JPS5842627B2 - ハンドウタイソウチ - Google Patents
ハンドウタイソウチInfo
- Publication number
- JPS5842627B2 JPS5842627B2 JP11778272A JP11778272A JPS5842627B2 JP S5842627 B2 JPS5842627 B2 JP S5842627B2 JP 11778272 A JP11778272 A JP 11778272A JP 11778272 A JP11778272 A JP 11778272A JP S5842627 B2 JPS5842627 B2 JP S5842627B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- regions
- layer
- resistance
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000012535 impurity Substances 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 210000000746 body region Anatomy 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11778272A JPS5842627B2 (ja) | 1972-11-24 | 1972-11-24 | ハンドウタイソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11778272A JPS5842627B2 (ja) | 1972-11-24 | 1972-11-24 | ハンドウタイソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4975285A JPS4975285A (enrdf_load_stackoverflow) | 1974-07-19 |
| JPS5842627B2 true JPS5842627B2 (ja) | 1983-09-21 |
Family
ID=14720170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11778272A Expired JPS5842627B2 (ja) | 1972-11-24 | 1972-11-24 | ハンドウタイソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842627B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246796B2 (enrdf_load_stackoverflow) * | 1974-02-16 | 1977-11-28 |
-
1972
- 1972-11-24 JP JP11778272A patent/JPS5842627B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4975285A (enrdf_load_stackoverflow) | 1974-07-19 |
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