JPS5833856A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5833856A
JPS5833856A JP13153081A JP13153081A JPS5833856A JP S5833856 A JPS5833856 A JP S5833856A JP 13153081 A JP13153081 A JP 13153081A JP 13153081 A JP13153081 A JP 13153081A JP S5833856 A JPS5833856 A JP S5833856A
Authority
JP
Japan
Prior art keywords
package
thermal expansion
semiconductor device
lead frame
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13153081A
Other languages
Japanese (ja)
Inventor
Tamotsu Usami
保 宇佐美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13153081A priority Critical patent/JPS5833856A/en
Publication of JPS5833856A publication Critical patent/JPS5833856A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3737Organic materials with or without a thermoconductive filler
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

PURPOSE:To prevent the isolation of a lead frame from a package substrate by constructing a package of a resin material mixed with filler having negative thermal expansion coefficient. CONSTITUTION:The lead frame 1 of chip carrier type package is formed, for example, of 42 alloy, and a semiconductor pellet 3 is bonded via a solder 2 to the inner lead side of the lead frame 1. The pellet 3 is sealed by a molded package 4 and a cap 5. The package 4 is mixed with filler having negative thermal expansion coefficient in the resin. Accordingly, the thermal expansion coefficient of the package 4 is similar to those of the pellet 3 and the frame 1, and the package 4 is not isolated from then.

Description

【発明の詳細な説明】 本発明は半導体装置に関する。[Detailed description of the invention] The present invention relates to a semiconductor device.

従来、いわゆる7リツグチツプ型パツケージ構造におけ
るチップI?fリアとしては、一般にセライック材料が
使用されている。しかしながら、セラミック材料は製造
が複雑である上に、高価であるという欠点がある。
Conventionally, a chip I? in a so-called 7-rig chip package structure. Ceracic material is generally used as the f rear. However, ceramic materials have the drawback of being complex to manufacture and expensive.

一方、ガラス入りエポキシ樹脂なパッケージ基板として
使用するととも提案しうるがこのガラス入りエポキシ樹
脂は熱膨張係数が高く、シリコン(8轟)の熱膨張係数
との差が大きいので、繰返し使用により熱な受けると、
半導体ベレット(チップ)およびリードフレームとパッ
ケージ基板との間に剥離が生じ、その剥離部分からの水
分の浸入により信頼性の低下を来た丁という欠点がある
On the other hand, it may be proposed to use glass-filled epoxy resin as a package substrate, but this glass-filled epoxy resin has a high coefficient of thermal expansion and there is a large difference in thermal expansion coefficient from that of silicon (8 Todoroki), so it will not heat up due to repeated use. When you receive it,
There is a drawback that peeling occurs between the semiconductor pellet (chip) and lead frame and the package substrate, and reliability is reduced due to moisture infiltration from the peeled portion.

本発明の目的は、前記従来技術の欠点な解消し。The object of the present invention is to overcome the drawbacks of the prior art.

安価で、しかも半導体ペレットやリードフレームとの剥
−のないパッケージ構造を有する半導体装置な提供する
ことにある。
It is an object of the present invention to provide a semiconductor device that is inexpensive and has a package structure that does not separate from semiconductor pellets or lead frames.

この目的な達成するため、本発明による牛導体装置ハ、
パッケージ基板が負の熱膨張係数臀持つ充填材な混入し
た樹脂材料よりなることな**とするものである。
In order to achieve this objective, the cattle conductor device according to the invention includes:
The package substrate is not made of a resin material mixed with a filler material having a negative coefficient of thermal expansion.

以下、本発明な図面に示す実施例にしたがってさらに説
明する。
Hereinafter, the present invention will be further described according to embodiments shown in the drawings.

第1図は本発明による半導体装置の一実施例のm面図で
ある。
FIG. 1 is an m-plane view of an embodiment of a semiconductor device according to the present invention.

本実施例における半導体装置はいわゆるチップキャリア
製パッケージよりなり、そのリードフレームlはたとえ
ば42アロイまたはコパールで作られ、このリードクレ
ームlのインナリード側には、シリプン(si)よりな
る半導体ペレット3が半田2によって接合されている。
The semiconductor device in this embodiment is comprised of a so-called chip carrier package, and its lead frame l is made of, for example, 42 alloy or copal, and a semiconductor pellet 3 made of silicone (si) is placed on the inner lead side of this lead claim l. They are joined by solder 2.

また、前記半導体ペレット3およびリードフレームlの
インナーリード部はプリモールド腫のパッケージ4およ
びゃヤング5により封止さnている。
Further, the semiconductor pellet 3 and the inner lead portion of the lead frame 1 are sealed with a pre-molded package 4 and a young 5.

本IIjll1例のパッケージ4はエポキシ樹脂中和。Package 4 of this IIjll1 example is epoxy resin neutralized.

負の熱膨張係数な持つ充填材、たとえば芳香族ボリアイ
ド’14Hな混入した材料よりなる。したがって、パッ
ケージ4の11%膨張係数は半導体ペレット3およびリ
ードフレームlの七3に近いので、こnらとパッケージ
4との剥離がなく、またこのような樹脂材料はセライッ
ク材料に比して非常に安価であるという重畳な利点が得
られる。
It consists of a material mixed with a filler having a negative coefficient of thermal expansion, such as aromatic borioid '14H. Therefore, the 11% expansion coefficient of the package 4 is close to that of the semiconductor pellet 3 and the lead frame 1, so there is no peeling between these and the package 4, and such a resin material is much more effective than the ceramic material. It has the added advantage of being inexpensive.

第2wAは本発明の第2実施例を示す断面図であ仝00
本実施では、半導体ペレット3はパッケージ4の上に取
り付けら−n、#牛導体ベレット3の電極パッドとリー
ドフレームlのインナーリード部とはワイヤ6により電
気的に接続ざnている。
The second wA is a sectional view showing the second embodiment of the present invention.
In this embodiment, the semiconductor pellet 3 is mounted on a package 4, and the electrode pads of the conductor pellet 3 and the inner leads of the lead frame l are electrically connected by wires 6.

本実施例においても、パッケージ4は、エポキシ樹脂中
に、負の熱膨張係数を持つ充填材、たとえば芳香族ボリ
アイド樹脂さらに具体的には[6vlar(3egis
tered Tradamirk of 夙I、 Du
pontdeNemours & Company) 
f混入した材料で作られている。したかって1本実施例
においても、安価で、しかもパッケージ4の剥離がない
という利点が得らnる。
In this embodiment as well, the package 4 is made of an epoxy resin containing a filler having a negative coefficient of thermal expansion, such as an aromatic polyamide resin, and more specifically [6vlar (3egis
tered Tradamirk of 夙I, Du
Pont de Nemours & Company)
Made with f-contaminated materials. Therefore, this embodiment also has the advantage that it is inexpensive and that the package 4 does not peel off.

なお、パッケージ4の構成材料としては、前記した−の
以外に、たとえばフッ素系ポリイミド樹脂中に負の熱膨
張係数を持つ充填材、たとえば芳香族ボリアイド樹at
混入したものを用いること等も可能である。
In addition to the above-mentioned material, the package 4 may be made of a filler having a negative coefficient of thermal expansion, such as an aromatic polyamide resin, etc.
It is also possible to use a mixed substance.

本発明は実装密度の大きいチップキャリア製パッケージ
に適用すれば、樹脂材料の低コスト性をより有効に生か
すことかできるが、前記したようにワイヤボンディング
屋のもの等にも有利に適用できる。
If the present invention is applied to a package made of a chip carrier with a high packaging density, the low cost property of the resin material can be more effectively utilized, but as described above, it can also be advantageously applied to a package made by a wire bonding shop.

以上説明したように1本発明によれば、パッケージが非
常圧安価な樹脂材料で構成されるので、半導体装置自体
のコストも大幅に低減でき、またパッケージと半導体ペ
レットあるいはり−ド7レームとの剥離も防止できる。
As explained above, according to the present invention, the package is made of an extremely cheap resin material, so the cost of the semiconductor device itself can be significantly reduced, and the package and the semiconductor pellet or board frame can be combined together. Peeling can also be prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

第11!!lIは本発明による半導体装置の第1実施例
な示す断面図、第2図は本発明による半導体装置の第2
実施例な示す断面図である。 !・・・リードフレーム、2・・・半田%3・・・半導
体ペレット、4・・・パッケージ、5・・・キャップ、
6・・・ワイヤ。 代理人 弁理士  薄 1)利 幸 一−− ′・で−7・ 第  1  図
11th! ! 1I is a sectional view showing a first embodiment of a semiconductor device according to the present invention, and FIG. 2 is a sectional view showing a second embodiment of a semiconductor device according to the present invention.
FIG. 3 is a sectional view showing an example. ! ...Lead frame, 2...Solder%3...Semiconductor pellet, 4...Package, 5...Cap,
6...Wire. Agent Patent attorney Susuki 1) Koichi Toshi --'・de-7・ Figure 1

Claims (1)

【特許請求の範囲】 1、パッケージが、負の熱膨張係数を持つ充填材&−混
入した樹脂材料よりなることを特徴とする半導体装置。 λ パッケージが、芳香族ボリア〈ド欄脂IkfI1人
したエポキシ樹脂またはフッ素系ボリイ(ドamよりな
ることtt4I黴とする**請求の範8KL項記載の半
導体装置。 3、パッケージがチップΦヤリアコパックージであるこ
とV*黴とする特許請求の範囲第1項または#E2項記
載の半導体装置。
[Scope of Claims] 1. A semiconductor device characterized in that the package is made of a resin material mixed with a filler having a negative coefficient of thermal expansion. λ The package is made of an epoxy resin made of aromatic boria or a fluorocarbon resin. **The semiconductor device according to claim 8KL. 3. The semiconductor device according to claim 1 or #E2, wherein the semiconductor device is V* mold.
JP13153081A 1981-08-24 1981-08-24 Semiconductor device Pending JPS5833856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13153081A JPS5833856A (en) 1981-08-24 1981-08-24 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13153081A JPS5833856A (en) 1981-08-24 1981-08-24 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5833856A true JPS5833856A (en) 1983-02-28

Family

ID=15060219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13153081A Pending JPS5833856A (en) 1981-08-24 1981-08-24 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5833856A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141742A (en) * 1985-12-17 1987-06-25 Fujitsu Ltd Package of semiconductor device
EP1772481A1 (en) * 2005-10-05 2007-04-11 The Goodyear Tire & Rubber Company Tire with low thermal expansion component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141742A (en) * 1985-12-17 1987-06-25 Fujitsu Ltd Package of semiconductor device
EP1772481A1 (en) * 2005-10-05 2007-04-11 The Goodyear Tire & Rubber Company Tire with low thermal expansion component
US7347242B2 (en) 2005-10-05 2008-03-25 The Goodyear Tire & Rubber Company Tire with low thermal expansion component

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