JPS58168570U - susceptor ring - Google Patents

susceptor ring

Info

Publication number
JPS58168570U
JPS58168570U JP6367082U JP6367082U JPS58168570U JP S58168570 U JPS58168570 U JP S58168570U JP 6367082 U JP6367082 U JP 6367082U JP 6367082 U JP6367082 U JP 6367082U JP S58168570 U JPS58168570 U JP S58168570U
Authority
JP
Japan
Prior art keywords
susceptor ring
ring
heat shield
susceptor
shield part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6367082U
Other languages
Japanese (ja)
Other versions
JPS623407Y2 (en
Inventor
井深 敏彦
Original Assignee
三菱化成ポリテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱化成ポリテック株式会社 filed Critical 三菱化成ポリテック株式会社
Priority to JP6367082U priority Critical patent/JPS58168570U/en
Publication of JPS58168570U publication Critical patent/JPS58168570U/en
Application granted granted Critical
Publication of JPS623407Y2 publication Critical patent/JPS623407Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はLEC装置の1例の縦断面略図である。 第2図は、従来用いられていたサセプターリングを有す
るヒートシールド部の縦断面模型図である。 第3図は本考案に係るサセプターリングの1具体例の縦
断面図である。第4図は本考案に係るサセプターリング
を有するヒートシールド部の縦断面 図である。 10・・・・・・ルツボ、16・・・・・・本考案に係
るサセプターリング。 補正 昭57.6.11 実用新案登録請求の範囲を次のように補正する。 O実用新案登録請求の範囲 − 液体カプセル引上法により単結晶本製造子る装・置に用
いる円筒状のサセプターリングであ2て、該サセプター
リングは、その一方の端部から全長の10〜50%の長
さに相当する部分が他の部分よ   −り肌1〜211
L11L大きい内径を有しており、さらに、該す左ブタ
−リングの他端が使用状態においてヒートシールド部の
上部々)ら突出するに十分な長さ゛を有していることを
特徴とす−るサセプターリング。
FIG. 1 is a schematic vertical cross-sectional view of an example of an LEC device. FIG. 2 is a vertical cross-sectional model diagram of a conventionally used heat shield portion having a susceptor ring. FIG. 3 is a longitudinal sectional view of one specific example of the susceptor ring according to the present invention. FIG. 4 is a longitudinal sectional view of a heat shield portion having a susceptor ring according to the present invention. 10... Crucible, 16... Susceptor ring according to the present invention. Amendment June 11, 1982 The scope of claims for utility model registration is amended as follows. Scope of Utility Model Registration Claims - A cylindrical susceptor ring used in an apparatus for producing single crystals by a liquid capsule pulling method, the susceptor ring having a length of 10 to 10 mm from one end of the entire length of the susceptor ring. The part corresponding to 50% of the length is longer than the other parts - skin 1 to 211
L11L has a large inner diameter, and is further characterized by having a length sufficient for the other end of the left cover ring to protrude from the upper part of the heat shield part when in use. Susceptor ring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 液体カプセル引上法により単結晶を製造する装置に用い
る円筒状のサセプターリングであって、該サセプターリ
ングは、そめ一方の端部から全長の10〜50%の長さ
に相当する部分が他の部分より0,1〜2rIrIn大
きい内径を有しており、さらに、該サセプターリングの
他端が使用状態においてヒートシールド部の上部から突
出するに十分な長さを有していることを特徴とするシセ
プターリング。
A cylindrical susceptor ring used in an apparatus for producing a single crystal by a liquid capsule pulling method. The susceptor ring has an inner diameter 0.1 to 2rIrIn larger than the heat shield part, and has a length sufficient for the other end of the susceptor ring to protrude from the upper part of the heat shield part when in use. Ciceptor ring.
JP6367082U 1982-04-30 1982-04-30 susceptor ring Granted JPS58168570U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6367082U JPS58168570U (en) 1982-04-30 1982-04-30 susceptor ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6367082U JPS58168570U (en) 1982-04-30 1982-04-30 susceptor ring

Publications (2)

Publication Number Publication Date
JPS58168570U true JPS58168570U (en) 1983-11-10
JPS623407Y2 JPS623407Y2 (en) 1987-01-26

Family

ID=30073765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6367082U Granted JPS58168570U (en) 1982-04-30 1982-04-30 susceptor ring

Country Status (1)

Country Link
JP (1) JPS58168570U (en)

Also Published As

Publication number Publication date
JPS623407Y2 (en) 1987-01-26

Similar Documents

Publication Publication Date Title
JPS58168570U (en) susceptor ring
JPS60373U (en) Single crystal pulling device
JPS59131150U (en) Compound semiconductor heat treatment equipment
JPS58189169U (en) Crucible for crystal pulling
JPS5991377U (en) Rotating pulling shaft for crystal growth
JPS608244U (en) hanging tube container
JPS60104229U (en) Melting equipment
JPS59141579U (en) Single crystal pulling device
JPS6049158U (en) Single crystal fiber forming parts
JPS6063567U (en) quartz ampoule
JPS58155369U (en) grahite crucible
JPS59193997U (en) graphite crucible
JPS5977655U (en) Internal gear of planetary gear system
JPS60104230U (en) Melting equipment
JPS6019060U (en) Developer supply mechanism
JPS5845374U (en) Single crystal silicon pulling equipment
JPS58417U (en) Semiconductor heat treatment equipment
JPS58122441U (en) Quartz glass furnace core tube for semiconductors
JPS60152670U (en) Arsenic raw material for direct synthesis
JPS58166032U (en) heat treatment jig
JPS60185666U (en) Liquid phase epitaxial growth furnace
JPS5973373U (en) Crystal growth solution melting boat
JPS59463U (en) Crucible for liquid sealing crystal production
JPS581281U (en) sex needle hazushi
JPS5998295U (en) Plug rod for melting furnace