・プルチャンバー、６・・・
引上軸、７・・・種結晶保持具、８・・・種結晶、９・
・・支持具、１０・・・ガイド治具、１１・・・貫通口
、１２・・・ガイド治具本体、１３・・・支持腕、１４
・・・環体１，１５・・・拡間、１．６・・・溶融シリ
コン、１７・・・単結晶シリコン。Fig. 1 is a sectional view showing the single crystal silicon pulling apparatus of the present invention, Fig. 2a is an enlarged plan view of the guide jig portion, Fig. 2 is a sectional view taken along line A-A in Fig. 2a, FIG. 3 is a sectional view showing the single crystal silicon and the guide jig during extraction. DESCRIPTION OF SYMBOLS 1... Chamber, 2... Crucible, 3... Protector, 4... Support rod, 5... Pull chamber, 6...
Pulling shaft, 7... Seed crystal holder, 8... Seed crystal, 9...
... Support tool, 10... Guide jig, 11... Penetration hole, 12... Guide jig body, 13... Support arm, 14
... Ring bodies 1, 15... Expansion, 1.6... Molten silicon, 17... Single crystal silicon.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] チャンバー内にルツボを載置し、該ルツボ内の溶融シリ
コンを下端に種結晶を有するワイヤまたは玉グサリから
なる引上軸を用いて引上げて、単結晶シリコンを造る装
置において、上記チャンバー上方の引上軸の軸方向の途
中に該引上軸を包囲するガイド治具を設けたことを特徴
とする単結晶シリコン引上装置。In an apparatus for producing single-crystal silicon by placing a crucible in a chamber and pulling up molten silicon in the crucible using a pulling shaft made of a wire or bead with a seed crystal at the lower end, a pulling shaft above the chamber is used. A single-crystal silicon pulling apparatus characterized in that a guide jig is provided midway in the axial direction of the upper shaft to surround the pulling shaft.
JP13831481U 1981-09-18 1981-09-18 Single crystal silicon pulling equipment Granted JPS5845374U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13831481U JPS5845374U (en) 1981-09-18 1981-09-18 Single crystal silicon pulling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13831481U JPS5845374U (en) 1981-09-18 1981-09-18 Single crystal silicon pulling equipment

Publications (2)

Publication Number Publication Date
JPS5845374U true JPS5845374U (en) 1983-03-26
JPS6226458Y2 JPS6226458Y2 (en) 1987-07-07

Family

ID=29931542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13831481U Granted JPS5845374U (en) 1981-09-18 1981-09-18 Single crystal silicon pulling equipment

Country Status (1)

Country Link
JP (1) JPS5845374U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166715U (en) * 1984-04-13 1985-11-06 積水ハウス株式会社 architectural blocks

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166715U (en) * 1984-04-13 1985-11-06 積水ハウス株式会社 architectural blocks

Also Published As

Publication number Publication date
JPS6226458Y2 (en) 1987-07-07

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