JPS6342168U - - Google Patents
Info
- Publication number
- JPS6342168U JPS6342168U JP13368786U JP13368786U JPS6342168U JP S6342168 U JPS6342168 U JP S6342168U JP 13368786 U JP13368786 U JP 13368786U JP 13368786 U JP13368786 U JP 13368786U JP S6342168 U JPS6342168 U JP S6342168U
- Authority
- JP
- Japan
- Prior art keywords
- seed
- seed holder
- holder body
- holder
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000008710 crystal-8 Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
図面はこの考案の一実施例を示し、第１図は断
面図、第２図は第１図―線に沿う断面図であ
る。
１は引上げ軸、４は吊持部材、５はシードホル
ダ本体、５ａは上部シードホルダ、５ｂは下部シ
ードホルダ、８は種結晶。
The drawings show an embodiment of this invention, with FIG. 1 being a sectional view and FIG. 2 being a sectional view taken along the line of FIG. 1. 1 is a pulling shaft, 4 is a suspension member, 5 is a seed holder main body, 5a is an upper seed holder, 5b is a lower seed holder, and 8 is a seed crystal.
Claims (1)
ードホルダ本体５を設けて、このシードホルダ本
体５に種結晶８を取付けるものにおいて、上記シ
ードホルダ本体５を上部シードホルダ５ａと、下
部シードホルダ５ｂとに分割し、かつ少なくとも
一方をセラミツクにより形成すると共に、上部シ
ードホルダ５ａと、下部シードホルダ５ｂを着脱
自在にピン結合してなる単結晶半導体引上げ装置
のシードホルダ。 A seed holder body 5 is provided at the tip of a hanging member 4 protruding from the pulling shaft 1, and a seed crystal 8 is attached to this seed holder body 5.The seed holder body 5 is connected to an upper seed holder 5a and a lower seed A seed holder for a single crystal semiconductor pulling apparatus, in which an upper seed holder 5a and a lower seed holder 5b are detachably connected with pins, with at least one of the seed holders being made of ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368786U JPS6342168U (en) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368786U JPS6342168U (en) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342168U true JPS6342168U (en) | 1988-03-19 |
Family
ID=31034227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13368786U Pending JPS6342168U (en) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342168U (en) |
-
1986
- 1986-09-02 JP JP13368786U patent/JPS6342168U/ja active Pending
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