JPS59194080U - Semiconductor device characteristic measuring device - Google Patents
Semiconductor device characteristic measuring deviceInfo
- Publication number
- JPS59194080U JPS59194080U JP8831783U JP8831783U JPS59194080U JP S59194080 U JPS59194080 U JP S59194080U JP 8831783 U JP8831783 U JP 8831783U JP 8831783 U JP8831783 U JP 8831783U JP S59194080 U JPS59194080 U JP S59194080U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- characteristic measuring
- measuring device
- support block
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第４図は半導体装置の二側を示す平面図と側
面図、第５図及び第６図は従来の特性測定装置の二側を
示す要部側面図、第７図は本考案を含む半導体製造装置
の平面略図、第８図及び第９図は本考案の一実施例を示
す側面図及び背面図、第１０図は本考案の他の実施例を
示す側面図である。
２・・・リード、４・・・半導体装置（トランジスタ）
、２２・・・測定子、２３．２３ａ、 ２３ｂ・・・
支持ブロック、２４・・・固定部材、２５．２５’・・
・バネ材。1 to 4 are a plan view and a side view showing two sides of a semiconductor device, FIGS. 5 and 6 are side views of essential parts showing two sides of a conventional characteristic measuring device, and FIG. 8 and 9 are side and rear views showing one embodiment of the present invention, and FIG. 10 is a side view showing another embodiment of the present invention. 2...Lead, 4...Semiconductor device (transistor)
, 22... Measuring head, 23.23a, 23b...
Support block, 24...fixing member, 25.25'...
・Spring material.
Claims (1)
点に外部の支持ブロックから延びる複数の測定子を弾圧
接触させて上下より挾持した状態で特性測定する装置で
あって、前記測定子の支持ブロックを外部の固定部材に
バネ材を介して可動に弾性保持したことを特徴とする半
導体装置の特性測定装置。An apparatus for measuring the characteristics of an externally led lead of a semiconductor device in a state in which a plurality of probes extending from an external support block are brought into elastic contact with a plurality of points above and below the lead and held between the top and bottom, the support block for the probe. A device for measuring characteristics of a semiconductor device, characterized in that the device is movably and elastically held by an external fixing member via a spring material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8831783U JPS59194080U (en) | 1983-06-08 | 1983-06-08 | Semiconductor device characteristic measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8831783U JPS59194080U (en) | 1983-06-08 | 1983-06-08 | Semiconductor device characteristic measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59194080U true JPS59194080U (en) | 1984-12-24 |
| JPH0114940Y2 JPH0114940Y2 (en) | 1989-05-02 |
Family
ID=30218229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8831783U Granted JPS59194080U (en) | 1983-06-08 | 1983-06-08 | Semiconductor device characteristic measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59194080U (en) |
-
1983
- 1983-06-08 JP JP8831783U patent/JPS59194080U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0114940Y2 (en) | 1989-05-02 |
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