JPS5827377A - 太陽電池素子の製造方法 - Google Patents

太陽電池素子の製造方法

Info

Publication number
JPS5827377A
JPS5827377A JP56126420A JP12642081A JPS5827377A JP S5827377 A JPS5827377 A JP S5827377A JP 56126420 A JP56126420 A JP 56126420A JP 12642081 A JP12642081 A JP 12642081A JP S5827377 A JPS5827377 A JP S5827377A
Authority
JP
Japan
Prior art keywords
semiconductor
transparent electrode
solar cell
plasma
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56126420A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6356712B2 (enrdf_load_stackoverflow
Inventor
Hajime Ichiyanagi
一柳　肇
Tadashi Igarashi
五十嵐　廉
Nobuhiko Fujita
藤田　順彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP56126420A priority Critical patent/JPS5827377A/ja
Publication of JPS5827377A publication Critical patent/JPS5827377A/ja
Publication of JPS6356712B2 publication Critical patent/JPS6356712B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP56126420A 1981-08-11 1981-08-11 太陽電池素子の製造方法 Granted JPS5827377A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56126420A JPS5827377A (ja) 1981-08-11 1981-08-11 太陽電池素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56126420A JPS5827377A (ja) 1981-08-11 1981-08-11 太陽電池素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5827377A true JPS5827377A (ja) 1983-02-18
JPS6356712B2 JPS6356712B2 (enrdf_load_stackoverflow) 1988-11-09

Family

ID=14934726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56126420A Granted JPS5827377A (ja) 1981-08-11 1981-08-11 太陽電池素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5827377A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164078A (ja) * 1988-12-19 1990-06-25 Hitachi Ltd アモルファス太陽電池
JPH02164077A (ja) * 1988-12-19 1990-06-25 Hitachi Ltd アモルファスシリコン太陽電池

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164078A (ja) * 1988-12-19 1990-06-25 Hitachi Ltd アモルファス太陽電池
JPH02164077A (ja) * 1988-12-19 1990-06-25 Hitachi Ltd アモルファスシリコン太陽電池

Also Published As

Publication number Publication date
JPS6356712B2 (enrdf_load_stackoverflow) 1988-11-09

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