JPS59205810A - Piezoelectric oscillator and its manufacture - Google Patents

Piezoelectric oscillator and its manufacture

Info

Publication number
JPS59205810A
JPS59205810A JP8136283A JP8136283A JPS59205810A JP S59205810 A JPS59205810 A JP S59205810A JP 8136283 A JP8136283 A JP 8136283A JP 8136283 A JP8136283 A JP 8136283A JP S59205810 A JPS59205810 A JP S59205810A
Authority
JP
Japan
Prior art keywords
insulator
metal
fixed
terminal
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8136283A
Other languages
Japanese (ja)
Other versions
JPH0339407B2 (en
Inventor
Arata Doi
新 土井
Yoshinori Hirokawa
広川 嘉則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP8136283A priority Critical patent/JPS59205810A/en
Publication of JPS59205810A publication Critical patent/JPS59205810A/en
Publication of JPH0339407B2 publication Critical patent/JPH0339407B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain a stable oscillator by placing and fixing a piezoelectric plate applied with an exciting electrode on both major planes on a metallic terminal inserted and fixed to both ends of a cylindrical insulator, providing a metallic film to an outer side face near both ends of this insulator and sealing the insulator with cans. CONSTITUTION:Copper or the like is vapor-deposited on both ends and the outer side faces near both ends of the cylindrical insulator 3 made of glass or the like and further, the metallic film 4 of tin or solder plating or the like is applied thereto. The metallic terminal 7 inserted to both the ends of the insulator 3 is a cylinder having an outer diameter slightly smaller than the inner diameter of the insulator, its one end part is pushed into spread so as to be brought into close contact with the end part of the insulator 3 and they are fixed by an adhesives. The vicinity of both ends of a crystal plate 1 is fixed to the metallic terminal 7 by a conductive adhesives or solder 8, and the metal-made cans 9 are pressed from both ends of the insulator 3 thereby attaining airtightness.

Description

【発明の詳細な説明】 本発明は、矩形圧電板を使用した圧電振動子とその製造
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric vibrator using a rectangular piezoelectric plate and a method for manufacturing the same.

従来より=1ンビュータ等のクロック源として水晶振動
1′−かびろく利用されている。第1図は、既に広く使
用されている矩形水晶振動板lてあり、両主面には励振
電極2が配置されている。矩形水晶振動子は小型である
ためその利点を生かして電子機器のり1コック信号源と
して利用されている。
Conventionally, crystal oscillations have been widely used as a clock source for monitors and the like. FIG. 1 shows a rectangular crystal diaphragm that has already been widely used, and excitation electrodes 2 are arranged on both main surfaces. Since rectangular crystal oscillators are small, they are used as signal sources for electronic equipment by taking advantage of this advantage.

しかしながら、他の電子部品かノ\イブリッI・基板に
合うようチップ化されているが、水晶振動子はリード線
タイプが主流となっている。
However, although they are made into chips to fit other electronic components or boards, lead wire type crystal resonators are the mainstream.

第2図は、既に発表されているチップ型水晶振動子であ
る。円筒状のガラス等の絶縁体3の両端部(=f近にメ
ッキ等で金属膜4を形成しである。そして、励振電極2
を施した水晶板1を直接金属膜4の上に載置し、導電接
着剤やハンダ5等で固着している。さらに、金属製のカ
ン6を絶縁体の両端に圧入して気密構造としている。な
お、引出部は封止のノノンと兼ねている。
Figure 2 shows a chip-type crystal resonator that has already been announced. A metal film 4 is formed by plating or the like near both ends (=f) of a cylindrical insulator 3 such as glass. Then, an excitation electrode 2
The quartz plate 1 subjected to this process is placed directly on the metal film 4 and fixed with a conductive adhesive, solder 5, or the like. Further, metal cans 6 are press-fitted into both ends of the insulator to create an airtight structure. Note that the drawer part also serves as a sealing pad.

しかしなから、この様な振動子には次のような欠点があ
る。
However, such a vibrator has the following drawbacks.

(a>  水晶板を円筒上の絶縁体に直接載置している
ため水晶板の長手方向の側面か絶縁体の内壁に接触し、
振動子の直列共振抵抗が劣化する。
(a> Since the crystal plate is placed directly on the insulator on the cylinder, the longitudinal side of the crystal plate comes into contact with the inner wall of the insulator,
The series resonant resistance of the vibrator deteriorates.

(]))絶縁体の内壁に蒸着やメッキで金属膜を形°成
“→ろ際、絶縁体の内部ではマスクを出来ないため内λ
:、(て電気的にショートする場合か生しる。
(])) A metal film is formed on the inner wall of the insulator by vapor deposition or plating.
:, (This may occur if there is an electrical short circuit.)

本発明は、円筒状の絶縁体の両端に金属端子を伸入固?
゛1し、1:本金属!5.□2i偵j−にj)j)4振
電極を両Eih面に施した1+、電板を載頷固猫し、該
絶縁体の両端部イ」近9¥側面に設置ノだ金属1摸とカ
ンに、より!t J、I土たことを主構成とする圧電]
辰動子とその製造方法であり、1)す述しノ、:欠点を
除去し、安定な振動子を提fj(するこ。七を目的きし
ている。
In the present invention, metal terminals are inserted and fixed at both ends of a cylindrical insulator.
゛1, 1: Real metal! 5. □ On the 2i rectifier j-, j) j) 4 oscillating electrodes are placed on both Eih surfaces of 1+, the electric plate is placed firmly on both ends of the insulator, and the metal 1 is installed on the side of the insulator. To Kan, more! t J, I piezoelectricity whose main composition is soil]
This is a oscillator and its manufacturing method. 1) The purpose is to eliminate defects and provide a stable oscillator.

第3図は、本発明の実施例を示す斜視図である。FIG. 3 is a perspective view showing an embodiment of the present invention.

1■J 1iii状てカラスて6−の絶縁体3の両端部
及び両端部イζ1近<’I−11111面には銅等を蒸
着しさらにスズメッキやハングメツ−1−等の金属膜4
を施しである。ただし、第2図に不したように円筒状の
絶縁体3あ内壁まて絶縁;摸を施J゛必留がない。次に
金属端子7を絶縁体3の両端から挿入する。金属端子7
は、絶縁体3]の内径よりやや小さめの外径の筒状で一
方の!・妬)1:を押し拡げてあり絶縁体3のへ“Wt
部と密着するようにJlj工されている。この金属端子
7を絶:縁体3に仲人する。この際、接着剤等て固着さ
ゼ″る。
1■J 1iii-shaped and crow 6- Both ends of the insulator 3 and both ends ζ1
is alms. However, as shown in FIG. 2, it is not necessary to insulate the inner wall of the cylindrical insulator 3. Next, metal terminals 7 are inserted from both ends of the insulator 3. metal terminal 7
is a cylindrical shape with an outer diameter slightly smaller than the inner diameter of the insulator 3], and one of the!・Envy) 1: is expanded and goes to insulator 3 “Wt
Jlj is machined so that it fits closely with the part. This metal terminal 7 is connected to the insulation body 3. At this time, the adhesive will stick.

第11図は、第3図の絶縁体3の金属Δ1::子7 (
、Zh3)1振電極2を施した水晶板1を載置したとこ
ろを示す。水晶板の両端部付近には導電接着剤又1よI
・ンダ8て・固着されている。次に、金属製のノノン9
を絶縁体3の両端81;から圧入し、気密状態とする。
FIG. 11 shows the metal Δ1::child 7 (
, Zh3) The crystal plate 1 provided with the one-wave electrode 2 is shown mounted. There is conductive adhesive near both ends of the crystal plate.
・It is fixed. Next, the metal nonon 9
are press-fitted from both ends 81 of the insulator 3 to create an airtight state.

ノJン9と絶縁体3上に設けられた金FA膜・1にJ二
り封着される。カン9には予め圧入に適した金属、例え
ばIXレンダのメッキか施しである。11着された状態
の半断面図を第5図に示す。カン9は、そのまま引き1
」ル端子として使用される。また、内部雰囲気は真空ま
たはチッ素ガスか充填されている。上だ金1萬端子は、
円筒状の金属管の一端を押し拡げ絶縁体の端部と密着さ
せ、絶縁体の端部に設けられノこ金属膜と接続さゼ、振
動板の電気信号をカンに伝えている。
J2 is sealed to the gold FA film 1 provided on the insulator 3 and the insulator 3. The can 9 is plated or coated with a metal suitable for press-fitting, for example, IX render. FIG. 5 shows a half-sectional view of the 11-layered state. Kang 9 is just a draw 1
” is used as a terminal. The internal atmosphere is either vacuum or filled with nitrogen gas. The upper gold 10,000 terminal is
One end of the cylindrical metal tube is pushed out and brought into close contact with the end of the insulator, and the ridge connected to the saw metal membrane provided at the end of the insulator transmits electrical signals from the diaphragm to the can.

本発明の他の実施例を第6図、第7図に示す。Other embodiments of the invention are shown in FIGS. 6 and 7.

第6図(a)は、前述した金属端子7の絶縁体の端部と
接するところに切り込みを入れた金属端子11てあり、
絶縁体から一部浮かせる構造にしである。第1a(b>
に示すように、金属端子11の切り込みにより金属端子
上カン9とか直接接触し、絶縁体3の金属膜10は絶縁
体3の端部には設jlる必要かなくなる。′!iS7図
(a)は、金属端子12に9、ずように先端を漏斗状に
加工し、カン9と接剤1する。ようにしている。第6図
(b)に組み立てた例を小す。第1;図、第7図に示し
た金属端子11゜12に、より絶縁体3の端部に金属)
模を施す必要かなくなった。
FIG. 6(a) shows a metal terminal 11 with a notch made at the point where it contacts the end of the insulator of the metal terminal 7 described above.
It has a structure that partially floats above the insulator. 1st a(b>
As shown in FIG. 2, the notch in the metal terminal 11 brings it into direct contact with the metal terminal upper ring 9, so that the metal film 10 of the insulator 3 does not need to be provided at the end of the insulator 3. ′! In Figure iS7 (a), the tip of the metal terminal 12 is machined into a funnel shape, and the can 9 and the adhesive 1 are connected. That's what I do. An assembled example is shown in FIG. 6(b). 1st: At the metal terminals 11 and 12 shown in Fig. 7, the metal terminals are attached to the ends of the insulator 3)
There is no longer any need to imitate it.

池の実施例として第8図に示すように金属端子の押し拡
げた部分にハンダ等13を盛り上げるがハング等の粒を
張り何()ている。このことに、より、金属端子とカン
との接触を確実に確保出来る。
As shown in FIG. 8, as an example of the pond, solder or the like 13 is heaped up on the expanded portion of the metal terminal, but particles such as hang are applied. This ensures reliable contact between the metal terminal and the can.

本発明に、より次のような効果か得られる。The present invention provides the following effects.

(警1)振動板の41111面が金属端子により絶縁体
より離されるため絶縁体との接触の虞れかなくなり、i
+jj列11抗か低くなり安定な発振か得られる。
(Warning 1) Since the 41111 plane of the diaphragm is separated from the insulator by the metal terminal, there is no risk of contact with the insulator, and i
+jj column 11 resistor becomes low and stable oscillation can be obtained.

<1))  iπ来は絶縁体内壁まで金属1摸を施す必
要かあったか、金属端子により金属膜は絶縁体の端面と
端面イ」近外側面に施せば、よく絶縁体内壁での短絡の
心配かな・くなった。
<1)) Since iπ, was it necessary to apply a metal film to the inside wall of the insulator? If the metal film is applied to the end face of the insulator and the end face of the insulator by a metal terminal, there is no need to worry about short circuits on the inside wall of the insulator. Kana has become.

(c)  *:た金属端子を工夫するこ七により金属I
IAを絶縁体端部に施さなくてもよくなった。
(c) *: By devising the metal terminal, the metal I
It is no longer necessary to apply IA to the ends of the insulator.

本発明により歩留まりが向上し安価で安定な圧電振動子
か製造できる。
According to the present invention, the yield is improved and it is possible to manufacture inexpensive and stable piezoelectric vibrators.

本実施例では、圧電体として水晶を取り挙げたか他に、
タンタル酸リチウム、二オフ酸すチウj、または圧電レ
ラミックなとでもよい。また、絶縁体としてガラスを例
に挙げたが、水晶、セラミック等であってもよい。さら
に金属1摸は、蒸着、メッキの組み合わゼ、または導電
性塗AIを塗布したt)のでしよい。
In this example, in addition to using crystal as the piezoelectric material,
Lithium tantalate, sulfur difluoride, or piezoelectric ceramics may also be used. Further, although glass is used as an example of the insulator, crystal, ceramic, etc. may also be used. Furthermore, the metal 1 may be coated with a combination of vapor deposition, plating, or conductive coating AI.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、不発明に使用される圧電板を小ず41視図、
第2図は、従来の圧電振動子を示す斜視図、第3図は、
本発明の金属端子を挿入した状態を示すjSI視図、第
4図は、圧電板を金属端子に載置固定しカンを圧入した
状態を示すj4視図、第5図は、第4図を組め上げ内部
構造番示す断面図である。 第6図(a)は、本発明の他の実施例を示す・金属端j
−1同図<b>は同図(a)の金属端子を圧電振動子に
使用したときの内部を示す部分断面図である。第7図(
1])は、他の実施例の金属端子、同図(b)は同1゛
〆l(a>の金属端子を使用した腸の内部を示す部分1
111而1−イ1である。第8図は、他の実施例を示す
部分1111i而図である。 1・・・・・・・・・圧電板 2・・・・・・・励振電極 ((・・・・−・絶縁体 4、10・・・・・・・・・金属膜 7、Il、12・・・・・・・・金属端子9・・・・・
・・・]Il 第5m
FIG. 1 is a perspective view of a piezoelectric plate used in the invention,
Fig. 2 is a perspective view showing a conventional piezoelectric vibrator, and Fig. 3 is a perspective view showing a conventional piezoelectric vibrator.
FIG. 4 is a JSI perspective view showing a state in which the metal terminal of the present invention is inserted, FIG. It is a sectional view showing an assembled internal structure number. FIG. 6(a) shows another embodiment of the present invention. Metal end j
-1 Figure <b> is a partial sectional view showing the inside when the metal terminal of Figure (a) is used in a piezoelectric vibrator. Figure 7 (
1]) is the metal terminal of another example, and the same figure (b) is the part 1 showing the inside of the intestine using the metal terminal of 1゛
111 and 1-i1. FIG. 8 is a diagram of a portion 1111i showing another embodiment. 1...Piezoelectric plate 2...Excitation electrode ((...--Insulator 4, 10...Metal film 7, Il, 12...Metal terminal 9...
...] Il 5th m

Claims (2)

【特許請求の範囲】[Claims] (1) 円筒状の絶縁体の両端に金属端子を挿入固着し
、該金属端子上に励振電極を両主面に施した圧電板を載
置固着し、該絶縁体の両端部イ」近外側面に設(Jた金
属膜とカンにより封止したことを特徴と4−る圧電振動
子。
(1) Metal terminals are inserted and fixed at both ends of a cylindrical insulator, a piezoelectric plate with excitation electrodes on both main surfaces is placed and fixed on the metal terminals, and the ends of the insulator are placed near A piezoelectric vibrator characterized by being sealed with a metal film and a can provided on the side.
(2)円筒状の絶縁体の両端部に金属端子を配置する工
程と、該金属端子上に励振電極を両主面に施した圧電板
を載置固着する工程と、該絶縁体の両端部付近外側面に
設けた金属膜とカンとにより)Jd−J−る工程から成
る特ii′1請求の範囲第1項記載の圧電振動子の製造
方法。
(2) A step of arranging metal terminals at both ends of a cylindrical insulator, a step of placing and fixing a piezoelectric plate having excitation electrodes on both main surfaces on the metal terminal, and a step of placing metal terminals on both ends of the insulator. ii) A method for manufacturing a piezoelectric vibrator according to claim 1, which comprises a step of performing Jd-J- (by means of a metal film provided on the outer surface of the vibrator and a can).
JP8136283A 1983-05-10 1983-05-10 Piezoelectric oscillator and its manufacture Granted JPS59205810A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8136283A JPS59205810A (en) 1983-05-10 1983-05-10 Piezoelectric oscillator and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8136283A JPS59205810A (en) 1983-05-10 1983-05-10 Piezoelectric oscillator and its manufacture

Publications (2)

Publication Number Publication Date
JPS59205810A true JPS59205810A (en) 1984-11-21
JPH0339407B2 JPH0339407B2 (en) 1991-06-13

Family

ID=13744218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8136283A Granted JPS59205810A (en) 1983-05-10 1983-05-10 Piezoelectric oscillator and its manufacture

Country Status (1)

Country Link
JP (1) JPS59205810A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046110A (en) * 1983-08-23 1985-03-12 Murata Mfg Co Ltd Chip-like piezo-resonator
JPS61199312A (en) * 1985-02-28 1986-09-03 Matsushita Electric Ind Co Ltd Ceramic oscillator
JPS62258510A (en) * 1986-05-01 1987-11-11 Murata Mfg Co Ltd Piezoelectric resonator and its manufacture
JPS6315623U (en) * 1986-07-16 1988-02-02
JPH01137618U (en) * 1988-03-16 1989-09-20

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648120U (en) * 1979-09-20 1981-04-28

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470818A (en) * 1977-11-16 1979-06-07 Matsushita Electric Ind Co Ltd Production of speaker diaphragm

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648120U (en) * 1979-09-20 1981-04-28

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046110A (en) * 1983-08-23 1985-03-12 Murata Mfg Co Ltd Chip-like piezo-resonator
JPS61199312A (en) * 1985-02-28 1986-09-03 Matsushita Electric Ind Co Ltd Ceramic oscillator
JPS62258510A (en) * 1986-05-01 1987-11-11 Murata Mfg Co Ltd Piezoelectric resonator and its manufacture
JPS6315623U (en) * 1986-07-16 1988-02-02
JPH01137618U (en) * 1988-03-16 1989-09-20

Also Published As

Publication number Publication date
JPH0339407B2 (en) 1991-06-13

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