JPH09298434A - Manufacture of piezoelectric vibrator - Google Patents

Manufacture of piezoelectric vibrator

Info

Publication number
JPH09298434A
JPH09298434A JP13092096A JP13092096A JPH09298434A JP H09298434 A JPH09298434 A JP H09298434A JP 13092096 A JP13092096 A JP 13092096A JP 13092096 A JP13092096 A JP 13092096A JP H09298434 A JPH09298434 A JP H09298434A
Authority
JP
Japan
Prior art keywords
piezoelectric
ceramic substrate
board
piezoelectric vibrator
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13092096A
Other languages
Japanese (ja)
Inventor
Kunio Sasaki
Koji Yokosuka
邦夫 佐々木
晃二 横須賀
Original Assignee
Kinseki Ltd
キンセキ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kinseki Ltd, キンセキ株式会社 filed Critical Kinseki Ltd
Priority to JP13092096A priority Critical patent/JPH09298434A/en
Publication of JPH09298434A publication Critical patent/JPH09298434A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To simplify manufacturing, to improve the quality and yield, and to reduce the manufacturing cost by forming a plurality of piezoelectric elements on one ceramic board, applying prescribed manufacturing process to the board and slitting the ceramic board so as to obtain piezoelectric elements. SOLUTION: A piezoelectric raw board 3 is mounted to a continuity supports 2 made of a screen print on a ceramic board 1, an adhesives 8 is applied to the board 3, which is heated to adhere and to make conductivity between the support 2 and the piezoelectric raw board 3. Then the piezoelectric raw board is vapor-depositted for frequency adjustment as required and a cover 4 is adhered. Piezoelectric vibrators 5 thus formed are sliced along prescribed cut points of the ceramic board 1. After the manufacture in the unit of the ceramic board in this way, the piezoelectric vibrators are sliced, then the manufacture is considerably simplified and the workability is improved, the manufacture time is reduced to reduce the manufacture cost.

Description

【発明の詳細な説明】Detailed Description of the Invention
【0001】[0001]
【産業上の利用分野】セラミック基板で構成される圧電
振動子の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric vibrator composed of a ceramic substrate.
【0002】[0002]
【従来の技術】従来のセラミック基板を用いた圧電振動
子の製造工程は、一枚のセラミック基板に複数個の圧電
振動子が得られるよう、図4に示す一例を持つ引き出し
線をメタライズ処理したセラミック基板を、個々の圧電
振動子を構成するセラミック基板として切り離し製造し
ていた。
2. Description of the Related Art In the conventional manufacturing process of a piezoelectric vibrator using a ceramic substrate, a lead wire having an example shown in FIG. 4 is metalized so that a plurality of piezoelectric vibrators can be obtained on one ceramic substrate. The ceramic substrate is separated and manufactured as a ceramic substrate that constitutes each piezoelectric vibrator.
【0003】[0003]
【発明が解決しようとする課題】しかし、従来の製造方
法は、複数個の圧電振動子を一枚のセラミック基板上に
構成するため、個々の圧電振動子の形態に一枚のセラミ
ック基板を切り離し分割した状態で圧電振動子の製造を
行うと、セラミック基板に支持部を構成する工程と、圧
電素板を搭載して固着する工程と、セラミック容器のフ
タを被せセラミック基板と接合して密閉する工程の一連
の製造工程で、個々の圧電振動子として取り扱うことで
作業効率が悪いといった大きな課題があった。
However, according to the conventional manufacturing method, since a plurality of piezoelectric vibrators are formed on one ceramic substrate, one ceramic substrate is cut into individual piezoelectric vibrators. When the piezoelectric vibrator is manufactured in the divided state, the step of forming the support portion on the ceramic substrate, the step of mounting and fixing the piezoelectric element plate, the lid of the ceramic container is covered, and the ceramic substrate is joined and hermetically sealed. In a series of manufacturing steps, there is a big problem that working efficiency is poor because the piezoelectric vibrators are handled as individual piezoelectric vibrators.
【0004】[0004]
【課題を解決するための手段】そこで、元来一枚のセラ
ミック基板に図4に示す一例を持つ引き出し線をメタラ
イズ処理したセラミック基板を用いていることから、セ
ラミック基板に支持部を構成する工程と、圧電素板を搭
載して固着する工程と、セラミック容器のフタを被せセ
ラミック基板と接合して密閉する工程の各工程を、一枚
のセラミック基板の状態で前記の各工程の製造をし、セ
ラミック容器のフタを被せセラミック基板と接合して密
閉する工程までの一連の全ての組立工程を終えた段階
で、セラミック基板を1個1個の圧電振動子の形態にす
る製造方法を採用する製造工程の改善を行うことにより
課題を解決した。
Therefore, since a ceramic substrate obtained by metallizing a lead wire having the example shown in FIG. 4 is originally used for one ceramic substrate, a step of forming a supporting portion on the ceramic substrate is performed. And the step of mounting and fixing the piezoelectric element plate, and the step of covering the lid of the ceramic container and joining and sealing the ceramic substrate, the above steps are manufactured in the state of one ceramic substrate. At the stage where all the assembling steps up to the step of covering the ceramic container with the lid and joining and sealing the ceramic substrate are completed, the manufacturing method is adopted in which each ceramic substrate is in the form of a piezoelectric vibrator. The problem was solved by improving the manufacturing process.
【0005】[0005]
【背景】従来の圧電振動子を回路基板へ搭載する形状
は、ピン端子により圧電振動子と回路基板との導通が図
られていた。以後、圧電振動子を組み込む本体セット自
体の小型化や、ハンダリフローを用いて電子部品を回路
基板へ搭載する技術などへの移行により、圧電振動子自
体も小型化になり、電子部品の表面実装化が図られてき
ている。一方、圧電振動子の容器も従来は金属カンと、
ガラスと金属を主体にしたハーメチックベースとの組み
合わせにより気密容器を構成していた。しかし、圧電振
動子(電子部品)の価格低減のあおりや、金属カンと、
ガラスと金属を主体にしたハーメチックベースとの組み
合わせによる気密容器の気密性能に匹敵する気密容器技
術への変貌など、従来のピン端子形状から表面実装端子
へと移行する上で、端子形状や気密容器の構成材料も大
きく変化しているのが現状である。
[Background] In the conventional shape in which a piezoelectric vibrator is mounted on a circuit board, electrical continuity between the piezoelectric vibrator and the circuit board is achieved by pin terminals. After that, due to the downsizing of the main body set incorporating the piezoelectric vibrator, and the shift to the technology of mounting electronic parts on the circuit board using solder reflow, the piezoelectric vibrator itself has also become smaller, and surface mounting of electronic parts It is being implemented. On the other hand, the container of the piezoelectric vibrator is a metal can in the past,
An airtight container was constructed by combining glass and a hermetic base mainly composed of metal. However, with the price reduction of the piezoelectric vibrator (electronic component), the metal can,
In changing from the conventional pin terminal shape to the surface mount terminal, such as the change to the airtight container technology that matches the airtight performance of the airtight container by combining the hermetic base mainly made of glass and metal, the terminal shape and the airtight container Under the present circumstances, the constituent materials of are also changing greatly.
【0006】小型化し、過酷な条件下で使用される最近
の電子機器に搭載する圧電振動子にとって、回路基板に
搭載する端子形状や、圧電振動子を構成する気密容器の
変貌は重要な課題として受けとめざるを得ない環境とな
ってしまった。このような背景の中、最近注目されてい
る気密容器にセラミック材料がある。セラミック材料の
気密容器は、表面実装型の端子形状を得るにも容易な上
に、アルミナ系物質や微粒ガラス材料を主体に加圧して
セラミックを形成することから、容器形成の自由度も増
し種々な形状の気密容器の製作が可能となる。また、セ
ラミック材料と圧電振動子とは、熱膨張係数の面から見
ても優位性があり、圧電振動子の使用環境(温度、湿
度)に適合した気密容器として使用環境に適した膨張と
収縮が得られるといった利点を持っている。
For the piezoelectric vibrator mounted on recent electronic equipment which is miniaturized and used under severe conditions, the shape of terminals mounted on a circuit board and the transformation of the hermetic container forming the piezoelectric vibrator are important issues. The environment has become obligatory. Against this background, ceramic materials have been recently attracting attention as airtight containers. The airtight container made of ceramic material is easy to obtain the surface mount type terminal shape, and since the ceramic is formed mainly by applying pressure to the alumina-based material or fine glass material, the flexibility of forming the container is increased. It is possible to manufacture airtight containers of various shapes. Moreover, the ceramic material and the piezoelectric vibrator are superior in terms of the coefficient of thermal expansion, and the expansion and contraction are suitable for the usage environment as an airtight container that adapts to the usage environment (temperature, humidity) of the piezoelectric vibrator. Has the advantage that
【0007】本発明は、セラミック基板を用いた圧電振
動子の製造方法で、従来ではセラミック基板に形成した
複数個の圧電振動子単位のセラミック基板を先ず個々に
切り離し、セラミック基板に支持部を構成する工程と、
圧電素板を搭載して固着する工程と、セラミック容器の
フタを被せセラミック基板と接合して密閉する製造工程
を、一枚のセラミック基板の状態のままで、セラミック
基板に支持部を構成する工程と、圧電素板を搭載して固
着する工程と、セラミック容器のフタを被せセラミック
基板と接合して密閉する工程で製造し、最後にセラミッ
ク基板を切り離し、個々の圧電振動子を製造する製造方
法に改善した。今までは個々の圧電振動子の状態で各製
造工程で作業が行われており、作業効率の点で大変手間
を必要としていたが、一枚のセラミック基板の状態で製
造する工程を採用することにより、作業性と品質の維持
・向上が大幅に改善することができた。
The present invention is a method for manufacturing a piezoelectric vibrator using a ceramic substrate. Conventionally, a plurality of piezoelectric vibrator units formed on a ceramic substrate are first individually cut off, and a supporting portion is formed on the ceramic substrate. And the process of
A process of mounting a piezoelectric element plate and fixing it, and a process of covering a ceramic container with a lid and bonding and sealing the ceramic substrate, and forming a supporting portion on the ceramic substrate in the state of one ceramic substrate. And a step of mounting and fixing a piezoelectric element plate, and a step of covering the ceramic container with a lid and bonding and sealing the ceramic substrate, and finally separating the ceramic substrate to manufacture individual piezoelectric vibrators. Improved. Until now, work was performed in each manufacturing process in the state of individual piezoelectric vibrators, which required much labor in terms of work efficiency, but adopt the process of manufacturing in the state of one ceramic substrate. As a result, workability and quality can be maintained and improved significantly.
【0008】[0008]
【実施例】以下、添付図面に従ってこの発明の実施例を
説明する。なお、各図において同一の符号は同様の対象
を示すものとする。なお、実施例に記載する圧電振動子
5は、セラミック基板1上に複数個配置された状態で圧
電素板3を搭載していない形状と、圧電素板3を搭載し
セラミック容器のフタ4を被せた形状の両方を意味する
ものと定義する。図1に本発明の製造工程フロー図を示
す。アルミナやガラス材質を加圧して形成された一枚の
セラミック基板1には、図4に示す如く複数個の圧電振
動子5が製造できるように一枚のセラミック基板1上に
引き出し線6がメタライズ処理されている。この一枚の
セラミック基板1から個々の圧電振動子5の寸法にセラ
ミック基板1に分割することなく、複数個の圧電振動子
5が製造できる一枚のセラミック基板1の状態で次に記
載する各製造工程を経て圧電振動子5を製造する。
Embodiments of the present invention will be described below with reference to the accompanying drawings. In each drawing, the same reference numeral indicates the same object. The piezoelectric vibrators 5 described in the examples have a shape in which a plurality of piezoelectric element plates 3 are not mounted in a state where they are arranged on the ceramic substrate 1, and a lid 4 of a ceramic container in which the piezoelectric element plates 3 are mounted is mounted. It is defined as meaning both the covered shape. FIG. 1 shows a manufacturing process flow chart of the present invention. In one ceramic substrate 1 formed by pressing alumina or glass material, lead lines 6 are metallized on one ceramic substrate 1 so that a plurality of piezoelectric vibrators 5 can be manufactured as shown in FIG. Is being processed. Each of the ceramic substrates 1 described below will be described in the state of one ceramic substrate 1 from which a plurality of piezoelectric oscillators 5 can be manufactured without dividing the ceramic substrate 1 into the dimensions of the individual piezoelectric oscillators 5. The piezoelectric vibrator 5 is manufactured through the manufacturing process.
【0008】まず、一枚のセラミック基板1に圧電素板
3を保持、導通を図るための支持部2を構成する。支持
部2の構成には、スクリーン印刷7で導電性接着剤8を
塗布し支持部2を構成する。また、支持部2の別の構成
方法としては、スクリーン印刷7で導電性接着剤8を塗
布し、そこに支持部2となる台を固着しその上に圧電素
板3を搭載し導通と固着を図る方法もある。このよう
に、スクリーン印刷7による支持部2作製を基本とし
て、圧電素板3が保持、導通できる各種の方法が考えら
れる。なお、支持部2の作製については、導電性接着剤
8など支持部2を構成する必要材料は、加熱などして乾
燥する工程も含まれる。
First, a supporting portion 2 for holding the piezoelectric element plate 3 on one ceramic substrate 1 and establishing electrical conduction is constructed. In the configuration of the support portion 2, a conductive adhesive 8 is applied by screen printing 7 to form the support portion 2. Further, as another configuration method of the supporting portion 2, a conductive adhesive 8 is applied by screen printing 7, a base to be the supporting portion 2 is fixed thereto, and the piezoelectric element plate 3 is mounted thereon to fix the conduction. There is also a way to try. As described above, based on the production of the support portion 2 by the screen printing 7, various methods by which the piezoelectric element plate 3 can be held and conducted can be considered. Regarding the production of the supporting portion 2, the necessary material for forming the supporting portion 2 such as the conductive adhesive 8 also includes a step of drying by heating or the like.
【0009】次に、支持部2に圧電素板3を搭載し、導
電性接着剤8を塗布した後加熱し導電性接着剤8を乾燥
させ、支持部2(の導電性接着剤8)と圧電素板3の固
着と導通を図る。その後、必要に応じて圧電素板3の周
波数調整を、蒸着装置を用いて周波数調整に必要な量の
蒸着を行う。最後に、セラミック容器のフタ4を被せセ
ラミック基板1と接着剤10あるいは、ガラスフリット
11などで接合する。(接合に必要な加熱、乾燥工程も
含む)セラミック容器のフタ4とセラミック基板1の接
合には接着剤10やガラスフリット11以外の材料や手
法を用いることもできる。セラミック基板1上の支持部
2に圧電素板3を保持、固着しセラミック容器のフタ4
を被せ接合して構成された圧電振動子5をセラミック基
板1の切断部12から個々の圧電振動子5に切り離して
圧電振動子5を製造し、一連の製造工程を終了する圧電
振動子5の製造方法である。なお、本発明に適応できる
のは、圧電振動子5のほか、圧電発振器やフィルターな
ど、セラミック基板1を用いた電子部品にも同様の製造
工程を利用することができる。また、セラミック基板1
にとらわれず、一枚の基板材料などに複数個の電子部品
を搭載し、組立工程を通過した最終工程で一枚の基板材
料を個々に切り離す同種の製造方法にも応用することが
できる。本実施例では、「フタ」にセラミック容器を用
いた例を示したが、「フタ」は金属材料などの材料であ
っても良い。
Next, the piezoelectric element plate 3 is mounted on the supporting portion 2, the conductive adhesive 8 is applied and then heated to dry the conductive adhesive 8, and the supporting portion 2 (the conductive adhesive 8) is formed. The piezoelectric element plate 3 is fixed and electrically connected. Then, if necessary, the frequency of the piezoelectric element plate 3 is adjusted, and the vapor deposition device is used to perform vapor deposition in an amount necessary for frequency adjustment. Finally, the lid 4 of the ceramic container is covered and bonded to the ceramic substrate 1 with the adhesive 10 or the glass frit 11. A material or method other than the adhesive 10 and the glass frit 11 can be used for joining the lid 4 of the ceramic container and the ceramic substrate 1 (including the heating and drying steps necessary for joining). The piezoelectric element plate 3 is held and fixed to the supporting portion 2 on the ceramic substrate 1, and the lid 4 of the ceramic container is fixed.
The piezoelectric vibrator 5 formed by covering and bonding with each other is cut from the cutting portion 12 of the ceramic substrate 1 into individual piezoelectric vibrators 5 to manufacture the piezoelectric vibrators 5, and the series of manufacturing steps is completed. It is a manufacturing method. In addition to the piezoelectric vibrator 5, the same manufacturing process can be applied to electronic parts using the ceramic substrate 1, such as a piezoelectric oscillator and a filter, which can be applied to the present invention. Also, the ceramic substrate 1
The present invention can also be applied to the same type of manufacturing method in which a plurality of electronic components are mounted on a single substrate material, etc., and the single substrate material is individually cut off in the final step after passing through the assembly process. In this embodiment, an example in which a ceramic container is used for the "lid" has been shown, but the "lid" may be a material such as a metal material.
【0009】[0009]
【発明の効果】本発明により、セラミック基板を用いた
圧電振動子の製造方法を大幅に簡略化することができる
ことから、作業性の向上と作業効率、製造時間の大幅な
短縮が実現できた。また、製造工程が簡略化すること
で、品質と歩留まりの大幅な向上が行えたことで、製造
コストの低減も実現できた。
According to the present invention, since the method of manufacturing a piezoelectric vibrator using a ceramic substrate can be greatly simplified, workability can be improved, work efficiency and manufacturing time can be greatly shortened. In addition, by simplifying the manufacturing process, the quality and yield were significantly improved, and the manufacturing cost was also reduced.
【図面の簡単な説明】[Brief description of drawings]
【図1】本発明の製造工程フロー図である。FIG. 1 is a manufacturing process flow chart of the present invention.
【図2】従来の製造工程フロー図である。FIG. 2 is a flow chart of a conventional manufacturing process.
【図3】一般的な圧電振動子の側面図と部分断面図であ
る。
FIG. 3 is a side view and a partial cross-sectional view of a general piezoelectric vibrator.
【図4】セラミック基板上に構成される個々の圧電振動
子の引き込み線の一例を示す部分拡大図である。
FIG. 4 is a partially enlarged view showing an example of lead lines of individual piezoelectric vibrators formed on a ceramic substrate.
【符号の説明】[Explanation of symbols]
1 セラミック基板 2 支持部 3 圧電素板 4 フタ 5 圧電振動子 6 引き出し線 1 Ceramic substrate 2 Support part 3 Piezoelectric element plate 4 Lid 5 Piezoelectric vibrator 6 Lead wire

Claims (3)

    【特許請求の範囲】[Claims]
  1. 【請求項1】 電極引き出しが構成されるセラミック基
    板に支持部を構成して圧電素板を搭載し固着し、フタで
    密閉する圧電振動子の製造方法において、 複数個の該圧電振動子を構成する該セラミック基板を連
    続して連なる該圧電振動子の状態で、該セラミック基板
    に支持部を構成する工程と、該圧電素板を搭載して固着
    する工程と、該フタを被せ該セラミック基板と接合して
    密閉する工程と、該セラミック基板を切り離し個々の該
    圧電振動子に分離する工程とから成る圧電振動子の製造
    方法。
    1. A method of manufacturing a piezoelectric vibrator, wherein a supporting portion is formed on a ceramic substrate on which an electrode is formed, a piezoelectric element plate is mounted and fixed, and a lid is hermetically sealed. A step of forming a support portion on the ceramic substrate in the state of the piezoelectric vibrator in which the ceramic substrates are continuously connected, a step of mounting and fixing the piezoelectric element plate, and a step of covering the ceramic substrate with the lid. A method of manufacturing a piezoelectric vibrator, comprising: a step of bonding and sealing, and a step of separating the ceramic substrate to separate the piezoelectric vibrator into individual piezoelectric vibrators.
  2. 【請求項2】 前記セラミック基板に支持部を構成する
    工程は、導電性接着剤をスクリーン印刷で行うことを特
    徴とする請求項1の圧電振動子の製造方法。
    2. The method of manufacturing a piezoelectric vibrator according to claim 1, wherein the step of forming the supporting portion on the ceramic substrate is performed by screen printing an electrically conductive adhesive.
  3. 【請求項3】 前記圧電振動子の製造方法で、該圧電素
    板を搭載して固着する工程のあとに、周波数調整する工
    程を行うことを特徴とする請求項1の圧電振動子の製造
    方法。
    3. The method of manufacturing a piezoelectric vibrator according to claim 1, wherein in the method of manufacturing a piezoelectric vibrator, a step of adjusting a frequency is performed after a step of mounting and fixing the piezoelectric element plate. .
JP13092096A 1996-04-26 1996-04-26 Manufacture of piezoelectric vibrator Pending JPH09298434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13092096A JPH09298434A (en) 1996-04-26 1996-04-26 Manufacture of piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13092096A JPH09298434A (en) 1996-04-26 1996-04-26 Manufacture of piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPH09298434A true JPH09298434A (en) 1997-11-18

Family

ID=15045836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13092096A Pending JPH09298434A (en) 1996-04-26 1996-04-26 Manufacture of piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH09298434A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007274348A (en) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp Manufacturing method of lame mode crystal vibrator
JPWO2016204110A1 (en) * 2015-06-15 2018-03-01 株式会社村田製作所 Method for manufacturing piezoelectric vibrator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007274348A (en) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp Manufacturing method of lame mode crystal vibrator
JPWO2016204110A1 (en) * 2015-06-15 2018-03-01 株式会社村田製作所 Method for manufacturing piezoelectric vibrator

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