JPS5839006Y2 - 電子顕微鏡等のシヤツタ−装置 - Google Patents

電子顕微鏡等のシヤツタ−装置

Info

Publication number
JPS5839006Y2
JPS5839006Y2 JP17971178U JP17971178U JPS5839006Y2 JP S5839006 Y2 JPS5839006 Y2 JP S5839006Y2 JP 17971178 U JP17971178 U JP 17971178U JP 17971178 U JP17971178 U JP 17971178U JP S5839006 Y2 JPS5839006 Y2 JP S5839006Y2
Authority
JP
Japan
Prior art keywords
conductor
electron beam
shutter
cut
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17971178U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5597953U (enrdf_load_stackoverflow
Inventor
秀雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP17971178U priority Critical patent/JPS5839006Y2/ja
Publication of JPS5597953U publication Critical patent/JPS5597953U/ja
Application granted granted Critical
Publication of JPS5839006Y2 publication Critical patent/JPS5839006Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
JP17971178U 1978-12-28 1978-12-28 電子顕微鏡等のシヤツタ−装置 Expired JPS5839006Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17971178U JPS5839006Y2 (ja) 1978-12-28 1978-12-28 電子顕微鏡等のシヤツタ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17971178U JPS5839006Y2 (ja) 1978-12-28 1978-12-28 電子顕微鏡等のシヤツタ−装置

Publications (2)

Publication Number Publication Date
JPS5597953U JPS5597953U (enrdf_load_stackoverflow) 1980-07-08
JPS5839006Y2 true JPS5839006Y2 (ja) 1983-09-02

Family

ID=29191385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17971178U Expired JPS5839006Y2 (ja) 1978-12-28 1978-12-28 電子顕微鏡等のシヤツタ−装置

Country Status (1)

Country Link
JP (1) JPS5839006Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891850U (ja) * 1981-12-16 1983-06-21 日本電子株式会社 電子顕微鏡等のシヤツタ−装置

Also Published As

Publication number Publication date
JPS5597953U (enrdf_load_stackoverflow) 1980-07-08

Similar Documents

Publication Publication Date Title
KR910006932A (ko) 대물렌즈 구동장치
JPH0343618U (enrdf_load_stackoverflow)
US5291166A (en) Electromagnetic relay with resistor and method for manufacturing the same
JPS5839006Y2 (ja) 電子顕微鏡等のシヤツタ−装置
DE3888479D1 (de) Elektromagnetisches Schaltgerät.
JPS63501043A (ja) 可動コイル電磁作動子及びこれを用いたシャッタ
JPS5846521Y2 (ja) 電子顕微鏡等のシヤツタ−装置
JPS60111516U (ja) 輻射スポツトの位置を電気力学制御する電気光学装置
JPS6242442Y2 (enrdf_load_stackoverflow)
JPH10223506A (ja) 荷電ビーム描画装置
JP2636354B2 (ja) 有極電磁石装置
JP2551070Y2 (ja) 電磁継電器
JP2000249939A (ja) 光スイッチ
JPH08111160A (ja) 回転支点型有極電磁石、これを組込んだ回転支点型有極リレーおよびその製造方法
JPH0391641U (enrdf_load_stackoverflow)
JPH1166586A (ja) 光ヘッドアクチュエータ
JPH0612955A (ja) 電磁継電器
JPS6263827U (enrdf_load_stackoverflow)
JPH0472531U (enrdf_load_stackoverflow)
JPS60169720U (ja) 対物レンズ装置
JPH10142528A (ja) 光遮断装置
JPS58122344U (ja) キ−プリレ−
JPS5830258U (ja) 回路しや断器
JPS6270332U (enrdf_load_stackoverflow)
JPS58128535U (ja) 両切型接点開閉装置