JPS5824871A - Package measuring jig for semiconductor - Google Patents

Package measuring jig for semiconductor

Info

Publication number
JPS5824871A
JPS5824871A JP56123421A JP12342181A JPS5824871A JP S5824871 A JPS5824871 A JP S5824871A JP 56123421 A JP56123421 A JP 56123421A JP 12342181 A JP12342181 A JP 12342181A JP S5824871 A JPS5824871 A JP S5824871A
Authority
JP
Japan
Prior art keywords
package
resin plate
contact
section
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56123421A
Other languages
Japanese (ja)
Other versions
JPH0427507B2 (en
Inventor
Ichiro Midorikawa
一郎 緑川
Masaru Tateishi
立石 勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56123421A priority Critical patent/JPS5824871A/en
Publication of JPS5824871A publication Critical patent/JPS5824871A/en
Publication of JPH0427507B2 publication Critical patent/JPH0427507B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Abstract

PURPOSE:To bring a spring pin into contact with a load section by placing to an IC package in a positioning hole on a pachage lifting resin plate to position while a guide hole provided on said resin plate is utilized with the pressurizing section being pushed down. CONSTITUTION:An IC package 35 is placed in a positioning hole 40 on a package lifting resin plate 38 to position. At this point, a pressurizing section 50 turns a supporting section 52 to such a position as facilitating mounting of the IC package. Then, a IC package set rear rod 51 is lowered so that a lead section 36 of the IC package will be pressurized with a pressurizing section 50. With the lowering of the pressurizing section 50, the package lifting resin plate 38 is forced down to a resin plate 32 so as to bend a plate spring 39. The lead section 36 of the IC package 35 gets in contact with the tip of a spring pin 33 compressing it being guided with a pin guide hole 41 provided on the package lifting resin plate 38. The other end of the spring pin comes in contact with an IC tester to test characteristics of the IC package.

Description

【発明の詳細な説明】 本発明はパッケージ浮かし機構を有する半導体装置測定
治具に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor device measuring jig having a package lifting mechanism.

従来フラットパッケージタイプのIC測定治具としでは
第1図(a)(b)に平面図、側面図に示すようなもの
が知られている。図で1はや形状にしてバネ性を持たせ
た接触子。2はフラットパッケージタイプICのリード
部を位置決めする、下部に接触子1全配設した溝。3は
接触子1全モールドした樹脂基体。4はフラットパッケ
ージエCツ(点壊で図示)のリード部Bを樹脂基体3の
溝2に位置決め後、リード部8を接触子1に凸部5で押
しつける樹脂押えフタ、6はフタを固定するツメ状の引
掛は部である。フラットパッケージ■Cツは第1図(a
)に点線で示した。
2. Description of the Related Art Conventionally, flat package type IC measuring jigs as shown in FIGS. 1(a) and 1(b) are shown in plan and side views. In the figure, 1 is a contact that has a slightly shaped shape and has spring properties. 2 is a groove in which all the contacts 1 are arranged at the bottom, which positions the lead part of a flat package type IC. 3 is a resin base in which the contact 1 is completely molded. 4 is a resin holding lid that presses the lead part 8 onto the contact 1 with the convex part 5 after positioning the lead part B of the flat package C (shown as a dot) in the groove 2 of the resin base 3, and 6 fixes the lid. The claw-like hook is part. Flat package ■C is shown in Figure 1 (a
) is indicated by a dotted line.

上述の従来のIC測定用治具はTCを樹脂基体3のサン
状溝2に位置決め17、次いで押えフタ4をツメ6で固
定することが必要であり、作業性が非常に悪く多情のI
Cの試験には向かないと云う欠点があった。そこでこの
ような点を改善したものとして第2図にその要部を示す
如く、樹脂板21に設けたパッケージ位置合せ穴22に
ICパッケージ23を位置決めし、上部から接触子24
を埋こんだ樹脂板25を下げて、丁Cパッケージ23の
リード部26に接触子24を当てて電気的特性全試験す
るものが開発されたが接触子からの電気的信号全IC測
定用テスタ(図示せず)に接続させる際に信号ラインが
長くなり測定種度が低下すると云う欠点があった。
The above-mentioned conventional IC measuring jig requires positioning 17 of the TC in the sun-shaped groove 2 of the resin base 3, and then fixing the presser cover 4 with the claws 6, which results in very poor workability and an unsatisfactory IC.
The drawback was that it was not suitable for the C test. In order to improve this point, as shown in FIG. 2, the IC package 23 is positioned in the package alignment hole 22 provided in the resin plate 21, and the contactor 24 is
A tester has been developed that tests the electrical characteristics of all ICs by lowering the resin plate 25 embedded with the contact and applying the contact 24 to the lead part 26 of the package 23. (not shown), the signal line becomes long and measurement accuracy is reduced.

本発明は上述の点に鑑みてなされたものでスプリングビ
ンがぼ通して埋込まれた絶縁板と、枠と半導体パッケー
ジ位置決め穴及び該スプリングピン位置決め用穴を設け
たパッケージ浮かし用絶縁板と、半導体パッケージのリ
ード端子の絶縁体加圧部を有し、該パッケージ浮かし用
絶縁板が該枠内を弾性体により上下可動に支持され、該
絶縁体加圧部から力が加わらない状態でFi該半導体パ
ッケージ位置決め用穴に位置決めされた半導体パッケー
ジの該リード端子と該スプリングピンを非接触に、該絶
縁体加圧部から力が加わった状態では該リード端子と該
スプリングビンを接触するようにしたことを特徴とする
半導体パッケージ測定治具を提供するものである。
The present invention has been made in view of the above-mentioned points, and includes: an insulating plate in which a spring bin is embedded through the hole; an insulating plate for floating a package having a frame, a semiconductor package positioning hole, and a spring pin positioning hole; It has an insulator pressurizing part for the lead terminal of the semiconductor package, and the package floating insulating plate is vertically movably supported within the frame by an elastic body, and when no force is applied from the insulator pressurizing part, Fi is applied. The lead terminal of the semiconductor package positioned in the semiconductor package positioning hole and the spring pin are not in contact with each other, but the lead terminal and the spring pin are in contact when force is applied from the insulator pressurizing part. The present invention provides a semiconductor package measuring jig characterized by the following.

即ち本発明の目的は■キャリアなしでしかも特性を低下
させず測定出来る事、■位置合わせが簡単に出来る事で
ある。特徴としてはパッケージ位置合わせ板がバネ等に
より可動する事にある。位置合わせ時点ではパッケージ
は測定用接触子より浮いておりリードにストレスを与え
ず容易にIC全セットできる。次にパッケージのリード
を上部より押えつける時に位置合わせ板と一緒に押えっ
け接触をとるためパッケージの位置合わせが容易でかつ
良好な特性が得られるものである。
That is, the objects of the present invention are (1) to be able to perform measurements without a carrier and without deteriorating the characteristics, and (2) to be able to easily perform alignment. The feature is that the package positioning plate can be moved by a spring or the like. At the time of alignment, the package is floating above the measurement contact, and the entire IC can be easily set without applying stress to the leads. Next, when the leads of the package are pressed down from above, they come into contact with the alignment plate, making it easy to align the package and providing good characteristics.

以下本発明のパッケージ浮かし機構を有するIC測定治
具について図面を参照して説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An IC measuring jig having a package lifting mechanism according to the present invention will be described below with reference to the drawings.

本発明のパッケージ浮かし機構を有するIC測定治具の
斜視図を第4図に示す。
FIG. 4 shows a perspective view of an IC measuring jig having a package lifting mechanism according to the present invention.

図で31は樹脂基板、34は樹脂枠、38はパッケージ
浮かし用樹脂板、39は板バネ、4oはICパッケージ
が丁度入る程度の位置決め用穴、50はICパッケージ
のリード部を押さえる樹脂製の加圧部である。加圧部5
oは棒51を上下することにより上下させることができ
る。棒51を上下さす機構の支持部52は矢印Aの如く
水平面内で回転させることができる。第3図(a)(b
)は各々本発明のXC測定治真の要部平面図、断面図を
示す。31は樹脂基板、32は接触子となるスプリング
ビン33が埋込まれた樹脂板、34はスプリングビン3
3とICパッケージ35のリード端子360間隔を調節
する樹脂枠、樹脂板32と樹脂枠34は樹脂基板31に
ネジ3″7で固定されている。38は板バネ39により
樹脂枠34にささえられたICパッケージが丁度入る程
度の穴40を有するパッケージ浮かし用樹脂板である。
In the figure, 31 is a resin board, 34 is a resin frame, 38 is a resin plate for floating the package, 39 is a leaf spring, 4o is a positioning hole that just fits the IC package, and 50 is a resin plate that holds the lead part of the IC package. It is a pressurizing part. Pressure section 5
o can be raised and lowered by moving the rod 51 up and down. The support part 52 of the mechanism for raising and lowering the rod 51 can be rotated in a horizontal plane as shown by arrow A. Figure 3(a)(b)
) respectively show a plan view and a cross-sectional view of essential parts of the XC measurement fixture of the present invention. 31 is a resin board, 32 is a resin plate in which a spring pin 33 serving as a contact is embedded, and 34 is a spring pin 3.
3 and a resin frame for adjusting the interval between the lead terminals 360 of the IC package 35, the resin plate 32 and the resin frame 34 are fixed to the resin board 31 with screws 3"7. 38 is supported by the resin frame 34 by a leaf spring 39. This is a package floating resin plate having a hole 40 that is just large enough to fit an IC package.

板バネ39はネジ42によりパッケージ浮かし用樹脂板
3日にのみ固定されている〇 最初第3図(+))の状態でICパッケージ35をパッ
ケージ浮かし用樹脂板3Bの位(d決め穴40に入れて
位置決めする。この時加圧部50は支持部52を回転さ
せて、ICパッケージ取りつけが容易な位置に移動させ
ておく。次いでICパッケージセット後第4図のような
状態にして捧51を下げて加圧部50でICパッケージ
のリード部36を加圧する。加圧部50vr下げること
により、第3図Cに示す如くパッケージ浮かし用樹脂板
3日は樹脂板32の所まで押し下げられ、板バネ39は
図の如くたわんだ状態となる。なお第3図(c)ではビ
ンガイド用穴部を省略しである。工Cパッケージ35の
リード部36はパッケージ浮かし用樹脂板38に設けら
れたビンガイド用穴41によυガイドされたスプリング
ビン33を押し縮めてピンの先端部と接触する。スプリ
ングビンの他端はIC試験器に接続されており、第3図
(C)の状態でICパッケージの特性を試験することが
できる。
The leaf spring 39 is fixed by screws 42 only on the package floating resin plate 3. Initially, in the state shown in FIG. At this time, the pressurizing section 50 rotates the support section 52 and moves it to a position where it is easy to attach the IC package.Next, after setting the IC package, place the support section 51 in the state shown in Fig. 4. The pressure unit 50 pressurizes the lead part 36 of the IC package.By lowering the pressure unit 50vr, the package floating resin plate 3 is pushed down to the resin plate 32 as shown in FIG. The spring 39 is in a bent state as shown in the figure. Note that the hole for the bottle guide is omitted in Fig. 3(c). The spring pin 33 guided by the pin guide hole 41 is compressed and comes into contact with the tip of the pin.The other end of the spring pin is connected to the IC tester, and in the state shown in Fig. 3(C). Characteristics of IC packages can be tested.

特性測定後加圧部50を上に引上げて工Cパッケージを
取りはずす。
After measuring the characteristics, pull up the pressurizing part 50 and remove the package C.

上述の如く、本発明のパッケージ浮かし機構を有する工
Cパッケージ測定治其の位置決め穴4゜により極めて容
易に工Cパッケージを位置決めすることができ、また加
圧部5oを押し下げて、パッケージ浮し樹脂板に設けた
スプリングビンガイド用穴44[よりスプリングビン3
3を精度良くICパッケージのリード部36に接触させ
ることができる。
As mentioned above, the positioning hole 4° of the C-package measuring device having the package lifting mechanism of the present invention makes it possible to position the C-package extremely easily, and by pressing down the pressure part 5o, the package can be lifted up and the resin removed. Spring bin guide hole 44 provided in the plate [from spring bin 3]
3 can be brought into contact with the lead portion 36 of the IC package with high accuracy.

不実施例はICパッケージ1個の測定する例をあげたが
複数個同時に測定できるようにしても良い。オだ弾性体
として板バネ金柑いたがこれに限るものでない。甘た構
造としても実施例に限足せず、本発明の口達を達成でき
る構造であれば良い。
In the non-embodiments, an example was given in which one IC package was measured, but a plurality of IC packages may be measured simultaneously. Although leaf spring kumquat was used as an elastic body, it is not limited to this. A loose structure is not limited to the embodiments, and any structure that can achieve the objectives of the present invention may be used.

3図は本発明のXC測定治具を示す図、第4図は本発明
の■C測定治治具斜視図である。
FIG. 3 is a diagram showing the XC measuring jig of the present invention, and FIG. 4 is a perspective view of the C measuring jig of the present invention.

31;樹脂基板、32:樹脂板、33ニスプリングビン
、34:樹脂枠、35:IC!パッケージ、36:リー
ド端子、37:ネジ:38:パッケージ浮かし用樹脂板
、39:板バネ、40二工Cパッケージ位置決め用、4
1ニスプリングピンガイド用穴、42:ネジ、50:絶
縁体の加圧部、51:棒、52:支持部。
31; Resin board, 32: Resin plate, 33 Nice spring bottle, 34: Resin frame, 35: IC! Package, 36: Lead terminal, 37: Screw: 38: Resin plate for floating the package, 39: Leaf spring, 40 2nd C package positioning, 4
1 spring pin guide hole, 42: screw, 50: pressurizing part of insulator, 51: rod, 52: support part.

代理人 弁理士 松 岡 宏四部Agent: Patent Attorney Hiroshibe Matsuoka

Claims (1)

【特許請求の範囲】[Claims] スプリングビンが貫通して埋込まれた絶縁板と、枠と、
半導体パッケージ位置決め用穴及び該スプリングビン位
置決め用穴を設けたパッケージ浮かし用絶縁板と、半導
体パッケージのリード端子の絶縁体加圧部を有し、該パ
ッケージ浮かし用絶縁板が該枠内を弾性体により上下可
動に支持され、該絶縁体加圧部から力が加わらない状態
では該半導体パッケージ位置決め用穴に位置決めされた
半導体パッケージの該リード端子と該スプリングピンを
非接触に、該絶縁体加圧部から力が加った状態では該リ
ード端子と該スプリングピンを接触するようにしたこと
を特徴とする半導体パッケージ測定治具。  ・
an insulating plate into which a spring bottle is embedded and a frame;
The insulating plate for lifting the package has an insulating plate provided with holes for positioning the semiconductor package and the holes for positioning the spring bin, and an insulator pressurizing part for the lead terminal of the semiconductor package, and the insulating plate for lifting the package has an elastic body inside the frame. When no force is applied from the insulator pressurizing section, the lead terminal of the semiconductor package positioned in the semiconductor package positioning hole and the spring pin are not in contact with each other, and the insulator is pressurized. 1. A semiconductor package measuring jig, characterized in that the lead terminal and the spring pin are in contact with each other when a force is applied from a portion thereof.・
JP56123421A 1981-08-06 1981-08-06 Package measuring jig for semiconductor Granted JPS5824871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56123421A JPS5824871A (en) 1981-08-06 1981-08-06 Package measuring jig for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56123421A JPS5824871A (en) 1981-08-06 1981-08-06 Package measuring jig for semiconductor

Publications (2)

Publication Number Publication Date
JPS5824871A true JPS5824871A (en) 1983-02-14
JPH0427507B2 JPH0427507B2 (en) 1992-05-12

Family

ID=14860131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56123421A Granted JPS5824871A (en) 1981-08-06 1981-08-06 Package measuring jig for semiconductor

Country Status (1)

Country Link
JP (1) JPS5824871A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258778U (en) * 1985-09-30 1987-04-11
JPS6258779U (en) * 1985-09-30 1987-04-11
JPS6258780U (en) * 1985-09-30 1987-04-11
JPH0310273U (en) * 1989-06-15 1991-01-31
JPH05209933A (en) * 1992-01-29 1993-08-20 Nec Corp Contactor incorporating mechanism for extracting and positioning object to be measured, and automatic sorting device using thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54119667U (en) * 1978-02-10 1979-08-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54119667U (en) * 1978-02-10 1979-08-22

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258778U (en) * 1985-09-30 1987-04-11
JPS6258779U (en) * 1985-09-30 1987-04-11
JPS6258780U (en) * 1985-09-30 1987-04-11
JPH0310273U (en) * 1989-06-15 1991-01-31
JPH05209933A (en) * 1992-01-29 1993-08-20 Nec Corp Contactor incorporating mechanism for extracting and positioning object to be measured, and automatic sorting device using thereof

Also Published As

Publication number Publication date
JPH0427507B2 (en) 1992-05-12

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