JPS5834930B2 - カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ - Google Patents

カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ

Info

Publication number
JPS5834930B2
JPS5834930B2 JP5582573A JP5582573A JPS5834930B2 JP S5834930 B2 JPS5834930 B2 JP S5834930B2 JP 5582573 A JP5582573 A JP 5582573A JP 5582573 A JP5582573 A JP 5582573A JP S5834930 B2 JPS5834930 B2 JP S5834930B2
Authority
JP
Japan
Prior art keywords
oxide film
silicon oxide
diffusion
impurity
mixed oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5582573A
Other languages
English (en)
Japanese (ja)
Other versions
JPS507478A (enrdf_load_stackoverflow
Inventor
森雄 井上
銀次郎 神原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP5582573A priority Critical patent/JPS5834930B2/ja
Publication of JPS507478A publication Critical patent/JPS507478A/ja
Publication of JPS5834930B2 publication Critical patent/JPS5834930B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP5582573A 1973-05-18 1973-05-18 カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ Expired JPS5834930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5582573A JPS5834930B2 (ja) 1973-05-18 1973-05-18 カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5582573A JPS5834930B2 (ja) 1973-05-18 1973-05-18 カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ

Publications (2)

Publication Number Publication Date
JPS507478A JPS507478A (enrdf_load_stackoverflow) 1975-01-25
JPS5834930B2 true JPS5834930B2 (ja) 1983-07-29

Family

ID=13009723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5582573A Expired JPS5834930B2 (ja) 1973-05-18 1973-05-18 カクサンヨウフジユンブツガンユウサンカブツマク ノ ジヨキヨホウホウ

Country Status (1)

Country Link
JP (1) JPS5834930B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2624047C3 (de) * 1976-05-28 1980-07-03 Dr. Rentschler Arzneimittel Gmbh & Co, 7958 Laupheim Massenzüchtung von Zellen und Kammer-System zu ihrer Durchführung
US6333245B1 (en) * 1999-12-21 2001-12-25 International Business Machines Corporation Method for introducing dopants into semiconductor devices using a germanium oxide sacrificial layer

Also Published As

Publication number Publication date
JPS507478A (enrdf_load_stackoverflow) 1975-01-25

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