JPS60185666U - Liquid phase epitaxial growth furnace - Google Patents
Liquid phase epitaxial growth furnaceInfo
- Publication number
- JPS60185666U JPS60185666U JP5362585U JP5362585U JPS60185666U JP S60185666 U JPS60185666 U JP S60185666U JP 5362585 U JP5362585 U JP 5362585U JP 5362585 U JP5362585 U JP 5362585U JP S60185666 U JPS60185666 U JP S60185666U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- growth furnace
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の成長炉の構造の一例を示す図、第２図
乃至第６図は、それぞれ本考案の異なる実施例を示す図
である。
１．１１，２１，４１：蒸気の通路、３，１３．２２，
３２，４３，５３：付着物、６，１８．２５，４７，５
６：るつぼ、１４，２４，４４．５５：ふた。FIG. 1 is a diagram showing an example of the structure of a conventional growth furnace, and FIGS. 2 to 6 are diagrams showing different embodiments of the present invention. 1.11, 21, 41: Steam passage, 3, 13.22,
32, 43, 53: Deposit, 6, 18.25, 47, 5
6: Crucible, 14, 24, 44. 55: Lid.
Claims (1)
を行なうものにおいて、その内部に前記るつぼを配置し
た単一の炉心管を有し、前記炉心管上端部にアルミナ管
を接続したことを特徴とする液相エピタキシャル成長炉
。A device for performing liquid phase epitaxial growth in a crucible placed in a furnace core tube, characterized in that it has a single furnace core tube in which the crucible is placed, and an alumina tube is connected to the upper end of the furnace core tube. Liquid phase epitaxial growth furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362585U JPS60185666U (en) | 1985-04-12 | 1985-04-12 | Liquid phase epitaxial growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362585U JPS60185666U (en) | 1985-04-12 | 1985-04-12 | Liquid phase epitaxial growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60185666U true JPS60185666U (en) | 1985-12-09 |
Family
ID=30574666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5362585U Pending JPS60185666U (en) | 1985-04-12 | 1985-04-12 | Liquid phase epitaxial growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60185666U (en) |
-
1985
- 1985-04-12 JP JP5362585U patent/JPS60185666U/en active Pending
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