JPS6342167U - - Google Patents
Info
- Publication number
- JPS6342167U JPS6342167U JP13368986U JP13368986U JPS6342167U JP S6342167 U JPS6342167 U JP S6342167U JP 13368986 U JP13368986 U JP 13368986U JP 13368986 U JP13368986 U JP 13368986U JP S6342167 U JPS6342167 U JP S6342167U
- Authority
- JP
- Japan
- Prior art keywords
- suspension member
- attached
- seed crystal
- pulling shaft
- pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000725 suspension Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
図面はこの考案の一実施例を示し、第１図は要
部の拡大断面図、第２図は全体的な断面図である
。
９は引上げ軸、１４は上部吊持部材、１６は可
撓性条体、１７は下部吊持部材、２２は種結晶。
The drawings show an embodiment of this invention, with FIG. 1 being an enlarged sectional view of the main part, and FIG. 2 being an overall sectional view. 9 is a pulling shaft, 14 is an upper suspension member, 16 is a flexible strip, 17 is a lower suspension member, and 22 is a seed crystal.
Claims (1)
取付けた種結晶２２を浸漬し、かつこの種結晶２
２を回転させながら引上ることにより、単結晶半
導体を成長させるものにおいて、上記引上げ軸９
を中空軸として、この引上げ軸９の下端部にガイ
ド手段により回転自在に支承した下部吊持部材１
７を設け、この下部吊持部材１７と上記引上軸の
上端側に取付けられた上部吊持部材１４の間を可
撓性条体１６で連結すると共に、上記下部吊持部
材１７に種結晶２２を取付けるようにしてなる単
結晶半導体の引上げ装置。 A seed crystal 22 attached to a pulling shaft is immersed in a crucible containing a semiconductor melt, and this seed crystal 2
2, the above-mentioned pulling shaft 9
is a hollow shaft, and a lower suspension member 1 is rotatably supported at the lower end of the pulling shaft 9 by a guide means.
7, the lower suspension member 17 and the upper suspension member 14 attached to the upper end side of the pulling shaft are connected by a flexible strip 16, and the lower suspension member 17 is provided with a seed crystal. 22 is attached to the single crystal semiconductor pulling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368986U JPS6342167U (en) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368986U JPS6342167U (en) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342167U true JPS6342167U (en) | 1988-03-19 |
Family
ID=31034231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13368986U Pending JPS6342167U (en) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342167U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0578335U (en) * | 1992-03-30 | 1993-10-26 | 株式会社アプト | Mold device in forging machine |
-
1986
- 1986-09-02 JP JP13368986U patent/JPS6342167U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0578335U (en) * | 1992-03-30 | 1993-10-26 | 株式会社アプト | Mold device in forging machine |