JPS5831608A - 弾性表面波素子の製造方法 - Google Patents
弾性表面波素子の製造方法Info
- Publication number
- JPS5831608A JPS5831608A JP12975981A JP12975981A JPS5831608A JP S5831608 A JPS5831608 A JP S5831608A JP 12975981 A JP12975981 A JP 12975981A JP 12975981 A JP12975981 A JP 12975981A JP S5831608 A JPS5831608 A JP S5831608A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- electrode pattern
- etching
- short
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000005530 etching Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000005520 cutting process Methods 0.000 claims abstract description 3
- 239000010409 thin film Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 230000000638 stimulation Effects 0.000 claims 1
- 230000007423 decrease Effects 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12975981A JPS5831608A (ja) | 1981-08-19 | 1981-08-19 | 弾性表面波素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12975981A JPS5831608A (ja) | 1981-08-19 | 1981-08-19 | 弾性表面波素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5831608A true JPS5831608A (ja) | 1983-02-24 |
| JPH0251284B2 JPH0251284B2 (enrdf_load_stackoverflow) | 1990-11-07 |
Family
ID=15017488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12975981A Granted JPS5831608A (ja) | 1981-08-19 | 1981-08-19 | 弾性表面波素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5831608A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02164118A (ja) * | 1988-12-16 | 1990-06-25 | Murata Mfg Co Ltd | 弾性表面波素子の製造方法 |
| JPH03293808A (ja) * | 1990-04-11 | 1991-12-25 | Fujitsu Ltd | 弾性表面波素子の製造方法 |
| US8631547B2 (en) * | 2000-02-04 | 2014-01-21 | Agere Systems Inc. | Method of isolation for acoustic resonator device |
-
1981
- 1981-08-19 JP JP12975981A patent/JPS5831608A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02164118A (ja) * | 1988-12-16 | 1990-06-25 | Murata Mfg Co Ltd | 弾性表面波素子の製造方法 |
| JPH03293808A (ja) * | 1990-04-11 | 1991-12-25 | Fujitsu Ltd | 弾性表面波素子の製造方法 |
| US5243249A (en) * | 1990-04-11 | 1993-09-07 | Fujitsu Limited | Saw device having a plurality of electrodes |
| US5325573A (en) * | 1990-04-11 | 1994-07-05 | Fujitsu Limited | Method of fabricating a saw device |
| US8631547B2 (en) * | 2000-02-04 | 2014-01-21 | Agere Systems Inc. | Method of isolation for acoustic resonator device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251284B2 (enrdf_load_stackoverflow) | 1990-11-07 |
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