JPS6433574U - - Google Patents
Info
- Publication number
- JPS6433574U JPS6433574U JP12890987U JP12890987U JPS6433574U JP S6433574 U JPS6433574 U JP S6433574U JP 12890987 U JP12890987 U JP 12890987U JP 12890987 U JP12890987 U JP 12890987U JP S6433574 U JPS6433574 U JP S6433574U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- crucible
- pulling
- holds
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の一実施例を示す図、第２図は
結晶引上用サセプタを用いた結晶育成装置を示す
断面図である。
１１……サセプタ本体、１２……支持台。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a sectional view showing a crystal growth apparatus using a susceptor for pulling crystals. 11... Susceptor body, 12... Support stand.
Claims (1)
上用サセプタにおいて、坩堝保持用のサセプタ本
体と、該サセプタ本体を支持して回動させる支持
台とを一体構造としたことを特徴とする結晶引上
用サセプタ。 A susceptor for pulling a crystal that holds a crucible placed in a cylindrical heating element, characterized in that a susceptor body for holding the crucible and a support base for supporting and rotating the susceptor body are integrally constructed. Susceptor for lifting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12890987U JPS6433574U (en) | 1987-08-25 | 1987-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12890987U JPS6433574U (en) | 1987-08-25 | 1987-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433574U true JPS6433574U (en) | 1989-03-01 |
Family
ID=31382685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12890987U Pending JPS6433574U (en) | 1987-08-25 | 1987-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433574U (en) |
-
1987
- 1987-08-25 JP JP12890987U patent/JPS6433574U/ja active Pending