JPS5831608A - 弾性表面波素子の製造方法 - Google Patents

弾性表面波素子の製造方法

Info

Publication number
JPS5831608A
JPS5831608A JP12975981A JP12975981A JPS5831608A JP S5831608 A JPS5831608 A JP S5831608A JP 12975981 A JP12975981 A JP 12975981A JP 12975981 A JP12975981 A JP 12975981A JP S5831608 A JPS5831608 A JP S5831608A
Authority
JP
Japan
Prior art keywords
surface acoustic
acoustic wave
electrode pattern
etching
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12975981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251284B2 (enrdf_load_stackoverflow
Inventor
Yasuo Ehata
江畑　泰男
Shigefumi Morishita
森下　繁文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12975981A priority Critical patent/JPS5831608A/ja
Publication of JPS5831608A publication Critical patent/JPS5831608A/ja
Publication of JPH0251284B2 publication Critical patent/JPH0251284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP12975981A 1981-08-19 1981-08-19 弾性表面波素子の製造方法 Granted JPS5831608A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12975981A JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12975981A JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5831608A true JPS5831608A (ja) 1983-02-24
JPH0251284B2 JPH0251284B2 (enrdf_load_stackoverflow) 1990-11-07

Family

ID=15017488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12975981A Granted JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5831608A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164118A (ja) * 1988-12-16 1990-06-25 Murata Mfg Co Ltd 弾性表面波素子の製造方法
JPH03293808A (ja) * 1990-04-11 1991-12-25 Fujitsu Ltd 弾性表面波素子の製造方法
US8631547B2 (en) * 2000-02-04 2014-01-21 Agere Systems Inc. Method of isolation for acoustic resonator device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164118A (ja) * 1988-12-16 1990-06-25 Murata Mfg Co Ltd 弾性表面波素子の製造方法
JPH03293808A (ja) * 1990-04-11 1991-12-25 Fujitsu Ltd 弾性表面波素子の製造方法
US5243249A (en) * 1990-04-11 1993-09-07 Fujitsu Limited Saw device having a plurality of electrodes
US5325573A (en) * 1990-04-11 1994-07-05 Fujitsu Limited Method of fabricating a saw device
US8631547B2 (en) * 2000-02-04 2014-01-21 Agere Systems Inc. Method of isolation for acoustic resonator device

Also Published As

Publication number Publication date
JPH0251284B2 (enrdf_load_stackoverflow) 1990-11-07

Similar Documents

Publication Publication Date Title
US3760471A (en) Method of making an electromechanical filter
KR100500005B1 (ko) 탄성 표면파 장치의 제조방법
EP0448357B1 (en) Surface-acoustic-wave filter having a plurality of electrodes
JPH06152299A (ja) 弾性表面波デバイス
EP0935848B1 (en) Surface acoustic wave filters
JPH03293808A (ja) 弾性表面波素子の製造方法
WO2024125504A1 (zh) 声表面波滤波器的制造方法及声表面波滤波器
JPS5831608A (ja) 弾性表面波素子の製造方法
US4839618A (en) Monolithic crystal filter with wide bandwidth and method of making same
JP3858312B2 (ja) 表面弾性波素子およびその製造方法
JPS6142891B2 (enrdf_load_stackoverflow)
JP3480626B2 (ja) 弾性表面波素子の電極形成方法
GB1594980A (en) Tuning fork-type quartz crystal vibrator and method of forming the same
US20150145381A1 (en) Quartz vibrator and manufacturing method thereof
JP2005130068A (ja) 圧電共振器の製造方法
JPH06232671A (ja) 弾性表面波素子の製造方法
CN114006593B (zh) 一种体声波谐振器
US20240283428A1 (en) Capacitively-coupled resonator for improvement in upper band edge steepness
JPH01231411A (ja) 弾性表面波共振子フィルタの製造方法
JPH11298289A (ja) 弾性表面波装置
JPS6127929B2 (enrdf_load_stackoverflow)
US6281763B1 (en) Dielectric resonator, dielectric filter, dielectric duplexer, and method for manufacturing dielectric resonator
JP2000059165A (ja) 弾性表面波装置およびその製造方法
JPH0145246B2 (enrdf_load_stackoverflow)
JPH05283965A (ja) Ｓａｗデバイスの製造方法