JPS5828845A - 半導体装置の製造装置 - Google Patents

半導体装置の製造装置

Info

Publication number
JPS5828845A
JPS5828845A JP56126178A JP12617881A JPS5828845A JP S5828845 A JPS5828845 A JP S5828845A JP 56126178 A JP56126178 A JP 56126178A JP 12617881 A JP12617881 A JP 12617881A JP S5828845 A JPS5828845 A JP S5828845A
Authority
JP
Japan
Prior art keywords
bonding
tool
polishing
semiconductor device
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56126178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6234140B2 (enExample
Inventor
Hiroshi Aoyama
弘 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56126178A priority Critical patent/JPS5828845A/ja
Publication of JPS5828845A publication Critical patent/JPS5828845A/ja
Publication of JPS6234140B2 publication Critical patent/JPS6234140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/077—
    • H10W72/701—

Landscapes

  • Wire Bonding (AREA)
JP56126178A 1981-08-12 1981-08-12 半導体装置の製造装置 Granted JPS5828845A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56126178A JPS5828845A (ja) 1981-08-12 1981-08-12 半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56126178A JPS5828845A (ja) 1981-08-12 1981-08-12 半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS5828845A true JPS5828845A (ja) 1983-02-19
JPS6234140B2 JPS6234140B2 (enExample) 1987-07-24

Family

ID=14928608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56126178A Granted JPS5828845A (ja) 1981-08-12 1981-08-12 半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS5828845A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63256402A (ja) * 1987-04-15 1988-10-24 日本化学工業株式会社 木材防虫剤、防虫木材用接着剤及び防虫木材
JPH03161272A (ja) * 1989-07-19 1991-07-11 Asahi Daiyamondo Kogyo Kk Ｔａｂ用ボンディングツールのクリーニング砥石

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524448A (en) * 1978-08-09 1980-02-21 Fujitsu Ltd Junction head
JPS55157439A (en) * 1979-05-21 1980-12-08 Mitsubishi Electric Corp Electric discharge machining device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524448A (en) * 1978-08-09 1980-02-21 Fujitsu Ltd Junction head
JPS55157439A (en) * 1979-05-21 1980-12-08 Mitsubishi Electric Corp Electric discharge machining device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63256402A (ja) * 1987-04-15 1988-10-24 日本化学工業株式会社 木材防虫剤、防虫木材用接着剤及び防虫木材
JPH03161272A (ja) * 1989-07-19 1991-07-11 Asahi Daiyamondo Kogyo Kk Ｔａｂ用ボンディングツールのクリーニング砥石

Also Published As

Publication number Publication date
JPS6234140B2 (enExample) 1987-07-24

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