JPS58293Y2 - 半導体熱処理炉芯管 - Google Patents

半導体熱処理炉芯管

Info

Publication number
JPS58293Y2
JPS58293Y2 JP1976040313U JP4031376U JPS58293Y2 JP S58293 Y2 JPS58293 Y2 JP S58293Y2 JP 1976040313 U JP1976040313 U JP 1976040313U JP 4031376 U JP4031376 U JP 4031376U JP S58293 Y2 JPS58293 Y2 JP S58293Y2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
gas
heat treatment
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976040313U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52131959U (enExample
Inventor
香西照雄
田中孝史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1976040313U priority Critical patent/JPS58293Y2/ja
Publication of JPS52131959U publication Critical patent/JPS52131959U/ja
Application granted granted Critical
Publication of JPS58293Y2 publication Critical patent/JPS58293Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1976040313U 1976-04-01 1976-04-01 半導体熱処理炉芯管 Expired JPS58293Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040313U JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040313U JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Publications (2)

Publication Number Publication Date
JPS52131959U JPS52131959U (enExample) 1977-10-06
JPS58293Y2 true JPS58293Y2 (ja) 1983-01-06

Family

ID=28499443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040313U Expired JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Country Status (1)

Country Link
JP (1) JPS58293Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5436279Y2 (enExample) * 1974-10-15 1979-11-02

Also Published As

Publication number Publication date
JPS52131959U (enExample) 1977-10-06

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