JPS5837135U - Laser marking device - Google Patents
Laser marking deviceInfo
- Publication number
- JPS5837135U JPS5837135U JP13150281U JP13150281U JPS5837135U JP S5837135 U JPS5837135 U JP S5837135U JP 13150281 U JP13150281 U JP 13150281U JP 13150281 U JP13150281 U JP 13150281U JP S5837135 U JPS5837135 U JP S5837135U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- tester
- marking device
- laser marking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の一実施例のレーザマーキング装置の
概略図、第２図は信号分配回路のブロック図、第３図は
主レーザ電源部のブロック図である。
１・・・・・・テスタ、２ａ〜２ｄ・・・・・・ブロー
パ装置、３ａ−Ｌｄ・・・・・・集光光学系、４・・・
・・・主レーザ電源部、５・・・・・・信号分配回路、
６・・・・・・冷却器、７ａ〜７ｄ・・・・・・レーザ
光発振部、８ａ〜８ｄ・・・・・・光ファイバ、９ａ〜
９ｄ・・・・・・ウェハ、１０ａ〜１０ｄ・・・・・・
ウェハ固定テーブル、１１ａ〜ｌｌｄ・・・・・・プロ
ーブ、１’２ａ〜１２ｄ・・・・・・入力回路、１５２
〜１５（１・・・・・・遅延回路、１６ａ〜１６ｄ・・
・・・・遅延トリガパルス発生回路、１７・・・・・・
デコーダ、１８・・・・・・カウンタ、１９・・・・・
・クロックパルス発生回路、２１・・・・・・整流回路
、２２・・・・・・充電回路、２３ａ〜２３ｄ・・・・
・・トリガ回路である。FIG. 1 is a schematic diagram of a laser marking apparatus according to an embodiment of the present invention, FIG. 2 is a block diagram of a signal distribution circuit, and FIG. 3 is a block diagram of a main laser power supply section. 1...Tester, 2a-2d... Blooper device, 3a-Ld... Condensing optical system, 4...
... Main laser power supply section, 5 ... Signal distribution circuit,
6...Cooler, 7a-7d...Laser beam oscillation unit, 8a-8d...Optical fiber, 9a-
9d...Wafer, 10a-10d...
Wafer fixing table, 11a-lld... Probe, 1'2a-12d... Input circuit, 152
~15 (1...delay circuit, 16a-16d...
...Delayed trigger pulse generation circuit, 17...
Decoder, 18... Counter, 19...
・Clock pulse generation circuit, 21... Rectifier circuit, 22... Charging circuit, 23a to 23d...
...This is a trigger circuit.
Claims (1)
否判定を行う１台のテスターと、該テスターと連動した
複数のブローバ装置にレーザ装置を装着し、前記テスタ
ーからの不良判定信号により、レーザ装置からレーザ光
を発振させ、このレーザ光を集光する光学系により前記
半導体集積口−路チツブ表面に溶融加工を行うレーザマ
ーキング装置において、１台の主レーザ電源部と、前記
テスターに接続された複数のプローバ装置に対応し□
かつ該プローバ装置と同数のレーザ光発振部と、・
該レーザ光発振部に接続された集光光学系と、し
□、 −ザ光発振のタイミングを制御する信号分配
回路、 部とを含んで構成され、複数の前記レーザ
光発振部を単一の主レーザ電源部により動作させる事を
特徴とするレーザマーキング装置。A laser device is attached to one tester that determines the acceptability of semiconductor integrated circuit chips formed on a semiconductor wafer, and a plurality of blower devices that operate in conjunction with the tester. A laser marking device that performs melting processing on the surface of the semiconductor integrated circuit chip using an optical system that oscillates a laser beam and focuses the laser beam, which includes one main laser power supply unit and a plurality of lasers connected to the tester. Compatible with prober devices □
and the same number of laser beam oscillation units as the prober device;
A condensing optical system connected to the laser beam oscillation section, and a signal distribution circuit for controlling the timing of the laser beam oscillation. A laser marking device characterized by being operated by a main laser power source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13150281U JPS5837135U (en) | 1981-09-04 | 1981-09-04 | Laser marking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13150281U JPS5837135U (en) | 1981-09-04 | 1981-09-04 | Laser marking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5837135U true JPS5837135U (en) | 1983-03-10 |
| JPS629724Y2 JPS629724Y2 (en) | 1987-03-06 |
Family
ID=29925076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13150281U Granted JPS5837135U (en) | 1981-09-04 | 1981-09-04 | Laser marking device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5837135U (en) |
-
1981
- 1981-09-04 JP JP13150281U patent/JPS5837135U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS629724Y2 (en) | 1987-03-06 |
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