JPS5829650B2 - Oscillator unit - Google Patents

Oscillator unit

Info

Publication number
JPS5829650B2
JPS5829650B2 JP3557676A JP3557676A JPS5829650B2 JP S5829650 B2 JPS5829650 B2 JP S5829650B2 JP 3557676 A JP3557676 A JP 3557676A JP 3557676 A JP3557676 A JP 3557676A JP S5829650 B2 JPS5829650 B2 JP S5829650B2
Authority
JP
Japan
Prior art keywords
stem
vibrator
ceramic
present
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3557676A
Other languages
Japanese (ja)
Other versions
JPS52119199A (en
Inventor
勲夫 篠田
守中 畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP3557676A priority Critical patent/JPS5829650B2/en
Publication of JPS52119199A publication Critical patent/JPS52119199A/en
Publication of JPS5829650B2 publication Critical patent/JPS5829650B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は、水晶等の圧電振動子を収納するケースがセラ
ミックからなる時計用振動子ユニットの品質の改善に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in the quality of a watch vibrator unit whose case, which houses a piezoelectric vibrator such as a crystal, is made of ceramic.

時計用振動子ユニットは、周波数特性が優れてなければ
ならないのは勿論の事、形状的に薄く、小型であり、且
つ低廉価であることが肝要である。
It is essential that a watch vibrator unit not only have excellent frequency characteristics, but also be thin, small, and inexpensive.

最近、これらを満足すべく、振動子ユニットとしてエツ
チング技術によって作成した音叉型薄板水晶振動子をセ
ラミックケースに収納した新タイプの振動子ユニットが
開発されるに至った。
Recently, in order to satisfy these requirements, a new type of resonator unit has been developed in which a tuning fork-shaped thin plate crystal resonator made by etching technology is housed in a ceramic case.

以下、簡単にセラミックケースを用いた振動子ユニット
について説明する。
A vibrator unit using a ceramic case will be briefly described below.

この振動子ユニットは、水晶振動子、振動子を収納する
セラミック製のステム及びガラス製の蓋から構成され、
ステム及びガラスの周縁の接合面には、真空蒸着あるい
は電気メッキ等の方法で、半田封止手段として適宜厚み
のAuが付けられる振動子ユニットのアッセンブルは、
はじめにセラミックステム内に設けられた振動子を支持
する台に接着剤を用い振動子を固定する。
This resonator unit consists of a crystal resonator, a ceramic stem that houses the resonator, and a glass lid.
When assembling a vibrator unit, an appropriate thickness of Au is applied as a solder sealing means to the joint surface of the stem and the peripheral edge of the glass using a method such as vacuum deposition or electroplating.
First, the vibrator is fixed using adhesive to a stand that supports the vibrator provided inside the ceramic stem.

しかる後、Au極細線を用いワイヤーボンディングによ
り振動子とステムのリード端子と適宜連結する。
Thereafter, the vibrator and the lead terminal of the stem are appropriately connected by wire bonding using an ultra-fine Au wire.

気密封止は半田ワッシャーを前記ステムとガラス蓋の間
に挾み込み、所要の真空度(一般には1O−2Torr
以上)を保持させながら、真空槽の中で適宜荷重を加え
た状態で赤外線加熱あるいは高周波誘導加熱等の半田ワ
ッシャーを溶融させる方法においておこなわれる。
Hermetic sealing is achieved by inserting a solder washer between the stem and the glass lid to obtain the required degree of vacuum (generally 10-2 Torr).
This is carried out by a method of melting the solder washer by infrared heating or high-frequency induction heating while maintaining the above) while applying an appropriate load in a vacuum chamber.

この様にして作られた振動子ユニットは、従来の金属ケ
ースを用いた振動子ユニットに比べ形状的に非常に薄く
、且つ多量生産に好適であり、振動子ユニットの低廉化
を図る事が可能となり、水晶時計の普及に大きく寄与す
る事が期待できる。
The transducer unit made in this way is much thinner than the conventional transducer unit using a metal case, and is suitable for mass production, making it possible to reduce the cost of the transducer unit. Therefore, it is expected that this will greatly contribute to the spread of crystal watches.

しかしながら実際は、封止後徐々にリークが進行し、内
圧が高まり振動子の等価インピーダンスの上昇を招き、
ついには発振停止するという問題が多く、信頼性に乏し
く、実用上大きな障害となっている。
However, in reality, leakage gradually progresses after sealing, increasing internal pressure and causing an increase in the equivalent impedance of the vibrator.
There are many problems in which the oscillation eventually stops, and the reliability is poor, which is a major obstacle in practical use.

本発明は、上記欠点を除去するためになされたものであ
り、セラミックステムの製造方法の改善により封止後の
リークを著しく改善し、振動子ユニットの品質の向上を
図ったものである。
The present invention has been made to eliminate the above-mentioned drawbacks, and is intended to improve the quality of the vibrator unit by significantly improving the leakage after sealing by improving the manufacturing method of the ceramic stem.

以下、図面を参照しつつ本発明の実施例について説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.

第1図は、本発明セラミックステムの斜視図で、図にお
いて、1はシール枠、2は振動子を固定する台座を兼ね
た枠、3は底板、4は接合面および5はリード端子を示
したものである。
FIG. 1 is a perspective view of the ceramic stem of the present invention. In the figure, 1 is a sealing frame, 2 is a frame that also serves as a pedestal for fixing a vibrator, 3 is a bottom plate, 4 is a joint surface, and 5 is a lead terminal. It is something that

また第2図は、従来と本発明のセラミックステムの製造
工程図を示したものである。
Further, FIG. 2 shows manufacturing process diagrams of the conventional ceramic stem and the present invention.

セラミックステムは、IC等の電子部品を収納するセラ
ミックケースと特徴した方法で作成するが、図にもとづ
き本発明の特徴であるセラミックステムの製造方法につ
いて述べる。
The ceramic stem is manufactured by a method that is characteristic of a ceramic case for housing electronic components such as ICs, and the method of manufacturing the ceramic stem, which is a characteristic of the present invention, will be described based on the drawings.

はじめに、半焼成したセラミックシートの底形をおこな
い、シール枠、台座を兼ねた枠および底板用としてそれ
ぞれシートの打抜きをおこなう。
First, the bottom of a semi-fired ceramic sheet is shaped, and the sheets are punched out for a seal frame, a frame that also serves as a pedestal, and a bottom plate.

次に、枠1、枠2用のシート上に接合用およびリード端
子としてWまたはW−Wo等の金属ペーストを適宜印刷
する。
Next, a metal paste such as W or W-Wo is appropriately printed on the sheets for frames 1 and 2 for bonding and as lead terminals.

その後、枠1および枠2用のシートを所用の形に孔明け
をおこない、孔明後それぞれのシートを適宜積層し加熱
圧着する。
Thereafter, the sheets for frame 1 and frame 2 are perforated in the desired shape, and after the perforation, the respective sheets are appropriately laminated and bonded under heat and pressure.

しかる後、保護雰囲気中において15000C前後の熱
を加え、金属ペーストと各セラミックシートを焼成によ
り完全に接合する。
Thereafter, heat of around 15,000 C is applied in a protective atmosphere to completely bond the metal paste and each ceramic sheet by firing.

焼成後、該ステムのメタライズ面4および電極5に、電
気N1メッキ等の方法により適宜厚みのNiメッキをお
こなう。
After firing, the metallized surface 4 and electrode 5 of the stem are plated with Ni to a suitable thickness by a method such as electric N1 plating.

従来のステムは、この後適宜厚みのAuメッキをするこ
とで完成するが、本発明のステムはNiメッキをおこな
った後、保護雰囲気中において1000℃前後の熱を加
え拡散熱処理を施こし、処理後再度Niメッキを付け、
最後に適宜厚みのAuメッキをすることを特徴とする。
Conventional stems are completed by applying Au plating to an appropriate thickness, but the stem of the present invention is completed by applying diffusion heat treatment by applying heat to around 1000°C in a protective atmosphere after Ni plating. After that, apply Ni plating again.
Finally, it is characterized by applying Au plating to an appropriate thickness.

振動子ユニットの気密封止を評価する手段に、加熱した
恒温槽に試料を装入して強制劣化を施こし振動子の等価
インピーダンスを調査する方法があるが、第3図は、従
来の製造方法で作成したステムと本発明の製造方法によ
って作成したステムを用い、前記した振動子の製造方法
で作成した振動子ユニットを80℃の恒温槽に1000
時間放置した時の放置時間と振動子ユニットの等両イン
ピーダンスのシフト量の関係を示したものである。
One way to evaluate the hermetic sealing of a resonator unit is to charge a sample into a heated constant temperature bath and forcefully deteriorate the resonator to investigate the equivalent impedance of the resonator. Using the stem produced by the method and the stem produced by the production method of the present invention, the transducer unit produced by the above-described method for producing a transducer was placed in a constant temperature bath at 80°C for 1000 °C.
This figure shows the relationship between the left time and the shift amount of the equal impedance of the vibrator unit.

振動子の等価インピーダンスのシフトは、時計精度及び
消費電力等と密接な関係があるためシフト量はできる限
り少いことが望ましい。
Since the shift in the equivalent impedance of the vibrator is closely related to clock accuracy, power consumption, etc., it is desirable that the shift amount be as small as possible.

ところが図によれば、従来のステムを用いた振動子ユニ
ットは、放置時間の増加に伴いその上昇は著しく、10
00時間後では100KΩにも達し、またその上昇は飽
和状態ではなく、更に継続すれはその増加は非常に大き
くなることが推定できる。
However, according to the figure, in the case of a vibrator unit using a conventional stem, the value increases significantly as the standing time increases, and 10
After 00 hours, it reaches 100KΩ, and the increase is not saturated, and it can be estimated that if it continues further, the increase will be very large.

これに比べ、本発明のステムを用いた振動子ユニットの
上昇はおよそ700時間で、飽和現象が認められ、10
00時間後の上昇量は40にΩであり、本発明の効果が
顕著である。
In comparison, the rise of the vibrator unit using the stem of the present invention took approximately 700 hours, and a saturation phenomenon was observed.
The amount of increase after 00 hours was 40Ω, demonstrating the remarkable effect of the present invention.

本発明が従来に比べ、高温放置による振動子の等価イン
ピーダンスの上昇が少なかった理由は、ステムの製造工
程の改善による効果と思われる。
The reason why the equivalent impedance of the vibrator increased less when left at high temperatures in the present invention than in the prior art is thought to be the effect of improved stem manufacturing process.

すなわち、Niメッキ後、拡散熱処理工程を加えたこと
によりセラミックとメタライズ金属、メタライズ金属と
Niメッキの拡散が進行し、接合面がより緻密化した効
果であると推定する。
That is, it is presumed that by adding a diffusion heat treatment step after Ni plating, diffusion between the ceramic and the metallized metal, and between the metallized metal and the Ni plating progressed, resulting in a more dense bonding surface.

第4図は、前記実施例で気密封止した振動子を800C
の恒温槽に1000時間放置した時の放置時間と歩留の
関係を示したものである。
Figure 4 shows the hermetically sealed vibrator in the above example at 800C.
This figure shows the relationship between the standing time and the yield when the sample was left in a constant temperature bath for 1000 hours.

この場合の歩留とは、高温放置によって振動子の等価イ
ンピーダンスが350にΩを越えたものを不良品とした
ものである。
In this case, the yield means that a vibrator whose equivalent impedance exceeds 350 Ω due to high temperature storage is considered a defective product.

(時計用振動子ユニットは消費電力等を考慮すると、等
価インピーダンスは350にΩ以上は実用上問題がある
(If the equivalent impedance of a watch vibrator unit is 350Ω or more, there is a practical problem when considering power consumption, etc.

)図で明らかの如く、100時間では従来、本発明とも
に歩留はともに100%であるが、放置時間の増加に伴
い、従来の試料は歩留低下が著しく、1000時間では
40%に落込む。
) As is clear from the figure, the yield of the conventional sample and the present invention are both 100% at 100 hours, but as the standing time increases, the yield of the conventional sample decreases significantly, dropping to 40% at 1000 hours. .

ところが本発明は、いづれも100%の歩留を示し、従
来の試料に比べ極めて優れていることがわかる。
However, the present invention shows a yield of 100% in all cases, indicating that it is extremely superior to conventional samples.

以上詳述した様に、本発明のセラミックステムを用いた
振動子ユニットは、従来のステムを用いた振動子ユニッ
トに比べ長期信頼性が優れており、その工業価値は極め
て犬である。
As detailed above, the vibrator unit using the ceramic stem of the present invention has superior long-term reliability compared to the vibrator unit using the conventional stem, and its industrial value is extremely high.

なお実験例では、収納する振動子に水晶振動子を用いた
場合のみについて述べたが、水晶以外の圧電振動子を用
いても、同様の効果が期待できる。
In the experimental example, only the case where a crystal resonator was used as the vibrator to be stored was described, but the same effect can be expected even if a piezoelectric resonator other than crystal is used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の振動子用セラミックステムの斜視図
。 第2図は、従来と本発明のステムの製造工程図、第3図
は、気密封止をおこなった本発明と従来の振動子ユニッ
トを80℃の恒温槽に放置したときの放置時間と振動子
の等価インピーダンスのシフト量の関係を示すグラフ、
第4図は、気密封止をおこなった本発明と従来の振動子
ユニットを80℃の恒温槽に放置したときの放置時間と
気密封止歩留の関係を示すグラフ。
FIG. 1 is a perspective view of a ceramic stem for a vibrator according to the present invention. Figure 2 is a manufacturing process diagram of the conventional stem and the present invention, and Figure 3 is the standing time and vibration when the vibrator unit of the present invention and the conventional transducer unit, which were hermetically sealed, were left in a thermostat at 80°C. A graph showing the relationship between the shift amount of child equivalent impedance,
FIG. 4 is a graph showing the relationship between the standing time and the hermetic sealing yield when the transducer units of the present invention and the conventional transducer unit, which are airtightly sealed, are left in a constant temperature bath at 80°C.

Claims (1)

【特許請求の範囲】[Claims] 1 水晶等の圧電振動子を収納するステムがセラミック
からなり、半田封止によって気密封止する振動子ユニッ
トにおいて、該ステムには外部へ取り出すための電極パ
ターン及び半田封止手段として周縁の接合面にWまたは
W−Mo等のメタライズが設けられ、焼成後前記メタラ
イズ面に適宜厚みのNiメッキをおこない、その後、該
ステムを保護雰囲気中において適宜加熱温度で熱処理を
施こし、再び該ステムのメタライズ面にNiメッキをお
こない、その後、該ステムのメタライズ面に適宜厚みの
Auメッキする工程を経て作成したセラミックステムを
用いることを特徴とする振動子ユニット。
1. In a vibrator unit in which the stem that houses a piezoelectric vibrator such as a crystal is made of ceramic and is hermetically sealed by soldering, the stem has an electrode pattern for taking it out to the outside and a joint surface on the periphery as a solder sealing means. metallized with W or W-Mo, etc., and after firing, the metalized surface is plated with Ni to an appropriate thickness, and then the stem is heat-treated at an appropriate heating temperature in a protective atmosphere, and the stem is metalized again. A vibrator unit characterized in that it uses a ceramic stem which is produced through a process of Ni plating the surface and then plating the metallized surface of the stem with Au to an appropriate thickness.
JP3557676A 1976-03-31 1976-03-31 Oscillator unit Expired JPS5829650B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3557676A JPS5829650B2 (en) 1976-03-31 1976-03-31 Oscillator unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3557676A JPS5829650B2 (en) 1976-03-31 1976-03-31 Oscillator unit

Publications (2)

Publication Number Publication Date
JPS52119199A JPS52119199A (en) 1977-10-06
JPS5829650B2 true JPS5829650B2 (en) 1983-06-24

Family

ID=12445579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3557676A Expired JPS5829650B2 (en) 1976-03-31 1976-03-31 Oscillator unit

Country Status (1)

Country Link
JP (1) JPS5829650B2 (en)

Also Published As

Publication number Publication date
JPS52119199A (en) 1977-10-06

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